Grella; Luca
Patent Applications and Registrations
Patent applications and USPTO patent grants for Grella; Luca.The latest application filed is for "high resolution electron beam apparatus with dual-aperture schemes".
- Grella; Luca - Gilroy CA
- Grella; Luca - Milpitas CA
| Patent | Date |
|---|---|
| High Resolution Electron Beam Apparatus With Dual-aperture Schemes App 20220254667 - Jiang; Xinrong ; et al. | 2022-08-11 |
| Space charge insensitive electron gun designs Grant 11,302,510 - Sears , et al. April 12, 2 | 2022-04-12 |
| Charge control device for a system with multiple electron beams Grant 11,087,950 - Sears , et al. August 10, 2 | 2021-08-10 |
| Space Charge Insensitive Electron Gun Designs App 20190371564 - Sears; Christopher ; et al. | 2019-12-05 |
| Charge Control Device For A System With Multiple Electron Beams App 20190371566 - Sears; Christopher ; et al. | 2019-12-05 |
| Method and system for charge control for imaging floating metal structures on non-conducting substrates Grant 10,460,903 - Hegde , et al. Oc | 2019-10-29 |
| Extractor electrode for electron source Grant 9,934,933 - Hordon , et al. April 3, 2 | 2018-04-03 |
| Method and System for Charge Control for Imaging Floating Metal Structures on Non-Conducting Substrates App 20170287675 - Hegde; Arjun ; et al. | 2017-10-05 |
| Electron reflector with multiple reflective modes Grant 8,089,051 - Grella , et al. January 3, 2 | 2012-01-03 |
| Electron Reflector With Multiple Reflective Modes App 20110204251 - GRELLA; Luca ; et al. | 2011-08-25 |
| Electron beam patterning Grant 7,958,464 - Grella , et al. June 7, 2 | 2011-06-07 |
| Dynamic pattern generator with cup-shaped structure Grant 7,755,061 - Grella , et al. July 13, 2 | 2010-07-13 |
| Dynamic pattern generator with cup-shaped structure App 20090114837 - GRELLA; LUCA ; et al. | 2009-05-07 |
| Calibration standards and methods Grant 7,361,941 - Lorusso , et al. April 22, 2 | 2008-04-22 |
| Method and system for e-beam scanning Grant 7,276,690 - Lorusso , et al. October 2, 2 | 2007-10-02 |
| Method and apparatus for accurate e-beam metrology Grant 7,098,456 - Lorusso , et al. August 29, 2 | 2006-08-29 |
| E-beam detection of defective contacts/vias with flooding and energy filter Grant 7,019,292 - Fan , et al. March 28, 2 | 2006-03-28 |
| Apparatus and method for tilted particle-beam illumination Grant 7,009,177 - Mankos , et al. March 7, 2 | 2006-03-07 |
| Filtered e-beam inspection and review Grant 6,979,824 - Adler , et al. December 27, 2 | 2005-12-27 |
| Method and system for e-beam scanning Grant 6,815,675 - Lorusso , et al. November 9, 2 | 2004-11-09 |
| Filtered e-beam inspection and review Grant 6,797,955 - Adler , et al. September 28, 2 | 2004-09-28 |
| Undercut Measurement Using Sem App 20040000638 - Lorusso, Gian Francesco ; et al. | 2004-01-01 |
| Undercut measurement using SEM Grant 6,670,612 - Lorusso , et al. December 30, 2 | 2003-12-30 |
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