| Patent | Date |
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High throughput vacuum deposition sources and system
Grant 11,359,284 - Guo June 14, 2 | 2022-06-14 |
Inverted Cylindrical Magnetron (ICM) System and Methods of Use
App 20210375573 - Xu; Tianzong ; et al. | 2021-12-02 |
High throughput Vacuum Deposition Sources and System
App 20210164099 - Guo; George Xinsheng | 2021-06-03 |
Inverted cylindrical magnetron (ICM) system and methods of use
Grant 11,004,644 - Xu , et al. May 11, 2 | 2021-05-11 |
High throughput vacuum deposition sources and system
Grant 10,954,598 - Guo March 23, 2 | 2021-03-23 |
Substrate Processing System
App 20200411341 - Guo; George Xinsheng | 2020-12-31 |
High throughput vacuum deposition sources and system thereof
App 20200109473 - Guo; George Xinsheng | 2020-04-09 |
Substrates handling in a deposition system
Grant 10,340,166 - Guo | 2019-07-02 |
High throughput Vacuum Deposition Sources and System
App 20180245217 - Guo; George Xinsheng | 2018-08-30 |
Inverted Cylindrical Magnetron (icm) System And Methods Of Use
App 20170301502 - Xu; Tianzong ; et al. | 2017-10-19 |
Polygon Deposition Sources With High Materials Utilization And Increased Time Between Chamber Cleanings
App 20170275762 - Guo; George Xinsheng | 2017-09-28 |
Substrates Handling In A Deposition System
App 20170144186 - Guo; George Xinsheng | 2017-05-25 |
Inverted cylindrical magnetron (ICM) system and methods of use
Grant 9,640,359 - Xu , et al. May 2, 2 | 2017-05-02 |
Inverted Cylindrical Magnetron (icm) System And Methods Of Use
App 20140042022 - Xu; Tianzong ; et al. | 2014-02-13 |
Multi-chamber vacuum processing and transfer system
Grant 7,874,783 - Guo , et al. January 25, 2 | 2011-01-25 |
Magnetron source for deposition on large substrates
Grant 7,638,022 - Guo December 29, 2 | 2009-12-29 |
Single-process-chamber deposition system
Grant 7,588,669 - Guo September 15, 2 | 2009-09-15 |
Multi-chamber Vacuum Processing And Transfer System
App 20090180847 - Guo; George Xinsheng ; et al. | 2009-07-16 |
Vacuum processing and transfer system
Grant 7,534,080 - Guo , et al. May 19, 2 | 2009-05-19 |
Method and system for controlled material removal by electrochemical polishing
App 20090020437 - Basol; Bulent M. ; et al. | 2009-01-22 |
Long-life workpiece surface influencing device structure and manufacturing method
Grant 7,399,516 - Basol , et al. July 15, 2 | 2008-07-15 |
Magnetron source for deposition on large substrates
App 20070199817 - Guo; George Xinsheng | 2007-08-30 |
Magnetron source having increased usage life
App 20070108041 - Guo; George Xinsheng | 2007-05-17 |
Vacuum processing and transfer system
App 20070059127 - Guo; George Xinsheng ; et al. | 2007-03-15 |
Single-process-chamber deposition system
App 20070017799 - Guo; George Xinsheng | 2007-01-25 |
Article for polishin substrate surface
App 20050287932 - Basol, Bulent M. ; et al. | 2005-12-29 |
System and method for applying constant pressure during electroplating and electropolishing
App 20050101138 - Guo, George Xinsheng ; et al. | 2005-05-12 |
Electron optics for multi-beam electron beam lithography tool
App 20040119021 - Parker, N. William ; et al. | 2004-06-24 |
Long-life workpiece surface influencing device structure and manufacturing method
App 20030217927 - Basol, Bulent M. ; et al. | 2003-11-27 |
Electron optics for multi-beam electron beam lithography tool
Grant 6,617,587 - Parker , et al. September 9, 2 | 2003-09-09 |
Electron Optics For Multi-beam Electron Beam Lithography Tool
App 20030085360 - Parker, N. William ; et al. | 2003-05-08 |
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