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Techniques For High Speed Optoelectronic Coupling By Redirection Of Optical Path App 20190052369 - YEH; Xian-Li ;   et al. | 2019-02-14 |
Apparatus and methods for improving the intensity profile of a beam image used to process a substrate Grant 9,401,278 - Hawryluk , et al. July 26, 2 | 2016-07-26 |
Apparatus and methods for improving the intensity profile of a beam image used to process a substrate App 20140227890 - Hawryluk; Andrew M. ;   et al. | 2014-08-14 |
Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography Grant 8,746,975 - Bianucci , et al. June 10, 2 | 2014-06-10 |
Apparatus and method for improving the intensity profile of a beam image used to process a substrate Grant 8,742,286 - Hawryluk , et al. June 3, 2 | 2014-06-03 |
Evaporative thermal management of grazing incidence collectors for EUV lithography Grant 8,731,139 - Grek , et al. May 20, 2 | 2014-05-20 |
Apparatuses and methods for irradiating a substrate to avoid substrate edge damage Grant 8,314,360 - Grek , et al. November 20, 2 | 2012-11-20 |
Evaporative thermal management of grazing incidence collectors for EUV lithography App 20120281189 - Grek; Boris ;   et al. | 2012-11-08 |
Thermal Management Systems, Assemblies And Methods For Grazing Incidence Collectors For Euv Lithography App 20120212719 - Bianucci; Giovanni ;   et al. | 2012-08-23 |
Apparatus and methods for improving the intensity profile of a beam image used to process a substrate Grant 8,153,930 - Hawryluk , et al. April 10, 2 | 2012-04-10 |
Apparatuses and methods for irradiating a substrate to avoid substrate edge damage App 20110249071 - Grek; Boris ;   et al. | 2011-10-13 |
Laser thermal annealing of lightly doped silicon substrates Grant 7,879,741 - Talwar , et al. February 1, 2 | 2011-02-01 |
Ultra-wide band AWG multiplexer Grant 7,840,104 - Das , et al. November 23, 2 | 2010-11-23 |
Methods and apparatus for temperature measurement and control on a remote substrate surface Grant 7,744,274 - Grek , et al. June 29, 2 | 2010-06-29 |
Broadcasting arrayed waveguide Grant 7,639,908 - Das , et al. December 29, 2 | 2009-12-29 |
Broadcasting arrayed waveguide App 20090185806 - Das; Saurav ;   et al. | 2009-07-23 |
Apparatus and methods for improving the intensity profile of a beam image used to process a substrate Grant 7,514,305 - Hawryluk , et al. April 7, 2 | 2009-04-07 |
Ultra-wide band AWG multiplexer App 20090016679 - Das; Saurav ;   et al. | 2009-01-15 |
Duplex arrayed waveguide grating Grant 7,440,655 - Grek , et al. October 21, 2 | 2008-10-21 |
Apparatuses and methods for irradiating a substrate to avoid substrate edge damage App 20080173620 - Grek; Boris ;   et al. | 2008-07-24 |
Integrated optics based high-resolution spectrophotometer Grant 7,403,284 - Grek , et al. July 22, 2 | 2008-07-22 |
CO2 laser stabilization systems and methods App 20080023452 - Grek; Boris ;   et al. | 2008-01-31 |
CO.sub.2 laser stabilization systems and methods Grant 7,292,616 - Grek , et al. November 6, 2 | 2007-11-06 |
Methods and apparatus for irradiating a substrate to avoid substrate edge damage Grant 7,238,915 - Grek , et al. July 3, 2 | 2007-07-03 |
Methods and apparatus for irradiating a substrate to avoid substrate edge damage App 20070068908 - Grek; Boris ;   et al. | 2007-03-29 |
Duplex arrayed waveguide grating App 20070065076 - Grek; Boris ;   et al. | 2007-03-22 |
Heat shield for thermal processing Grant 7,176,405 - Shareef , et al. February 13, 2 | 2007-02-13 |
Laser thermal annealing of lightly doped silicon substrates Grant 7,148,159 - Talwar , et al. December 12, 2 | 2006-12-12 |
Laser thermal annealing of lightly doped silicon substrates App 20060246694 - Talwar; Somit ;   et al. | 2006-11-02 |
Heat shield for thermal processing App 20060237403 - Shareef; Iqbal A. ;   et al. | 2006-10-26 |
CO2 laser stabilization systems and methods App 20060176917 - Grek; Boris ;   et al. | 2006-08-10 |
Integrated optics based high-resolution spectrophotometer App 20060132764 - Grek; Boris ;   et al. | 2006-06-22 |
Laser thermal annealing of lightly doped silicon substrates App 20050067384 - Talwar, Somit ;   et al. | 2005-03-31 |
Fiber-optic interferometer employing low-coherence-length light for precisely measuring absolute distance and tilt Grant 6,507,405 - Grek , et al. January 14, 2 | 2003-01-14 |
Acousto-optical light tunnel apparatus and method Grant 6,347,176 - Hawryluk , et al. February 12, 2 | 2002-02-12 |
Method and apparatus for measuring micro structures, anisotropy and birefringence in polymers using laser scattered light Grant 6,097,488 - Grek , et al. August 1, 2 | 2000-08-01 |