| Patent | Date |
|---|
Bi-directional micromechanical latching linear actuator
Grant 6,607,305 - Fischer , et al. August 19, 2 | 2003-08-19 |
Bi-directional micromechanical latching linear actuator
App 20020181886 - Fischer, Kevin J. ; et al. | 2002-12-05 |
Photodiode arrays having minimized cross-talk between diodes
Grant 6,133,615 - Guckel , et al. October 17, 2 | 2000-10-17 |
Radiation mask adapted to be aligned with a photoresist layer and method of making the same
Grant 5,908,719 - Guckel , et al. June 1, 1 | 1999-06-01 |
Alignment method for multi-level deep x-ray lithography utilizing alignment holes and posts
Grant 5,866,281 - Guckel , et al. February 2, 1 | 1999-02-02 |
Lapping and polishing method and apparatus for planarizing photoresist and metal microstructure layers
Grant 5,718,618 - Guckel , et al. February 17, 1 | 1998-02-17 |
Method and apparatus for micromachining using hard X-rays
Grant 5,679,502 - Siddons , et al. October 21, 1 | 1997-10-21 |
Micromechanical magnetically actuated devices
Grant 5,644,177 - Guckel , et al. July 1, 1 | 1997-07-01 |
Formation of microstructures using a preformed photoresist sheet
Grant 5,576,147 - Guckel , et al. November 19, 1 | 1996-11-19 |
Opto-electro-mechanical device or filter, process for making, and sensors made therefrom
Grant 5,559,358 - Burns , et al. September 24, 1 | 1996-09-24 |
Formation of microstructures using a preformed photoresist sheet
Grant 5,496,668 - Guckel , et al. March 5, 1 | 1996-03-05 |
Formation of microstructures using a preformed photoresist sheet
Grant 5,378,583 - Guckel , et al. January 3, 1 | 1995-01-03 |
Micromachined differential pressure transducers
Grant 5,357,807 - Guckel , et al. October 25, 1 | 1994-10-25 |
Micromechanical magnetic devices
Grant 5,327,033 - Guckel , et al. July 5, 1 | 1994-07-05 |
Method of manufacturing micromechanical devices
Grant 5,206,983 - Guckel , et al. May 4, 1 | 1993-05-04 |
Method of producing micromachined differential pressure transducers
Grant 5,189,777 - Guckel , et al. March 2, 1 | 1993-03-02 |
Formation of microstructures by multiple level deep X-ray lithography with sacrificial metal layers
Grant 5,190,637 - Guckel March 2, 1 | 1993-03-02 |
Polysilicon resonating beam transducers and method of producing the same
Grant 5,188,983 - Guckel , et al. February 23, 1 | 1993-02-23 |
Polysilicon resonating beam transducers
Grant 5,090,254 - Guckel , et al. February 25, 1 | 1992-02-25 |
Formation of microstructures with removal of liquid by freezing and sublimation
Grant 5,013,693 - Guckel , et al. May 7, 1 | 1991-05-07 |
Sealed cavity semiconductor pressure transducers and method of producing the same
Grant 4,996,082 - Guckel , et al. February 26, 1 | 1991-02-26 |
Polysilicon thin film process
Grant 4,897,360 - Guckel , et al. January 30, 1 | 1990-01-30 |
Sealed cavity semiconductor pressure transducers and method of producing the same
Grant 4,744,863 - Guckel , et al. May 17, 1 | 1988-05-17 |
Velocity saturated strain sensitive semiconductor devices
Grant 4,658,279 - Guckel April 14, 1 | 1987-04-14 |
Process for producing an electrostatically deformable thin silicon membranes utilizing a two-stage diffusion step to form an etchant resistant layer
Grant 4,234,361 - Guckel , et al. November 18, 1 | 1980-11-18 |
Electrostatically deformable thin silicon membranes
Grant 4,203,128 - Guckel , et al. May 13, 1 | 1980-05-13 |
Chemical-sensitive field-effect transistor
Grant 4,180,771 - Guckel December 25, 1 | 1979-12-25 |
Wide-band Transmission Line Directional Coupler
Grant 3,775,561 - Guckel November 27, 1 | 1973-11-27 |
| 