| Patent | Date |
|---|
Method to attain low defectivity fully silicided gates
Grant 8,273,645 - Visokay , et al. September 25, 2 | 2012-09-25 |
By-die-exposure for patterning of holes in edge die
Grant 8,273,523 - Detweiler , et al. September 25, 2 | 2012-09-25 |
Method To Attain Low Defectivity Fully Silicided Gates
App 20110097884 - VISOKAY; Mark Robert ; et al. | 2011-04-28 |
Close proximity scanning surface contamination analyzer
Grant 7,897,410 - Collins , et al. March 1, 2 | 2011-03-01 |
Structures for testing and locating defects in integrated circuits
Grant 7,772,867 - Guldi , et al. August 10, 2 | 2010-08-10 |
Semiconductive device fabricated using subliming materials to form interlevel dielectrics
Grant 7,601,629 - Ramappa , et al. October 13, 2 | 2009-10-13 |
Adjustable lithography blocking device and method
Grant 7,598,507 - Chatterjee , et al. October 6, 2 | 2009-10-06 |
Method and apparatus for cassette integrity testing using a wafer sorter
Grant 7,596,456 - Mollenkopf , et al. September 29, 2 | 2009-09-29 |
Structures For Testing And Locating Defects In Integrated Circuits
App 20090212793 - Guldi; Richard L. ; et al. | 2009-08-27 |
Methods For Monitoring Implanter Performance
App 20090166564 - MOSER; BENJAMIN G. ; et al. | 2009-07-02 |
Close Proximity Scanning Surface Contamination Analyzer
App 20090153856 - Collins; Sean M. ; et al. | 2009-06-18 |
Test Structures For E-beam Testing Of Systematic And Random Defects In Integrated Circuits
App 20090102501 - Guldi; Richard L. ; et al. | 2009-04-23 |
Method for Manufacturing Microdevices or Integrated Circuits on Continuous Sheets
App 20090087938 - Ramappa; Deepak A. ; et al. | 2009-04-02 |
Ebeam inspection for detecting gate dielectric punch through and/or incomplete silicidation or metallization events for transistors having metal gate electrodes
App 20080176345 - Yu; Shaofeng ; et al. | 2008-07-24 |
By-die-exposure For Patterning Of Holes In Edge Die
App 20080160779 - Detweiler; Shangting ; et al. | 2008-07-03 |
System and method for exposure of partial edge die
Grant 7,374,866 - Atkinson , et al. May 20, 2 | 2008-05-20 |
System and method for analyzing a light beam of a wafer inspection tool or an exposure tool
App 20080056557 - Gagnon; J.E. Patrick ; et al. | 2008-03-06 |
Channel Selection Based On Program Content Attributes
App 20070288961 - GULDI; RICHARD L. ; et al. | 2007-12-13 |
Semiconductive device fabricated using subliming materials to form interlevel dielectrics
App 20070141829 - Ramappa; Deepak A. ; et al. | 2007-06-21 |
Methods for detecting structure dependent process defects
Grant 7,228,193 - Guldi , et al. June 5, 2 | 2007-06-05 |
Method and apparatus for cassette integrity testing using a wafer sorter
App 20070118300 - Mollenkopf; Kelly C. ; et al. | 2007-05-24 |
X-ray confocal defect detection systems and methods
Grant 7,212,607 - Rao , et al. May 1, 2 | 2007-05-01 |
Methods for detecting structure dependent process defects
App 20070038325 - Guldi; Richard L. ; et al. | 2007-02-15 |
Alignment mark for e-beam inspection of a semiconductor wafer
Grant 7,171,035 - Guldi , et al. January 30, 2 | 2007-01-30 |
Pretreatment for an electroplating process and an electroplating process in including the pretreatment
Grant 7,112,540 - Guldi , et al. September 26, 2 | 2006-09-26 |
System and method for exposure of partial edge die
App 20060078828 - Atkinson; Chris D. ; et al. | 2006-04-13 |
Method for intelligent sampling of particulates in exhaust lines
Grant 7,024,950 - Guldi , et al. April 11, 2 | 2006-04-11 |
Sensitive test structure for assessing pattern anomalies
App 20060033503 - Guldi; Richard L. ; et al. | 2006-02-16 |
In-situ randomization and recording of wafer processing order at process tools
Grant 6,975,920 - Kahn , et al. December 13, 2 | 2005-12-13 |
Sensitive test structure for assessing pattern anomalies
Grant 6,967,110 - Guldi , et al. November 22, 2 | 2005-11-22 |
Pretreatment for an electroplating process and an electroplating process in including the pretreatment
App 20050164496 - Guldi, Richard L. ; et al. | 2005-07-28 |
In-situ randomization and recording of wafer processing order at process tools
Grant 6,862,495 - Kahn , et al. March 1, 2 | 2005-03-01 |
System for in situ seed layer remediation
App 20050040046 - Frank, Aaron ; et al. | 2005-02-24 |
Error reduction in semiconductor processes
Grant 6,848,066 - Atkinson , et al. January 25, 2 | 2005-01-25 |
X-ray defect detection in integrated circuit metallization
Grant 6,834,117 - Rao , et al. December 21, 2 | 2004-12-21 |
