| Patent | Date |
|---|
Charged particle-optical systems, methods and components
Grant 8,039,813 - Casares , et al. October 18, 2 | 2011-10-18 |
Particle-Optical Component
App 20090114818 - Casares; Antonio ; et al. | 2009-05-07 |
Contact probe arrangement
Grant 6,356,089 - Bayer , et al. March 12, 2 | 2002-03-12 |
Contact Probe Arrangement
App 20010011896 - BAYER, THOMAS ; et al. | 2001-08-09 |
Method of producing a calibration standard for 2-D and 3-D profilometry in the sub-nanometer range
Grant 6,218,264 - Bartha , et al. April 17, 2 | 2001-04-17 |
Micromechanical sensor for AFM/STM profilometry
Grant 6,091,124 - Bayer , et al. July 18, 2 | 2000-07-18 |
Micro-mechanically fabricated read/write head with a strengthening shell on the tip shaft
Grant 6,088,320 - Bayer , et al. July 11, 2 | 2000-07-11 |
Ion generator for ionographic print heads
Grant 6,061,074 - Bartha , et al. May 9, 2 | 2000-05-09 |
Calibration standard for profilometers and manufacturing procedure
Grant 6,028,008 - Bayer , et al. February 22, 2 | 2000-02-22 |
Very dense chip package
Grant 5,998,868 - Pogge , et al. December 7, 1 | 1999-12-07 |
Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it
Grant 5,960,255 - Bartha , et al. September 28, 1 | 1999-09-28 |
Very dense integrated circuit package and method for forming the same
Grant 5,866,443 - Pogge , et al. February 2, 1 | 1999-02-02 |
Method of fabricating a field emission device
Grant 5,817,201 - Greschner , et al. October 6, 1 | 1998-10-06 |
Very dense integrated circuit package
Grant 5,814,885 - Pogge , et al. September 29, 1 | 1998-09-29 |
Field emission device with series resistor tip and method of manufacturing
Grant 5,783,905 - Greschner , et al. July 21, 1 | 1998-07-21 |
Very dense integrated circuit package
Grant 5,770,884 - Pogge , et al. June 23, 1 | 1998-06-23 |
Method for producing deep vertical structures in silicon substrates
Grant 5,658,472 - Bartha , et al. August 19, 1 | 1997-08-19 |
Force microscope and method for measuring atomic forces in multiple directions
Grant 5,646,339 - Bayer , et al. July 8, 1 | 1997-07-08 |
Method for producing a multi-step structure in a substrate
Grant 5,635,337 - Bartha , et al. June 3, 1 | 1997-06-03 |
Calibration standards for profilometers and methods of producing them
Grant 5,578,745 - Bayer , et al. November 26, 1 | 1996-11-26 |
Micromechanical sensor and sensor fabrication process
Grant 5,455,419 - Bayer , et al. October 3, 1 | 1995-10-03 |
System for stamping an optical storage disk
Grant 5,427,599 - Greschner , et al. June 27, 1 | 1995-06-27 |
Ultrafine silicon tips for AFM/STM profilometry
Grant 5,382,795 - Bayer , et al. January 17, 1 | 1995-01-17 |
Apparatus for plasma or reactive ion etching and method of etching substrates having a low thermal conductivity
Grant 5,304,278 - Bartha , et al. April 19, 1 | 1994-04-19 |
Pneumatically and electrostatically driven scanning tunneling microscope
Grant 5,283,437 - Greschner , et al. February 1, 1 | 1994-02-01 |
Micromechanical sensor fabrication process
Grant 5,282,924 - Bayer , et al. February 1, 1 | 1994-02-01 |
Method of producing ultrafine silicon tips for the AFM/STM profilometry
Grant 5,242,541 - Bayer , et al. September 7, 1 | 1993-09-07 |
Method of manufacturing an optical Storage disk
Grant 5,213,600 - Greschner , et al. May 25, 1 | 1993-05-25 |
Process for fabricating silicon carbide films with a predetermined stress
Grant 5,162,133 - Bartha , et al. November 10, 1 | 1992-11-10 |
