loadpatents
Patent applications and USPTO patent grants for Gui; Cheng-Qun.The latest application filed is for "lithographic apparatus, programmable patterning device and lithographic method".
Patent | Date |
---|---|
Lithographic apparatus and method Grant 9,383,195 - De Laat , et al. July 5, 2 | 2016-07-05 |
Lithographic apparatus, programmable patterning device and lithographic method Grant 9,335,638 - De Jager , et al. May 10, 2 | 2016-05-10 |
Lithographic apparatus and method Grant 8,982,318 - Iosad , et al. March 17, 2 | 2015-03-17 |
Lithographic apparatus and device manufacturing method Grant RE45,284 - Gui December 9, 2 | 2014-12-09 |
Lithographic apparatus and device manufacturing method Grant 8,675,175 - George , et al. March 18, 2 | 2014-03-18 |
Lithographic Apparatus, Programmable Patterning Device And Lithographic Method App 20140055764 - DE JAGER; Pieter Willem Herman ;   et al. | 2014-02-27 |
Lithographic apparatus and method Grant 8,576,374 - Best , et al. November 5, 2 | 2013-11-05 |
Lithographic apparatus, programmable patterning device and lithographic method Grant 8,531,648 - De Jager , et al. September 10, 2 | 2013-09-10 |
Lithographic Apparatus and Device Manufacturing Method App 20130201466 - GEORGE; Richard Alexander ;   et al. | 2013-08-08 |
Lithographic apparatus and device manufacturing method Grant 8,502,954 - Van Der Feltz , et al. August 6, 2 | 2013-08-06 |
Lithographic apparatus and device manufacturing method Grant 8,395,755 - George , et al. March 12, 2 | 2013-03-12 |
Lithographic apparatus and device manufacturing method Grant 8,390,787 - Gui , et al. March 5, 2 | 2013-03-05 |
Lithographic apparatus and method Grant 8,383,325 - Iosad , et al. February 26, 2 | 2013-02-26 |
Lithographic Apparatus And Method App 20120281192 - De Laat; Wilhelmus Johannes Maria ;   et al. | 2012-11-08 |
Lithographic apparatus and device manufacturing method Grant RE43,515 - Gui July 17, 2 | 2012-07-17 |
Lithographic method and carrier substrate Grant 8,029,973 - De Laat , et al. October 4, 2 | 2011-10-04 |
Lithographic Apparatus, Programmable Patterning Device And Lithographic Method App 20110188016 - De Jager; Pieter Willem Herman ;   et al. | 2011-08-04 |
Lithographic apparatus and device manufacturing method Grant 7,911,586 - Gui , et al. March 22, 2 | 2011-03-22 |
Lithographic method and patterning device Grant 7,879,514 - Phillipps , et al. February 1, 2 | 2011-02-01 |
Lithographic Apparatus And Method App 20100081072 - IOSAD; Nikolay Nikolaevich ;   et al. | 2010-04-01 |
Lithographic apparatus and device manufacturing method Grant 7,684,009 - De Jager , et al. March 23, 2 | 2010-03-23 |
Lithographic Apparatus And Method App 20100068416 - Iosad; Nikolay Nikolaevich ;   et al. | 2010-03-18 |
Lithographic Apparatus and Device Manufacturing Method App 20100014059 - Van Der Feltz; Gustaaf Willem ;   et al. | 2010-01-21 |
Large field of view projection optical system with aberration correctability Grant 7,643,128 - Harned , et al. January 5, 2 | 2010-01-05 |
Lithographic Apparatus and Device Manufacturing Method App 20090284720 - George; Richard Alexander ;   et al. | 2009-11-19 |
Scanning lithographic apparatus and device manufacturing method Grant 7,609,362 - De Jager , et al. October 27, 2 | 2009-10-27 |
Lithographic Apparatus And Method App 20090237635 - Best; Keith Frank ;   et al. | 2009-09-24 |
Lithographic Apparatus and Device Manufacturing Method App 20090213353 - Gui; Cheng-Qun ;   et al. | 2009-08-27 |
Lithographic apparatus and device manufacturing method Grant 7,576,834 - George , et al. August 18, 2 | 2009-08-18 |
Lithographic apparatus and device manufacturing method Grant 7,567,340 - Gui , et al. July 28, 2 | 2009-07-28 |
Lithographic apparatus and device manufacturing method Grant 7,561,251 - Van Der Feltz , et al. July 14, 2 | 2009-07-14 |
Lithographic Method And Carrier Substrate App 20090170025 - DE LAAT; Wilhelmus Johannes Maria ;   et al. | 2009-07-02 |
Lithographic apparatus and device manufacturing method Grant 7,522,266 - Gui , et al. April 21, 2 | 2009-04-21 |
Optical position assessment apparatus and method Grant 7,477,403 - Gui , et al. January 13, 2 | 2009-01-13 |