Adjustable lithography blocking device and method
App 20040251429 - Chatterjee, Basab ; et al. | 2004-12-16 |
Sensitive test structure for assessing pattern anomalies
App 20040229388 - Guldi, Richard L. ; et al. | 2004-11-18 |
In-situ randomization and recording of wafer processing order at process tools
App 20040111180 - Kahn, Randolph W. ; et al. | 2004-06-10 |
In-situ randomization and recording of wafer processing order at process tools
App 20040111176 - Kahn, Randolph W. ; et al. | 2004-06-10 |
Semiconductor wafer edge marking
App 20040104361 - Guldi, Richard L. ; et al. | 2004-06-03 |
Alignment mark for e-beam inspection of a semiconductor wafer
App 20040086172 - Guldi, Richard L. ; et al. | 2004-05-06 |
Semiconductor wafer edge marking
Grant 6,710,364 - Guldi , et al. March 23, 2 | 2004-03-23 |
Error reduction in semiconductor processes
App 20040029029 - Atkinson, Chris D. ; et al. | 2004-02-12 |
System and method for electroplating fine geometries
Grant 6,689,686 - Guldi , et al. February 10, 2 | 2004-02-10 |
In-situ randomization and recording of wafer processing order at process tools
Grant 6,684,125 - Kahn , et al. January 27, 2 | 2004-01-27 |
Error reduction in semiconductor processes
Grant 6,645,684 - Atkinson , et al. November 11, 2 | 2003-11-11 |
Electroplater and method
App 20030116440 - Guldi, Richard L. ; et al. | 2003-06-26 |
Method for producing wafer notches with rounded corners and a tool therefor
App 20030089931 - Guldi, Richard L. ; et al. | 2003-05-15 |
Error reduction in semiconductor processes
App 20030068833 - Atkinson, Chris D. ; et al. | 2003-04-10 |
System and method for electroplating fine geometries
App 20030057099 - Guldi, Richard L. ; et al. | 2003-03-27 |
Programmable physical action during integrated circuit wafer cleanup
App 20030034046 - Guldi, Richard L. | 2003-02-20 |
Programmable physical action during integrated circuit wafer cleanup
Grant 6,488,037 - Guldi December 3, 2 | 2002-12-03 |
Semiconductor wafer edge marking
App 20020153620 - Guldi, Richard L. ; et al. | 2002-10-24 |
In-situ randomization and recording of wafer processing order at process tools
App 20020087230 - Kahn, Randolph W. ; et al. | 2002-07-04 |
Method for intelligent sampling of particulates in exhaust lines
App 20020062701 - Guldi, Richard L. ; et al. | 2002-05-30 |
Method and apparatus for in-situ reticle cleaning at photolithography tool
Grant 6,395,102 - Salamati-Saradh , et al. May 28, 2 | 2002-05-28 |
Method and system for reducing thickness of spin-on glass on semiconductor wafers
App 20020058466 - Curran, David M. ; et al. | 2002-05-16 |
Apparatus for in-situ reticle cleaning at photolithography tool
Grant 6,305,097 - Salamati-Saradh , et al. October 23, 2 | 2001-10-23 |
Apparatus and method for cleaning a vertical furnace pedestal and cap
App 20010029681 - Pressnall, William ; et al. | 2001-10-18 |
Semiconductor cleaning solution and method
Grant 6,267,122 - Guldi , et al. July 31, 2 | 2001-07-31 |
Method for producing wafer notches with rounded corners and a tool therefor
App 20010008154 - Guldi, Richard L. ; et al. | 2001-07-19 |
Two step oxide removal for memory cells
Grant 6,174,817 - Doshi , et al. January 16, 2 | 2001-01-16 |
Automated substrate pattern recognition system
Grant 6,067,163 - Guldi , et al. May 23, 2 | 2000-05-23 |
System and method for cleaning nozzle delivering spin-on-glass to substrate
Grant 5,958,517 - Poag , et al. September 28, 1 | 1999-09-28 |
Method and apparatus for verifying the presence of a material applied to a substrate
Grant 5,841,543 - Guldi , et al. November 24, 1 | 1998-11-24 |
Enhanced high pressure cleansing system for wafer handling implements
Grant 5,839,455 - Turner , et al. November 24, 1 | 1998-11-24 |
Method for rotational wafer cleaning in solution
Grant 5,698,040 - Guldi , et al. December 16, 1 | 1997-12-16 |
Method of fabrication of a semiconductor device having a tapered implanted region
Grant 5,576,230 - Guldi November 19, 1 | 1996-11-19 |
Enhanced cleansing process for wafer handling implements
Grant 5,551,165 - Turner , et al. September 3, 1 | 1996-09-03 |
Tool for cleaning LPCVD furnace tube
Grant 5,535,471 - Guldi July 16, 1 | 1996-07-16 |
Method for reducing dopant diffusion
Grant 5,525,529 - Guldi June 11, 1 | 1996-06-11 |
Apparatus for wafer cleaning with rotation
Grant 5,520,205 - Guldi , et al. May 28, 1 | 1996-05-28 |
Method for improving gate oxide integrity using low temperature oxidation during source/drain anneal
Grant 5,334,556 - Guldi August 2, 1 | 1994-08-02 |
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