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Patent applications and USPTO patent grants for Gunaji; Akshay.The latest application filed is for "multi-pressure bipolar electrostatic chucking".
Patent | Date |
---|---|
Multi-pressure Bipolar Electrostatic Chucking App 20220122873 - Li; Jian ;   et al. | 2022-04-21 |
Heater Assembly with Process Gap Control for Batch Processing Chambers App 20220068674 - Gunaji; Akshay ;   et al. | 2022-03-03 |
Dynamic Electrical and Fluid Delivery System with Indexing Motion for Batch Processing Chambers App 20220071037 - Gunaji; Akshay ;   et al. | 2022-03-03 |
Asymmetric Exhaust Pumping Plate Design For A Semiconductor Processing Chamber App 20210388495 - Gunaji; Akshay ;   et al. | 2021-12-16 |
Multizone Rotatable Diffuser Apparatus App 20190309418 - GUNAJI; Akshay ;   et al. | 2019-10-10 |
Multizone Gas Distribution Apparatus App 20190311887 - GUNAJI; Akshay ;   et al. | 2019-10-10 |
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