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Patent applications and USPTO patent grants for Guiney; Timothy J..The latest application filed is for "methods and apparatus for monitoring a process in a plasma processing system by measuring self-bias voltage".
Patent | Date |
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Methods and apparatus for monitoring a process in a plasma processing system by measuring self-bias voltage Grant 7,323,116 - Guiney , et al. January 29, 2 | 2008-01-29 |
Methods and apparatus for monitoring a process in a plasma processing system by measuring impedance App 20060065631 - Cheng; Chia-Cheng ;   et al. | 2006-03-30 |
Methods and apparatus for monitoring a process in a plasma processing system by measuring self-bias voltage App 20060065623 - Guiney; Timothy J. ;   et al. | 2006-03-30 |
Methods and apparatus for monitoring a process in a plasma processing system by measuring a plasma frequency App 20060065632 - Cheng; Chia-Cheng ;   et al. | 2006-03-30 |
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