| Patent | Date |
|---|
Sublimation Ampoule With Level Sensing
App 20210123134 - GREGG; John N. ; et al. | 2021-04-29 |
Solid precursor-based delivery of fluid utilizing controlled solids morphology
Grant 10,895,010 - Cleary , et al. January 19, 2 | 2021-01-19 |
Heat transfer to ampoule trays
Grant 10,895,347 - Hendrix , et al. January 19, 2 | 2021-01-19 |
Vaporization Vessel And Method
App 20200340110 - HENDRIX; Bryan C. ; et al. | 2020-10-29 |
Method and apparatus to help promote contact of gas with vaporized material
Grant 10,465,286 - Gregg , et al. No | 2019-11-05 |
Source reagent-based delivery of fluid with high material flux for batch deposition
Grant 10,385,452 - Hendrix , et al. A | 2019-08-20 |
Heat Transfer To Ampoule Trays
App 20190120433 - HENDRIX; Bryan C. ; et al. | 2019-04-25 |
Solid Precursor-based Delivery Of Fluid Utilizing Controlled Solids Morphology
App 20170037511 - Cleary; John M. ; et al. | 2017-02-09 |
Method And Apparatus To Help Promote Contact Of Gas With Vaporized Material
App 20170029946 - Gregg; John N. ; et al. | 2017-02-02 |
Method and apparatus to help promote contact of gas with vaporized material
Grant 9,469,898 - Gregg , et al. October 18, 2 | 2016-10-18 |
Method And Apparatus To Help Promote Contact Of Gas With Vaporized Material
App 20150337436 - Gregg; John N. ; et al. | 2015-11-26 |
Method And Apparatus To Help Promote Contact Of Gas With Vaporized Material
App 20150218696 - Gregg; John N. ; et al. | 2015-08-06 |
Source Reagent-based Delivery Of Fluid With High Material Flux For Batch Deposition
App 20150191819 - Hendrix; Bryan C. ; et al. | 2015-07-09 |
Method and apparatus to help promote contact of gas with vaporized material
Grant 9,004,462 - Gregg , et al. April 14, 2 | 2015-04-14 |
Solid Precursor-based Delivery Of Fluid Utilizing Controlled Solids Morphology
App 20140329025 - Cleary; John M. ; et al. | 2014-11-06 |
Solid precursor-based delivery of fluid utilizing controlled solids morphology
Grant 8,821,640 - Cleary , et al. September 2, 2 | 2014-09-02 |
Method And Apparatus To Help Promote Contact Of Gas With Vaporized Material
App 20130228476 - Gregg; John N. ; et al. | 2013-09-05 |
Method and apparatus to help promote contact of gas with vaporized material
Grant 8,444,120 - Gregg , et al. May 21, 2 | 2013-05-21 |
Method And Apparatus To Help Promote Contact Of Gas With Vaporized Material
App 20120153048 - Gregg; John N. ; et al. | 2012-06-21 |
Method and apparatus to help promote contact of gas with vaporized material
Grant 8,128,073 - Gregg , et al. March 6, 2 | 2012-03-06 |
Method And Apparatus To Help Promote Contact Of Gas With Vaporized Material
App 20110052482 - Gregg; John N. ; et al. | 2011-03-03 |
Method and apparatus to help promote contact of gas with vaporized material
Grant 7,828,274 - Gregg , et al. November 9, 2 | 2010-11-09 |
Zirconium Precursors Useful In Atomic Layer Deposition Of Zirconium-containing Films
App 20100270508 - Xu; Chongying ; et al. | 2010-10-28 |
Solid Precursor-based Delivery Of Fluid Utilizing Controlled Solids Morphology
App 20100255198 - Cleary; John M. ; et al. | 2010-10-07 |
Method and apparatus to help promote contact of gas with vaporized material
Grant 7,556,244 - Gregg , et al. July 7, 2 | 2009-07-07 |
Method And Apparatus To Help Promote Contact Of Gas With Vaporized Material
