Guerrero; Douglas J.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Guerrero; Douglas J..The latest application filed is for "underlayers for euv lithography".

Company Profile

2.21.22

Guerrero; Douglas J. - Tombeek BE
Guerrero; Douglas J. - Rolla MO US

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Underlayers for EUV lithography Grant 11,361,967 - Liang , et al. June 14, 2	2022-06-14
Underlayers For Euv Lithography App 20210057219 - Liang; Yichen ; et al.	2021-02-25
Adhesion Layers For Euv Lithography App 20190385837 - Chacko; Andrea M. ; et al.	2019-12-19
Dual-layer light-sensitive developer-soluble bottom anti-reflective coatings for 193-nm lithography Grant 9,638,999 - Meador , et al. May 2, 2	2017-05-02
Spin-on spacer materials for double- and triple-patterning lithography Grant 9,640,396 - Lin , et al. May 2, 2	2017-05-02
Silicon hardmask layer for directed self-assembly Grant 9,249,013 - Wang , et al. February 2, 2	2016-02-02
Anti-reflective coatings using vinyl ether crosslinkers Grant 9,110,372 - Guerrero , et al. August 18, 2	2015-08-18
Silicon Hardmask Layer For Directed Self-assembly App 20130273330 - Wang; Yubao ; et al.	2013-10-17
Underlayers for EUV lithography Grant 8,257,910 - Guerrero , et al. September 4, 2	2012-09-04
Photoimageable branched polymer Grant 8,206,893 - Xu , et al. June 26, 2	2012-06-26
Anti-reflective Coatings Using Vinyl Ether Crosslinkers App 20120156613 - Guerrero; Douglas J. ; et al.	2012-06-21
Photosensitive hardmask for microlithography Grant 7,939,244 - Xu , et al. May 10, 2	2011-05-10
Anti-reflective imaging layer for multiple patterning process Grant 7,914,974 - Guerrero , et al. March 29, 2	2011-03-29
Spin-on Spacer Materials For Double- And Triple-patterning Lithography App 20100170868 - Lin; Qin ; et al.	2010-07-08
Anti-reflective Coatings Using Vinyl Ether Crosslinkers App 20090317747 - Guerrero; Douglas J. ; et al.	2009-12-24
Photosensitive hardmask for microlithography App 20090297784 - Xu; Hao ; et al.	2009-12-03
Anti-reflective coatings using vinyl ether crosslinkers Grant 7,601,483 - Guerrero , et al. October 13, 2	2009-10-13
Dual-layer Light-sensitive Developer-soluble Bottom Anti-reflective Coatings For 193-nm Lithography App 20090226672 - Meador; Jim D. ; et al.	2009-09-10
Photoimageable Branched Polymer App 20090111057 - Xu; Hao ; et al.	2009-04-30
Anti-reflective Imaging Layer For Multiple Patterning Process App 20080044772 - Guerrero; Douglas J. ; et al.	2008-02-21
Anti-reflective Coatings Using Vinyl Ether Crosslinkers App 20070207406 - Guerrero; Douglas J. ; et al.	2007-09-06
Anti-reflective Coatings Using Vinyl Ether Crosslinkers App 20070117049 - Guerrero; Douglas J. ; et al.	2007-05-24
Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition Grant 7,132,219 - Sabnis , et al. November 7, 2	2006-11-07
Photosensitive bottom anti-reflective coatings Grant 7,108,958 - Guerrero September 19, 2	2006-09-19
Anti-reflective coatings using vinyl ether crosslinkers App 20050255410 - Guerrero, Douglas J. ; et al.	2005-11-17
Organic polymeric antireflective coatings deposited by chemical vapor deposition Grant 6,936,405 - Sabnis , et al. August 30, 2	2005-08-30
Organic polymeric antireflective coatings deposited by chemical vapor deposition Grant 6,900,000 - Sabnis , et al. May 31, 2	2005-05-31
Organic polymeric antireflective coatings deposited by chemical vapor deposition Grant 6,869,747 - Sabnis , et al. March 22, 2	2005-03-22
Anti-reflective coating conformality control Grant 6,852,473 - Roberts , et al. February 8, 2	2005-02-08
Photosensitive bottom anti-reflective coatings App 20040219456 - Guerrero, Douglas J.	2004-11-04
Anti-reflective coating conformality control App 20040058278 - Roberts, William ; et al.	2004-03-25
Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition App 20030219541 - Sabnis, Ram W. ; et al.	2003-11-27
Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition App 20030064608 - Sabnis, Ram W. ; et al.	2003-04-03
Polymeric antireflective coatings deposited by plasma enhanced chemical vapor deposition App 20030054117 - Sabnis, Ram W. ; et al.	2003-03-20
Organic polymeric antireflective coatings deposited by chemical vapor deposition App 20030049548 - Sabnis, Ram W. ; et al.	2003-03-13
Organic polymeric antireflective coatings deposited by chemical vapor deposition App 20030049566 - Sabnis, Ram W. ; et al.	2003-03-13
Organic polymeric antireflective coatings deposited by chemical vapor deposition App 20030031957 - Sabnis, Ram W. ; et al.	2003-02-13
Highly plasma etch-resistant photoresist composition containing a photosensitive polymeric titania precursor Grant 6,303,270 - Flaim , et al. October 16, 2	2001-10-16
Organic polymeric antireflective coatings deposited by chemical vapor deposition App 20010021481 - Sabnis, Raw W. ; et al.	2001-09-13
Thermosetting anti-reflective coatings at deep ultraviolet Grant 5,919,599 - Meador , et al. July 6, 1	1999-07-06

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