Grieger; Eric K.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Grieger; Eric K..The latest application filed is for "method and apparatus for cleaning a surface of a microelectronic substrate".
- Grieger; Eric K. - Chandler ID
- Grieger, Eric K. - Boise ID
| Patent | Date |
|---|---|
| Post-planarization, pre-oxide removal ozone treatment Grant 6,632,743 - Grieger , et al. October 14, 2 | 2003-10-14 |
| Method and apparatus for cleaning a surface of a microelectronic substrate App 20020028640 - Barnhart, Gunnar A. ; et al. | 2002-03-07 |
| Cleaning composition containing tetraalkylammonium salt and use thereof in semiconductor fabrication Grant 6,044,851 - Grieger , et al. April 4, 2 | 2000-04-04 |
| Cleaning composition containing tetraalkylammonium salt and use thereof in semiconductor fabrication Grant 5,855,811 - Grieger , et al. January 5, 1 | 1999-01-05 |
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