Gregor; Mariusch

Patent Applications and Registrations

Patent applications and USPTO patent grants for Gregor; Mariusch.The latest application filed is for "non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment".

Company Profile

5.20.21

Gregor; Mariusch - Gilroy CA
Gregor; Mariusch - San Jose CA US
Gregor; Mariusch - Pleasanton CA
Gregor; Mariusch - Cologne DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Non-elastomeric, Non-polymeric, Non-metallic Membrane Valves For Semiconductor Processing Equipment App 20220252183 - Gregor; Mariusch ; et al.	2022-08-11
Turbomolecular Pump And Cathode Assembly For Etching Reactor App 20220186734 - Lill; Thorsten ; et al.	2022-06-16
High Density, Controlled Integrated Circuits Factory App 20220171370 - LILL; Thorsten ; et al.	2022-06-02
Active showerhead Grant 10,804,079 - Gregor , et al. October 13, 2	2020-10-13
Systems And Methods For Pulse Width Modulated Dose Control App 20200270748 - GREGOR; Mariusch	2020-08-27
Active Showerhead App 20190371573 - Gregor; Mariusch ; et al.	2019-12-05
Pump power consumption enhancement Grant 10,428,807 - Gregor , et al. October 1, 2	2019-10-01
Active showerhead Grant 10,403,476 - Gregor , et al. Sep	2019-09-03
Method and system for controlling a flow ratio controller using feedback Grant 10,114,389 - Gregor October 30, 2	2018-10-30
Method and system for controlling a flow ratio controller using feed-forward adjustment Grant 10,108,205 - Gregor October 23, 2	2018-10-23
Active Showerhead App 20180130640 - Gregor; Mariusch ; et al.	2018-05-10
Compact device for enhancing the mixing of gaseous species Grant 9,327,252 - Lane , et al. May 3, 2	2016-05-03
N-channel flow ratio controller calibration Grant 9,200,754 - Gregor , et al. December 1, 2	2015-12-01
Methods and apparatus for enhanced gas flow rate control Grant 9,004,107 - Gregor , et al. April 14, 2	2015-04-14
Method And System For Controlling A Flow Ratio Controller Using Feed-forward Adjustment App 20150005956 - Gregor; Mariusch	2015-01-01
Method And System For Controlling A Flow Ratio Controller Using Feedback App 20150005955 - Gregor; Mariusch	2015-01-01
Methods and apparatus for processing substrates using model-based control Grant 8,880,210 - Porthouse , et al. November 4, 2	2014-11-04
Compact Device For Enhancing The Mixing Of Gaseous Species App 20140269156 - LANE; JOHN W. ; et al.	2014-09-18
Methods and apparatus for calibrating flow controllers in substrate processing systems Grant 8,707,754 - Cruse , et al. April 29, 2	2014-04-29
Methods and Apparatus for Enhanced Gas Flow Rate Control App 20140053912 - Gregor; Mariusch ; et al.	2014-02-27
N-channel Flow Ratio Controller Calibration App 20130233401 - GREGOR; Mariusch ; et al.	2013-09-12
Pump Power Consumption Enhancement App 20130156610 - GREGOR; MARIUSCH ; et al.	2013-06-20
N-channel flow ratio controller calibration Grant 8,397,739 - Gregor , et al. March 19, 2	2013-03-19
Methods And Apparatus For Processing Substrates Using Model-based Control App 20130018500 - PORTHOUSE; KEITH BRIAN ; et al.	2013-01-17
Real time lead-line characterization for MFC flow verification Grant 8,205,629 - Gregor , et al. June 26, 2	2012-06-26
Methods And Apparatus For Calibrating Flow Controllers In Substrate Processing Systems App 20110265549 - CRUSE; JAMES P. ; et al.	2011-11-03
Method and apparatus for dampening pressure fluctuations in a fluid delivery system Grant 8,015,989 - Lane , et al. September 13, 2	2011-09-13
N-channel Flow Ratio Controller Calibration App 20110178628 - Gregor; Mariusch ; et al.	2011-07-21
Method And Apparatus For Dampening Pressure Fluctuations In A Fluid Delivery System App 20090301567 - Lane; John William ; et al.	2009-12-10
Real Time Lead-line Characterization For Mfc Flow Verification App 20090266139 - Gregor; Mariusch ; et al.	2009-10-29
Electromagnetically levitated substrate support Grant 6,800,833 - Gregor , et al. October 5, 2	2004-10-05
Electromagnetically levitated substrate support App 20030183611 - Gregor, Mariusch ; et al.	2003-10-02
Apparatus and method for regulating a pressure in a chamber Grant 5,944,049 - Beyer , et al. August 31, 1	1999-08-31

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