Method and apparatus for locating and/or forming bumps Grant 7,468,291 - Gui , et al. December 23, 2 | 2008-12-23 |
Lithographic apparatus, device manufacturing method, and substrate table Grant 7,440,081 - Gui , et al. October 21, 2 | 2008-10-21 |
Lithographic apparatus and device manufacturing method Grant 7,428,040 - Gui , et al. September 23, 2 | 2008-09-23 |
Projection system for a lithographic apparatus Grant 7,426,076 - Gui , et al. September 16, 2 | 2008-09-16 |
Lithographic apparatus and device manufacturing method App 20080218718 - George; Richard Alexander ;   et al. | 2008-09-11 |
Large field of view 2X magnification projection optical system for FPD manufacture Grant 7,405,802 - Harned , et al. July 29, 2 | 2008-07-29 |
Optical position assessment apparatus and method Grant 7,388,663 - Gui June 17, 2 | 2008-06-17 |
Lithographic apparatus and device manufacturing method Grant 7,385,675 - George , et al. June 10, 2 | 2008-06-10 |
Lithographic apparatus and method App 20080118876 - Gui; Cheng-Qun ;   et al. | 2008-05-22 |
Lithographic apparatus and method App 20080117402 - Best; Keith Frank ;   et al. | 2008-05-22 |
Lithographic apparatus and device manufacturing method App 20080085462 - Best; Keith Frank ;   et al. | 2008-04-10 |
Measuring the bonding of bonded substrates App 20080083818 - Best; Keith Frank ;   et al. | 2008-04-10 |
Lithographic apparatus and device manufacturing method Grant 7,333,177 - Gui February 19, 2 | 2008-02-19 |
Lithographic method and patterning device App 20080032203 - Phillipps; Geoffrey Norman ;   et al. | 2008-02-07 |
Lithographic apparatus and device manufacturing method Grant 7,324,186 - Gui , et al. January 29, 2 | 2008-01-29 |
Method and apparatus for locating and/or forming bumps App 20070265792 - Gui; Cheng-Qun ;   et al. | 2007-11-15 |
Lithographic Apparatus and Device Manufacturing Method App 20070242246 - GUI; Cheng-Qun ;   et al. | 2007-10-18 |
Lithographic apparatus and device manufacturing method App 20070206172 - Gui; Cheng-Qun ;   et al. | 2007-09-06 |
Large field of view projection optical system with aberration correctability App 20070195304 - Harned; Robert D. ;   et al. | 2007-08-23 |
Method of calibrating a lithographic apparatus, alignment method, computer program, data storage medium, lithographic apparatus, and device manufacturing method Grant 7,253,884 - Van Buel , et al. August 7, 2 | 2007-08-07 |
Lithographic apparatus and device manufacturing method Grant 7,251,020 - Gui July 31, 2 | 2007-07-31 |
Lithographic apparatus and device manufacturing method App 20070109510 - De Jager; Pieter Willem Herman ;   et al. | 2007-05-17 |
Lithographic apparatus and device manufacturing method Grant 7,202,939 - Gui , et al. April 10, 2 | 2007-04-10 |
Alignment tool, a lithographic apparatus, an alignment method, a device manufacturing method and device manufactured thereby Grant 7,193,231 - Lof , et al. March 20, 2 | 2007-03-20 |
Lithographic apparatus and device manufacturing method Grant 7,190,434 - Gui , et al. March 13, 2 | 2007-03-13 |
Lithographic apparatus and device manufacturing method App 20070046919 - Gui; Cheng-Qun ;   et al. | 2007-03-01 |
Lithographic apparatus having an adjustable projection system and device manufacturing method Grant 7,184,124 - Harned , et al. February 27, 2 | 2007-02-27 |
Lithographic apparatus and device manufacturing method Grant 7,158,208 - De Jager , et al. January 2, 2 | 2007-01-02 |
Large field of view protection optical system with aberration correctability for flat panel displays Grant 7,158,215 - Harned , et al. January 2, 2 | 2007-01-02 |
Lithographic apparatus and device manufacturing method App 20060256309 - Gui; Cheng-Qun ;   et al. | 2006-11-16 |
Lithographic apparatus and device manufacturing method Grant 7,133,118 - Gui , et al. November 7, 2 | 2006-11-07 |
Lithographic apparatus and device manufacturing method Grant 7,116,402 - Gui October 3, 2 | 2006-10-03 |
Lithographic apparatus Grant 7,084,955 - Gui , et al. August 1, 2 | 2006-08-01 |
Lithographic apparatus and device manufacturing method Grant 7,081,947 - Gui , et al. July 25, 2 | 2006-07-25 |
