loadpatents
Patent applications and USPTO patent grants for Gruenenfelder; Pius.The latest application filed is for "method of manufacturing at least one sputter-coated substrate and sputter source".
Patent | Date |
---|---|
Sliding anode magnetron sputtering source Grant 7,678,239 - Haag , et al. March 16, 2 | 2010-03-16 |
Method Of Manufacturing At Least One Sputter-coated Substrate And Sputter Source App 20070175748 - Atamny; Fachri ;   et al. | 2007-08-02 |
Sliding anode magnetron sputtering source App 20050034975 - Haag, Walter ;   et al. | 2005-02-17 |
Magnetron atomization source and method of use thereof Grant 6,776,881 - Gruenenfelder , et al. August 17, 2 | 2004-08-17 |
Magnetron sputtering source and method of use thereof Grant 6,540,883 - Gruenenfelder , et al. April 1, 2 | 2003-04-01 |
Magnetron atomization source and method of use thereof App 20030019740 - Gruenenfelder, Pius ;   et al. | 2003-01-30 |
Process for sputter coating, a sputter coating source, and sputter coating apparatus with at least one such source Grant 6,337,001 - Haag , et al. January 8, 2 | 2002-01-08 |
Sputter source with a target arrangement and a holding device Grant 5,833,823 - Gruenenfelder , et al. November 10, 1 | 1998-11-10 |
Magnetron atomization source and method of use thereof Grant 5,688,381 - Gruenenfelder , et al. November 18, 1 | 1997-11-18 |
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