Method of producing micromechanical sensors for the AFM/STM profilometry
Grant 5,116,462 - Bartha , et al. May 26, 1 | 1992-05-26 |
Method of producing micromechanical sensors for the AFM/STM profilometry and micromechanical AFM/STM sensor head
Grant 5,051,379 - Bayer , et al. September 24, 1 | 1991-09-24 |
PECVD (plasma enhanced chemical vapor deposition) method for depositing of tungsten or layers containing tungsten by in situ formation of tungsten fluorides
Grant 4,969,415 - Bartha , et al. November 13, 1 | 1990-11-13 |
PECVD (plasma enhanced chemical vapor deposition) method for depositing of tungsten or layers containing tungsten by in situ formation of tungsten fluorides
Grant 4,918,033 - Bartha , et al. April 17, 1 | 1990-04-17 |
Process for fabricating arbitrarily shaped through holes in a component
Grant 4,871,418 - Wittlinger , et al. October 3, 1 | 1989-10-03 |
Micromechanical atomic force sensor head
Grant 4,806,755 - Duerig , et al. February 21, 1 | 1989-02-21 |
Method of forming identically positioned alignment marks on opposite sides of a semiconductor wafer
Grant 4,732,646 - Elsner , et al. March 22, 1 | 1988-03-22 |
Method of making adhesive metal layers on substrates of synthetic material and device produced thereby
Grant 4,642,163 - Greschner , et al. February 10, 1 | 1987-02-10 |
Method of transferring a pattern into a radiation-sensitive layer
Grant 4,591,540 - Bohlen , et al. May 27, 1 | 1986-05-27 |
Method of making trenches with substantially vertical sidewalls in silicon through reactive ion etching
Grant 4,589,952 - Behringer , et al. May 20, 1 | 1986-05-20 |
Process for producing printed circuit boards with metallic conductor structures embedded in the insulating substrate
Grant 4,556,628 - Greschner , et al. December 3, 1 | 1985-12-03 |
Contact device for releasably connecting electrical components
Grant 4,522,893 - Bohlen , et al. June 11, 1 | 1985-06-11 |
Probe head arrangement for conductor line testing with at least one probe head comprising a plurality of resilient contacts
Grant 4,520,314 - Asch , et al. May 28, 1 | 1985-05-28 |
Mask and system for mutually aligning objects in ray exposure systems
Grant 4,513,203 - Bohlen , et al. April 23, 1 | 1985-04-23 |
Method of compensating the proximity effect in electron beam projection systems
Grant 4,504,558 - Bohlen , et al. March 12, 1 | 1985-03-12 |
Method of making structures with dimensions in the sub-micrometer range
Grant 4,502,914 - Trumpp , et al. March 5, 1 | 1985-03-05 |
Shadow projection mask for ion implantation and ion beam lithography
Grant 4,448,865 - Bohlen , et al. May 15, 1 | 1984-05-15 |
Method of compensating the proximity effect in electron beam projection systems
Grant 4,426,584 - Bohlen , et al. January 17, 1 | 1984-01-17 |
Method of making mask for structuring surface areas
Grant 4,417,946 - Bohlen , et al. November 29, 1 | 1983-11-29 |
Structure with a silicon body having through openings
Grant 4,393,127 - Greschner , et al. July 12, 1 | 1983-07-12 |
Alignment system for particle beam lithography
Grant 4,370,554 - Bohlen , et al. January 25, 1 | 1983-01-25 |
Mask for structuring surface areas, and method of making it
Grant 4,342,817 - Bohlen , et al. August 3, 1 | 1982-08-03 |
Method of shadow printing exposure
Grant 4,334,156 - Bohlen , et al. June 8, 1 | 1982-06-08 |
Method of exposure by means of corpuscular beam shadow printing
Grant 4,169,230 - Bohlen , et al. September 25, 1 | 1979-09-25 |
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