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Processing Chamber Configured For Uniform Gas Flow
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Coils for generating a plasma and for sputtering
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Coils for generating a plasma and for sputtering
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Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers
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Coils for generating a plasma and for sputtering
Grant 6,783,639 - Nulman , et al. August 31, 2 | 2004-08-31 |
Processing chamber configured for uniform gas flow
App 20040069227 - Ku, Vincent ; et al. | 2004-04-15 |
Multiple independent robot assembly and apparatus and control system for processing and transferring semiconductor wafers
App 20040005211 - Lowrance, Robert B. ; et al. | 2004-01-08 |
Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers
App 20030180139 - McClintock, William ; et al. | 2003-09-25 |
Coils for generating a plasma and for sputtering
App 20020144901 - Nulman, Jaim ; et al. | 2002-10-10 |
Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers
App 20020127091 - Lowrance, Robert B. ; et al. | 2002-09-12 |
Coils for generating a plasma and for sputtering
Grant 6,368,469 - Nulman , et al. April 9, 2 | 2002-04-09 |
Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers
App 20020029936 - McClintock, William ; et al. | 2002-03-14 |
Recessed coil for generating a plasma
App 20010019016 - Subramani, Anantha ; et al. | 2001-09-06 |
Robot assembly
Grant 5,879,127 - Grunes , et al. March 9, 1 | 1999-03-09 |
Clamp ring for shielding a substrate during film layer deposition
Grant 5,868,847 - Chen , et al. February 9, 1 | 1999-02-09 |
Apparatus and method for fabricating metal paths in semiconductor substrates through high pressure extrusion
Grant 5,857,368 - Grunes , et al. January 12, 1 | 1999-01-12 |
High aspect ratio clamp ring
Grant 5,810,931 - Stevens , et al. September 22, 1 | 1998-09-22 |
Slotted RF coil shield for plasma deposition system
Grant 5,763,851 - Forster , et al. June 9, 1 | 1998-06-09 |
Screwless shield assembly for vacuum processing chambers
Grant 5,690,795 - Rosenstein , et al. November 25, 1 | 1997-11-25 |
Robot assembly
Grant 5,678,980 - Grunes , et al. October 21, 1 | 1997-10-21 |
Method of heating and cooling a wafer during semiconductor processing
Grant 5,484,011 - Tepman , et al. January 16, 1 | 1996-01-16 |
Robot assembly
Grant 5,447,409 - Grunes , et al. September 5, 1 | 1995-09-05 |
Physical vapor deposition clamping mechanism and heater/cooler
Grant 5,228,501 - Tepman , et al. July 20, 1 | 1993-07-20 |
Staged-vacuum wafer processing system and method
Grant 5,186,718 - Tepman , et al. February 16, 1 | 1993-02-16 |
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