loadpatents
name:-0.0065140724182129
name:-0.0064570903778076
name:-0.00047206878662109
Guo; Yao-Wen Patent Filings

Guo; Yao-Wen

Patent Applications and Registrations

Patent applications and USPTO patent grants for Guo; Yao-Wen.The latest application filed is for "system and method for improving immersion scanner overlay performance".

Company Profile
0.6.5
  • Guo; Yao-Wen - Hsin-Chu TW
  • Guo; Yao-Wen - Chaojhou Township Pingtung County TW
  • Guo; Yao-Wen - Pingtung County TW
  • Guo; Yao-Wen - Chaozhou Town TW
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Lithography scanner throughput
Grant 9,529,275 - Lin , et al. December 27, 2
2016-12-27
System and method for improving immersion scanner overlay performance
Grant 8,199,314 - Peng , et al. June 12, 2
2012-06-12
System And Method For Improving Immersion Scanner Overlay Performance
App 20120045192 - PENG; Jui-Cheng ;   et al.
2012-02-23
System and method for improving immersion scanner overlay performance
Grant 8,068,208 - Peng , et al. November 29, 2
2011-11-29
Methods and systems for forming semiconductor structures
Grant 7,787,977 - Lin , et al. August 31, 2
2010-08-31
Method and system for improving critical dimension uniformity
Grant 7,571,021 - Lin , et al. August 4, 2
2009-08-04
Lithography Scanner Throughput
App 20080198351 - Lin; Chien-Hsun ;   et al.
2008-08-21
Method and System for Improving Critical Dimension Uniformity
App 20080195243 - Lin; Chun-Hung ;   et al.
2008-08-14
System and Method For Improving Immersion Scanner Overlay Performance
App 20080129969 - Peng; Jui-Chung ;   et al.
2008-06-05
Methods And Systems For Forming Semiconductor Structures
App 20080125902 - Lin; Chien-Hsun ;   et al.
2008-05-29

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