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Semiconductor device including an active region and two layers having different stress characteristics Grant 9,847,389 - Winstead , et al. December 19, 2 | 2017-12-19 |
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Semiconductor Device Including An Active Region And Two Layers Having Different Stress Characteristics App 20140054704 - Winstead; Brian A. ;   et al. | 2014-02-27 |
Semiconductor device including an active region and two layers having different stress characteristics Grant 8,569,858 - Winstead , et al. October 29, 2 | 2013-10-29 |
Process of forming an electronic device including insulating layers having different strains Grant 8,021,957 - Grudowski , et al. September 20, 2 | 2011-09-20 |
Multilayer Silicon Nitride Deposition For A Semiconductor Device App 20110210401 - Junker; Kurt H. ;   et al. | 2011-09-01 |
Electronic device including insulating layers having different strains Grant 7,843,011 - Grudowski , et al. November 30, 2 | 2010-11-30 |
Method of forming a via Grant 7,745,298 - Stephens , et al. June 29, 2 | 2010-06-29 |
Method of making a semiconductor device with embedded stressor Grant 7,736,957 - Grudowski , et al. June 15, 2 | 2010-06-15 |
Electronic device including a transistor structure having an active region adjacent to a stressor layer Grant 7,714,318 - Adams , et al. May 11, 2 | 2010-05-11 |
Multilayer silicon nitride deposition for a semiconductor device Grant 7,700,499 - Junker , et al. April 20, 2 | 2010-04-20 |
Fabrication of a semiconductor device with stressor Grant 7,687,354 - Grudowski , et al. March 30, 2 | 2010-03-30 |
Method of forming a semiconductor device with multiple tensile stressor layers Grant 7,678,698 - Bo , et al. March 16, 2 | 2010-03-16 |
Fabrication Of A Semiconductor Device With Stressor App 20090221119 - Grudowski; Paul A. ;   et al. | 2009-09-03 |
Disposable organic spacers Grant 7,579,228 - Grudowski , et al. August 25, 2 | 2009-08-25 |
Method Of Forming A Via App 20090142895 - Stephens; Tab A. ;   et al. | 2009-06-04 |
Semiconductor process integrating source/drain stressors and interlevel dielectric layer stressors Grant 7,538,002 - Zhang , et al. May 26, 2 | 2009-05-26 |
Stressor integration and method thereof Grant 7,528,029 - Grudowski , et al. May 5, 2 | 2009-05-05 |
Semiconductor device having stressors and method for forming Grant 7,511,360 - Shroff , et al. March 31, 2 | 2009-03-31 |
Process for forming an electronic device including transistor structures with sidewall spacers Grant 7,504,289 - Lim , et al. March 17, 2 | 2009-03-17 |
Undoped gate poly integration for improved gate patterning and cobalt silicide extendibility Grant 7,491,630 - Shroff , et al. February 17, 2 | 2009-02-17 |
Disposable organic spacers App 20090017587 - Grudowski; Paul A. ;   et al. | 2009-01-15 |
Electronic Device Including A Transistor Structure Having An Active Region Adjacent To A Stressor Layer App 20080296633 - Adams; Vance H. ;   et al. | 2008-12-04 |
Method Of Making A Semiconductor Device With Embedded Stressor App 20080299724 - Grudowski; Paul A. ;   et al. | 2008-12-04 |
Semiconductor Device With Stressors And Methods Thereof App 20080293192 - Zollner; Stefan ;   et al. | 2008-11-27 |
Semiconductor Device With Multiple Tensile Stressor Layers And Method App 20080272411 - Bo; Xiangzheng ;   et al. | 2008-11-06 |
Method of forming an interlayer dielectric Grant 7,442,598 - Grudowski , et al. October 28, 2 | 2008-10-28 |
Electronic device including a transistor structure having an active region adjacent to a stressor layer and a process for forming the electronic device Grant 7,420,202 - Adams , et al. September 2, 2 | 2008-09-02 |
Anneal of epitaxial layer in a semiconductor device Grant 7,416,605 - Zollner , et al. August 26, 2 | 2008-08-26 |
