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Patent applications and USPTO patent grants for Gretzschel; Hans-Joachim.The latest application filed is for "apparatus and method for the removal of pellicles from masks".
Patent | Date |
---|---|
Wafer catching device Grant 8,201,814 - Dopping , et al. June 19, 2 | 2012-06-19 |
Apparatus and method for the removal of pellicles from masks Grant 8,168,036 - Andritzke , et al. May 1, 2 | 2012-05-01 |
Wafer manufacturing method and device Grant 8,123,866 - Dopping , et al. February 28, 2 | 2012-02-28 |
Apparatus and Method for the Removal of Pellicles from Masks App 20090239156 - Andritzke; Lothar ;   et al. | 2009-09-24 |
Wafer Catching Device App 20080295662 - Dopping; Jurgen ;   et al. | 2008-12-04 |
Wafer Manufacturing Method And Device App 20080105247 - Dopping; Jurgen ;   et al. | 2008-05-08 |
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