Grimard; Dennis

Patent Applications and Registrations

Patent applications and USPTO patent grants for Grimard; Dennis.The latest application filed is for "systems and methods for moving web etch, cvd, and ion implant".

Company Profile

0.6.9

Grimard; Dennis - Ann Arbor MI

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method for optimized removal of wafer from electrostatic chuck Grant 8,363,378 - Bluck , et al. January 29, 2	2013-01-29
Systems And Methods For Moving Web Etch, Cvd, And Ion Implant App 20120138230 - BLUCK; Terry ; et al.	2012-06-07
Electrostatic Chuck App 20100326602 - BLUCK; Terry ; et al.	2010-12-30
Method For Optimized Removal Of Wafer From Electrostatic Chuck App 20100208409 - Bluck; Terry ; et al.	2010-08-19
Electrostatic Chuck Apparatus App 20090086401 - Samir; Tugrul ; et al.	2009-04-02
Electrostatic Chuck Apparatus App 20090086400 - Samir; Tugrul ; et al.	2009-04-02
Plasma generation and control using a dual frequency RF source Grant 7,431,857 - Shannon , et al. October 7, 2	2008-10-07
Plasma Generation And Control Using A Dual Frequency Rf Source App 20070006971 - Shannon; Steven C. ; et al.	2007-01-11
Plasma generation and control using a dual frequency RF source App 20050034816 - Shannon, Steven C. ; et al.	2005-02-17
Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber Grant 6,795,292 - Grimard , et al. September 21, 2	2004-09-21
Actively-controlled electrostatic chuck heater App 20040081439 - Kholodenko, Arnold ; et al.	2004-04-29
Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber App 20020171994 - Grimard, Dennis ; et al.	2002-11-21
Inductively coupled RF plasma reactor having an overhead solenoidal antenna and modular confinement magnet liners Grant 6,074,512 - Collins , et al. June 13, 2	2000-06-13
Barrier seal for electrostatic chuck Grant 5,636,098 - Salfelder , et al. June 3, 1	1997-06-03

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