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Patent applications and USPTO patent grants for Grilley; Randy.The latest application filed is for "electrostatic remote plasma source system and method".
Patent | Date |
---|---|
Projected plasma source Grant 10,225,919 - Hoffman , et al. | 2019-03-05 |
Electrostatic remote plasma source system and method Grant 9,524,854 - Hoffman , et al. December 20, 2 | 2016-12-20 |
Electrostatic Remote Plasma Source System And Method App 20150279631 - Hoffman; Daniel J. ;   et al. | 2015-10-01 |
Capacitively coupled remote plasma source Grant 9,142,388 - Hoffman , et al. September 22, 2 | 2015-09-22 |
Remote plasma source generating a disc-shaped plasma Grant 8,884,525 - Hoffman , et al. November 11, 2 | 2014-11-11 |
Electrostatic remote plasma source Grant 8,723,423 - Hoffman , et al. May 13, 2 | 2014-05-13 |
Remote Plasma Source Generating A Disc-shaped Plasma App 20120242229 - Hoffman; Daniel J. ;   et al. | 2012-09-27 |
Electrostatic Remote Plasma Source App 20120187844 - Hoffman; Daniel J. ;   et al. | 2012-07-26 |
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