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Micromechanical Oscillation System App 20220283427 - Tanguep Njiokep; Eugene Moliere ;   et al. | 2022-09-08 |
Micromechanical Oscillation System App 20220214536 - Grutzeck; Helmut ;   et al. | 2022-07-07 |
Linearized micromechanical sensor Grant 11,326,969 - Zehringer , et al. May 10, 2 | 2022-05-10 |
Micromechanical micromirror array and corresponding operating method Grant 11,307,404 - Grutzeck , et al. April 19, 2 | 2022-04-19 |
Micromechanical component having an oscillator, a method for the manufacture thereof, and a method for exciting a motion of an adjustable element about a rotational axis Grant 11,066,295 - Kaupmann , et al. July 20, 2 | 2021-07-20 |
Micromechanical pressure sensor Grant 11,060,937 - Lukacs , et al. July 13, 2 | 2021-07-13 |
Micromechanical component and method for producing a micromechanical component Grant 10,989,913 - Finn , et al. April 27, 2 | 2021-04-27 |
Micromirror device and method for operating a micromirror device Grant 10,871,646 - Schatz , et al. December 22, 2 | 2020-12-22 |
Micromechanical component and method for producing a micromechanical component Grant 10,866,407 - Maier , et al. December 15, 2 | 2020-12-15 |
Micromirror device having a mechanical stop Grant 10,795,149 - Grutzeck , et al. October 6, 2 | 2020-10-06 |
Micromechanical spring device and method for manufacturing a micromechanical spring device Grant 10,737,930 - Grutzeck , et al. A | 2020-08-11 |
Micromechanical Micromirror Array And Corresponding Operating Method App 20200249467 - Kind Code | 2020-08-06 |
Micromechanical component and method for producing a micromechanical component Grant 10,696,542 - Grutzeck , et al. June 30, 2 | 2020-06-30 |
Micromechanical component including diaphragm, manufacturing method for such a component and method for operating a pressure sensor Grant 10,647,568 - Grutzeck , et al. | 2020-05-12 |
Linearized Micromechanical Sensor App 20200088598 - Zehringer; Stefan ;   et al. | 2020-03-19 |
Mechanical component and manufacturing method for a mechanical component Grant 10,589,988 - Heinzelmann , et al. | 2020-03-17 |
Micromechanical Pressure Sensor App 20190376864 - Lukacs; Ferenc ;   et al. | 2019-12-12 |
Micromechanical Component Having An Oscillator, A Method For The Manufacture Thereof, And A Method For Exciting A Motion Of An A App 20190359478 - Kaupmann; Philip ;   et al. | 2019-11-28 |
Micromechanical component and method for adjusting an adjustable part simultaneously about two axes of rotation inclined in relation to one another Grant 10,488,650 - Grutzeck , et al. Nov | 2019-11-26 |
Micromechanical Component And Method For Producing A Micromechanical Component App 20190219814 - Finn; Andreas ;   et al. | 2019-07-18 |
Micromechanical Component Including Diaphragm, Manufacturing Method For Such A Component And Method For Operating A Pressure Sen App 20190194015 - Grutzeck; Helmut ;   et al. | 2019-06-27 |
Micromirror Device And Method For Operating A Micromirror Device App 20190179137 - Schatz; Frank ;   et al. | 2019-06-13 |
Micromechanical Component And Method For Producing A Micromechanical Component App 20190146210 - Maier; Daniel ;   et al. | 2019-05-16 |
Micromechanical component and production method for a micromechanical component Grant 10,246,318 - Grutzeck , et al. | 2019-04-02 |
Micromirror arrangement and projection device Grant 10,222,609 - Straub , et al. | 2019-03-05 |
Micromirror Device Having A Mechanical Stop App 20180341102 - Grutzeck; Helmut ;   et al. | 2018-11-29 |
Micromirror Grant 10,048,487 - Nitsche , et al. August 14, 2 | 2018-08-14 |
Micromirror device and projection device Grant 10,001,643 - Straub , et al. June 19, 2 | 2018-06-19 |
Micromechanical Spring Device And Method For Manufacturing A Micromechanical Spring Device App 20180155185 - GRUTZECK; Helmut ;   et al. | 2018-06-07 |
Micromechanical component and method for producing a micromechanical component Grant 9,979,269 - Muchow , et al. May 22, 2 | 2018-05-22 |