Projection system for a lithograhic apparatus App 20060139745 - Gui; Cheng-Qun ;   et al. | 2006-06-29 |
Lithographic apparatus and device manufacturing method App 20060132750 - Gui; Cheng-Qun ;   et al. | 2006-06-22 |
Lithographic apparatus Grant 7,064,807 - Gui , et al. June 20, 2 | 2006-06-20 |
Lithographic apparatus and device manufacturing method App 20060114446 - Gui; Cheng-Qun | 2006-06-01 |
Lithographic apparatus, device manufacturing method, and substrate table App 20060098176 - Gui; Cheng-Qun ;   et al. | 2006-05-11 |
Lithographic apparatus and device manufacturing method App 20060098175 - De Jager; Pieter Willem Herman ;   et al. | 2006-05-11 |
Lithographic apparatus having an adjustable projection system and device manufacturing method App 20060092393 - Harmed; Robert D. ;   et al. | 2006-05-04 |
Optical position assessment apparatus and method App 20060092419 - Gui; Cheng-Qun | 2006-05-04 |
Lithographic apparatus and device manufacturing method App 20060023192 - Gui; Cheng-Qun | 2006-02-02 |
Lithographic apparatus and device manufacturing method App 20060001847 - De Jager; Pieter Willem Herman ;   et al. | 2006-01-05 |
Optical position assessment apparatus and method App 20050275840 - Gui, Cheng-Qun ;   et al. | 2005-12-15 |
Lithographic apparatus and device manufacturing method Grant 6,967,711 - Gui November 22, 2 | 2005-11-22 |
Lithographic apparatus and device manufacturing method App 20050243298 - de Jager, Pieter Willem Herman ;   et al. | 2005-11-03 |
Lithographic apparatus and device manufacturing App 20050243295 - de Jager, Pieter Willem Herman ;   et al. | 2005-11-03 |
Large field of view 2X magnification projection optical system for FPD manufacture App 20050237505 - Harned, Robert D. ;   et al. | 2005-10-27 |
Lithographic apparatus and device manufacturing method App 20050213067 - Van Der Feltz, Gustaaf Willem ;   et al. | 2005-09-29 |
Lithographic apparatus and device manufacturing method App 20050200820 - Gui, Cheng-Qun | 2005-09-15 |
Lithographic apparatus and device manufacturing method App 20050200821 - Gui, Cheng-Qun | 2005-09-15 |
Lithographic apparatus and device manufacturing method App 20050190353 - Gui, Cheng-Qun ;   et al. | 2005-09-01 |
Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methods Grant 6,936,385 - Lof , et al. August 30, 2 | 2005-08-30 |
Lithographic apparatus and device manufacturing method App 20050179882 - Gui, Cheng-Qun ;   et al. | 2005-08-18 |
Lithographic apparatus and device manufacturing method App 20050179884 - Gui, Cheng-Qun ;   et al. | 2005-08-18 |
Lithographic apparatus, alignment method and device manufacturing method Grant 6,914,664 - Best , et al. July 5, 2 | 2005-07-05 |
Method of calibrating a lithographic apparatus, alignment method, computer program, data storage medium, lithographic apparatus, and device manufacturing method App 20050018159 - Van Buel, Henricus Wilhelmus Maria ;   et al. | 2005-01-27 |
Lithographic apparatus and device manufacturing method App 20050012916 - Van Der Mast, Karel Diederick ;   et al. | 2005-01-20 |
Lithographic apparatus and device manufacturing method App 20050007572 - George, Richard Alexander ;   et al. | 2005-01-13 |
Large field of view protection optical system with aberration correctability for flat panel displays App 20040263429 - Harned, Robert D. ;   et al. | 2004-12-30 |
Lithographic apparatus App 20040201833 - Gui, Cheng-Qun ;   et al. | 2004-10-14 |
Lithographic apparatus App 20040174511 - Gui, Cheng-Qun ;   et al. | 2004-09-09 |
Lithographic apparatus Grant 6,768,539 - Gui , et al. July 27, 2 | 2004-07-27 |
Alignment tool, a lithographic apparatus, an alignment method, a device manufacturing method and device manufactured thereby App 20040108466 - Lof, Joeri ;   et al. | 2004-06-10 |
Lithographic apparatus, alignment method and device manufacturing method App 20030227604 - Best, Keith Frank ;   et al. | 2003-12-11 |
Calibration methods, calibration substrates, lithographic apparatus and device manufacturing methods App 20030224262 - Lof, Joeri ;   et al. | 2003-12-04 |
Lithographic apparatus App 20020109825 - Gui, Cheng-Qun ;   et al. | 2002-08-15 |
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