App 20090136668 - Gregg; John N. ; et al. | 2009-05-28 |
Method and apparatus to help promote contact of gas with vaporized material
Grant 7,487,956 - Gregg , et al. February 10, 2 | 2009-02-10 |
Method And Apparatus To Help Promote Contact Of Gas With Vaporized Material
App 20080057218 - Gregg; John N. ; et al. | 2008-03-06 |
Method And Apparatus To Help Promote Contact Of Gas With Vaporized Material
App 20080041310 - Gregg; John N. ; et al. | 2008-02-21 |
Method and apparatus to help promote contact of gas with vaporized material
Grant 7,300,038 - Gregg , et al. November 27, 2 | 2007-11-27 |
Canister guard
Grant 6,880,592 - Gregg , et al. April 19, 2 | 2005-04-19 |
Method and apparatus to help promote contact of gas with vaporized material
App 20050006799 - Gregg, John N. ; et al. | 2005-01-13 |
Canister guard
App 20040261896 - Gregg, John N. ; et al. | 2004-12-30 |
Bulk chemical delivery system
Grant 6,637,475 - Noah , et al. October 28, 2 | 2003-10-28 |
Level control systems for high purity chemical delivery systems
Grant 6,629,627 - Siegele , et al. October 7, 2 | 2003-10-07 |
Refillable ampule and method re same
Grant 6,557,593 - Siegele , et al. May 6, 2 | 2003-05-06 |
Container chemical guard
Grant 6,520,218 - Gregg , et al. February 18, 2 | 2003-02-18 |
Bulk chemical delivery system
App 20020189709 - Noah, Craig M. ; et al. | 2002-12-19 |
Bulk chemical delivery system
Grant 6,435,229 - Noah , et al. August 20, 2 | 2002-08-20 |
Chemical delivery system having purge system utilizing multiple purge techniques
App 20020069930 - Gregg, John N. ; et al. | 2002-06-13 |
Refillable ampule and method re same
App 20020038676 - Siegele, Stephen H. ; et al. | 2002-04-04 |
Chemical delivery system having purge system utilizing multiple purge techniques
Grant 6,296,025 - Gregg , et al. October 2, 2 | 2001-10-02 |
Chemical delivery system having purge system utilizing multiple purge techniques
Grant 6,296,026 - Gregg , et al. October 2, 2 | 2001-10-02 |
Bulk chemical delivery system
Grant 6,260,588 - Noah , et al. July 17, 2 | 2001-07-17 |
Chemical delivery system having purge system utilizing multiple purge techniques
Grant 6,199,599 - Gregg , et al. March 13, 2 | 2001-03-13 |
Chemical delivery and containment system employing mobile shipping crate
Grant 6,192,919 - Jackson , et al. February 27, 2 | 2001-02-27 |
High aspect ratio containers for ultrahigh purity chemicals
Grant 6,029,717 - Siegele , et al. February 29, 2 | 2000-02-29 |
Bulk chemical delivery system
Grant 5,950,693 - Noah , et al. September 14, 1 | 1999-09-14 |
Refillable ampule and method re same
Grant 5,878,793 - Siegele , et al. March 9, 1 | 1999-03-09 |
Level control systems for high purity chemical delivery systems
Grant 5,711,354 - Siegele , et al. January 27, 1 | 1998-01-27 |
Chemical refill system for high purity chemicals
Grant 5,607,002 - Siegele , et al. March 4, 1 | 1997-03-04 |
Manifold systems for high purity chemical delivery systems
Grant 5,590,695 - Siegele , et al. January 7, 1 | 1997-01-07 |
Bulk containers for high purity chemical delivery systems
Grant 5,562,132 - Siegele , et al. October 8, 1 | 1996-10-08 |
Chemical refill system for high purity chemicals
Grant 5,465,766 - Siegele , et al. November 14, 1 | 1995-11-14 |
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