Electronic Device Including Insulating Layers Having Different Strains And A Process For Forming The Electronic Device App 20080179679 - Grudowski; Paul A. ;   et al. | 2008-07-31 |
Multilayer silicon nitride deposition for a semiconductor device App 20080173986 - Junker; Kurt H. ;   et al. | 2008-07-24 |
Multilayer silicon nitride deposition for a semiconductor device App 20080173908 - Junker; Kurt H. ;   et al. | 2008-07-24 |
Method of making a nitrided gate dielectric Grant 7,402,472 - Lim , et al. July 22, 2 | 2008-07-22 |
Anneal Of Epitaxial Layer In A Semiconductor Device App 20080163813 - Zollner; Stefan ;   et al. | 2008-07-10 |
Integrated Circuit Having Tensile And Compressive Regions App 20080150072 - Winstead; Brian A. ;   et al. | 2008-06-26 |
Method For Forming A Stressor Layer App 20080026517 - Grudowski; Paul A. ;   et al. | 2008-01-31 |
Stressor integration and method thereof App 20070249113 - Grudowski; Paul A. ;   et al. | 2007-10-25 |
Undoped gate poly integration for improved gate patterning and cobalt silicide extendibility App 20070218661 - Shroff; Mehul D. ;   et al. | 2007-09-20 |
Semiconductor process integrating source/drain stressors and interlevel dielectric layer stressors App 20070202651 - Zhang; Da ;   et al. | 2007-08-30 |
Method for improving self-aligned silicide extendibility with spacer recess using a stand-alone recess etch integration App 20070197011 - Srivastava; Anadi ;   et al. | 2007-08-23 |
Semiconductor device having stressors and method for forming App 20070132031 - Shroff; Mehul D. ;   et al. | 2007-06-14 |
Electronic device including a transistor structure having an active region adjacent to a stressor layer and a process for forming the electronic device App 20070102755 - Adams; Vance H. ;   et al. | 2007-05-10 |
Method of forming an electronic device Grant 7,214,590 - Lim , et al. May 8, 2 | 2007-05-08 |
Electronic device including transistor structures with sidewall spacers and a process for forming the electronic device App 20070090455 - Lim; Sangwoo ;   et al. | 2007-04-26 |
Method of forming an interlayer dielectric App 20060281240 - Grudowski; Paul A. ;   et al. | 2006-12-14 |
Transistor sidewall spacer stress modulation Grant 7,132,704 - Grudowski November 7, 2 | 2006-11-07 |
Method of forming an electronic device App 20060223266 - Lim; Sangwoo ;   et al. | 2006-10-05 |
Method of making a nitrided gate dielectric App 20060194423 - Lim; Sangwoo ;   et al. | 2006-08-31 |
Differentially nitrided gate dielectrics in CMOS fabrication process App 20060084220 - Lim; Sangwoo ;   et al. | 2006-04-20 |
Transistor sidewall spacer stress modulation App 20050156237 - Grudowski, Paul A. | 2005-07-21 |
Integrated circuit device and method therefor App 20050156229 - Yeap, Geoffrey C-F ;   et al. | 2005-07-21 |
Transistor sidewall spacer stress modulation Grant 6,902,971 - Grudowski June 7, 2 | 2005-06-07 |
Semiconductor fabrication process using transistor spacers of differing widths Grant 6,864,135 - Grudowski , et al. March 8, 2 | 2005-03-08 |
Transistor Sidewall Spacer Stress Modulation App 20050020022 - Grudowski, Paul A. | 2005-01-27 |
Integrated circuit device and method therefor Grant 6,846,716 - Yeap , et al. January 25, 2 | 2005-01-25 |
Integrated circuit device and method therefor App 20040124450 - Yeap, Geoffrey C-F ;   et al. | 2004-07-01 |
Semiconductor fabrication process using transistor spacers of differing widths App 20040087090 - Grudowski, Paul A. ;   et al. | 2004-05-06 |
Integrated Circuit Device And Method Therefor App 20030181028 - Yeap, Geoffrey C-F ;   et al. | 2003-09-25 |
Method of preventing two neighboring contacts from a short-circuit caused by a void between them and device having the same Grant 6,369,430 - Adetutu , et al. April 9, 2 | 2002-04-09 |