GUI; Zhe

Patent Applications and Registrations

Patent applications and USPTO patent grants for GUI; Zhe.The latest application filed is for "conformal deposition of silicon carbide films".

Company Profile

6.8.13

GUI; Zhe - Beaverton OR
GUI; Zhe - Tigard OR

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Conformal Deposition Of Silicon Carbide Films App 20220148875 - VARADARAJAN; Bhadri N. ; et al.	2022-05-12
Conformal deposition of silicon carbide films Grant 11,264,234 - Varadarajan , et al. March 1, 2	2022-03-01
Integrated Showerhead With Thermal Control For Delivering Radical And Precursor Gas To A Downstream Chamber To Enable Remote Plasma Film Deposition App 20210371982 - BATZER; Rachel ; et al.	2021-12-02
Integrated Showerhead With Improved Hole Pattern For Delivering Radical And Precursor Gas To A Downstream Chamber To Enable Remote Plasma Film Deposition App 20210269918 - BATZER; Rachel ; et al.	2021-09-02
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Grant 11,101,164 - Batzer , et al. August 24, 2	2021-08-24
Integrated showerhead with improved hole pattern for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Grant 11,015,247 - Batzer , et al. May 25, 2	2021-05-25
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Grant 10,604,841 - Batzer , et al.	2020-03-31
Conformal Deposition Of Silicon Carbide Films App 20190259604 - Varadarajan; Bhadri N. ; et al.	2019-08-22
Conformal deposition of silicon carbide films Grant 10,325,773 - Varadarajan , et al.	2019-06-18
Integrated Showerhead With Improved Hole Pattern For Delivering Radical And Precursor Gas To A Downstream Chamber To Enable Remo App 20190177846 - BATZER; Rachel ; et al.	2019-06-13
Methods and apparatus for depositing silicon oxide on metal layers Grant 10,319,582 - Varadarajan , et al.	2019-06-11
Remote plasma based deposition of graded or multi-layered silicon carbide film Grant 10,297,442 - Varadarajan , et al.	2019-05-21
Conformal Deposition Of Silicon Carbide Films Using Heterogeneous Precursor Interaction App 20180347035 - Weimer; Matthew Scott ; et al.	2018-12-06
Remote Plasma Based Deposition Of Silicon Carbide Films Using Silicon-containing And Carbon-containing Precursors App 20180330945 - Varadarajan; Bhadri N. ; et al.	2018-11-15
Methods And Apparatus For Depositing Silicon Oxide On Metal Layers App 20180315597 - Varadarajan; Bhadri N. ; et al.	2018-11-01
Wafer Level Uniformity Control In Remote Plasma Film Deposition App 20180251893 - Hohn; Geoffrey ; et al.	2018-09-06
Remote Plasma Based Deposition Of Graded Or Multi-layered Silicon Carbide Film App 20180240664 - Varadarajan; Bhadri N. ; et al.	2018-08-23
Integrated Showerhead With Thermal Control For Delivering Radical And Precursor Gas To A Downstream Chamber To Enable Remote Plasma Film Deposition App 20180163305 - Batzer; Rachel ; et al.	2018-06-14
Remote Plasma Based Deposition Of Graded Or Multi-layered Silicon Carbide Film App 20180096842 - Varadarajan; Bhadri N. ; et al.	2018-04-05
Densification of silicon carbide film using remote plasma treatment Grant 9,837,270 - Varadarajan , et al. December 5, 2	2017-12-05
Conformal Deposition Of Silicon Carbide Films App 20150303056 - Varadarajan; Bhadri N. ; et al.	2015-10-22

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