Micromechanical Component And Method For Producing A Micromechanical Component App 20180105416 - Grutzeck; Helmut ;   et al. | 2018-04-19 |
Micromechanical Component And Production Method For A Micromechanical Component App 20180072560 - Grutzeck; Helmut ;   et al. | 2018-03-15 |
Mirror system and projection device Grant 9,885,866 - Straub , et al. February 6, 2 | 2018-02-06 |
Micromechanical component having a diaphragm Grant 9,850,120 - Schiller , et al. December 26, 2 | 2017-12-26 |
Micromechanical Component and Method for Adjusting an Adjustable Part Simultaneously about Two Axes of Rotation Inclined in Relation to One Another App 20170343795 - Grutzeck; Helmut ;   et al. | 2017-11-30 |
Micromechanical component and corresponding test method for a micromechanical component Grant 9,764,945 - Reiss , et al. September 19, 2 | 2017-09-19 |
Micromechanically assembly, method for manufacturing a micromechanical assembly and method for operating a micromechanical assembly Grant 9,739,998 - Muchow , et al. August 22, 2 | 2017-08-22 |
Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting Grant 9,725,311 - Franz , et al. August 8, 2 | 2017-08-08 |
Micromirror Arrangement And Projection Device App 20170146792 - Straub; Rainer ;   et al. | 2017-05-25 |
Micromirror Device And Projection Device App 20170108693 - Straub; Rainer ;   et al. | 2017-04-20 |
Mirror System And Projection Device App 20170052363 - Straub; Rainer ;   et al. | 2017-02-23 |
Micromechanical component and method for producing a micromechanical component Grant 9,360,664 - Armbruster , et al. June 7, 2 | 2016-06-07 |
Micromechanical Component And Method For Producing A Micromechanical Component App 20150357897 - MUCHOW; Joerg ;   et al. | 2015-12-10 |
Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting App 20150232330 - FRANZ; Jochen ;   et al. | 2015-08-20 |
Micromirror And Manufacturing Method For At Least One Micromirror Which Is Situatable Or Situated In A Micromirror Device App 20150153566 - Armbruster; Simon ;   et al. | 2015-06-04 |
Micromechanical Component And Method For Producing A Micromechanical Component App 20150062677 - ARMBRUSTER; Simon ;   et al. | 2015-03-05 |
Micromechanical Component And Corresponding Test Method For A Micromechanical Component App 20150061695 - REISS; Sebastian ;   et al. | 2015-03-05 |
Micromirror App 20150036203 - Nitsche; Heiko ;   et al. | 2015-02-05 |
Micromechanical component, micromirror device, and manufacturing method for a micromechanical component App 20140376071 - ARMBRUSTER; Simon ;   et al. | 2014-12-25 |
Mechanical Component And Manufacturing Method For A Mechanical Component App 20140118005 - HEINZELMANN; Wolfgang ;   et al. | 2014-05-01 |
Micromechanical Assembly, Method For Manufacturing A Micromechanical Assembly And Method For Operating A Micromechanical Assembly App 20130308173 - MUCHOW; Joerg ;   et al. | 2013-11-21 |
Micromechanical Component Having A Diaphragm App 20130234140 - SCHILLER; Uwe ;   et al. | 2013-09-12 |
Sensor And Method For Manufacturing A Sensor App 20110226059 - Wellner; Patrick ;   et al. | 2011-09-22 |
Carrier element Grant 7,905,544 - Grutzeck , et al. March 15, 2 | 2011-03-15 |
Dynamometer element Grant 7,819,017 - Munz , et al. October 26, 2 | 2010-10-26 |
Joining element Grant 7,777,482 - Munz , et al. August 17, 2 | 2010-08-17 |
Connection element Grant 7,559,255 - Munz , et al. July 14, 2 | 2009-07-14 |
Carrier Element App 20090066128 - Grutzeck; Helmut ;   et al. | 2009-03-12 |
Force measurement element Grant 7,437,943 - Munz , et al. October 21, 2 | 2008-10-21 |
Dynamometer Element App 20080202225 - Munz; Michael ;   et al. | 2008-08-28 |
Connection Element App 20080034896 - Munz; Michael ;   et al. | 2008-02-14 |
Joining Element App 20070273367 - Munz; Michael ;   et al. | 2007-11-29 |
Force measurement element App 20070107531 - Munz; Michael ;   et al. | 2007-05-17 |
Sensor for measuring pressure in a sealed volume Grant 7,073,400 - Benzel , et al. July 11, 2 | 2006-07-11 |
Sensor App 20040093962 - Benzel, Hubert ;   et al. | 2004-05-20 |