loadpatents
Patent applications and USPTO patent grants for Greenberg; Gadi.The latest application filed is for "system and methods of generating comparable regions of a lithographic mask".
Patent | Date |
---|---|
System and methods of generating comparable regions of a lithographic mask Grant 11,263,741 - Cohen , et al. March 1, 2 | 2022-03-01 |
System And Methods Of Generating Comparable Regions Of A Lithographic Mask App 20210233220 - Cohen; Boaz ;   et al. | 2021-07-29 |
Closed-loop automatic defect inspection and classification Grant 10,901,402 - Greenberg , et al. January 26, 2 | 2021-01-26 |
Closed-loop Automatic Defect Inspection And Classification App 20190121331 - Greenberg; Gadi ;   et al. | 2019-04-25 |
Closed-loop automatic defect inspection and classification Grant 10,114,368 - Greenberg , et al. October 30, 2 | 2018-10-30 |
Integration of automatic and manual defect classification Grant 10,043,264 - Greenberg , et al. August 7, 2 | 2018-08-07 |
Optimization of unknown defect rejection for automatic defect classification Grant 9,715,723 - Shlain , et al. July 25, 2 | 2017-07-25 |
Closed-loop Automatic Defect Inspection And Classification App 20150022654 - Greenberg; Gadi ;   et al. | 2015-01-22 |
Integration Of Automatic And Manual Defect Classification App 20130279794 - Greenberg; Gadi ;   et al. | 2013-10-24 |
Optimization Of Unknown Defect Rejection For Automatic Defect Classification App 20130279795 - Shlain; Vladimir ;   et al. | 2013-10-24 |
Method and system for evaluating a variation in a parameter of a pattern Grant 8,160,350 - Yishai , et al. April 17, 2 | 2012-04-17 |
Method and system for evaluating an evaluated pattern of a mask Grant 8,098,926 - Schwarzband , et al. January 17, 2 | 2012-01-17 |
High throughput across-wafer-variation mapping Grant 7,990,546 - Yeo , et al. August 2, 2 | 2011-08-02 |
Method And System For Evaluating A Variation In A Parameter Of A Pattern App 20090196487 - Yishai; Michael Ben ;   et al. | 2009-08-06 |
High Throughput Across-wafer-variation Mapping App 20090021749 - Yeo; Jeong Ho ;   et al. | 2009-01-22 |
Method And System For Evaluating An Evaluated Pattern Of A Mask App 20080166038 - Schwarzband; Ishai ;   et al. | 2008-07-10 |
Qualification of a mask Grant 7,330,249 - Barotv , et al. February 12, 2 | 2008-02-12 |
Qualification Of A Mask App 20070127017 - BARTOV; AVISHAI ;   et al. | 2007-06-07 |
Alternating phase-shift mask inspection method and apparatus Grant 7,072,502 - Hemar , et al. July 4, 2 | 2006-07-04 |
Defect detection using gray level signatures Grant 6,603,873 - Gordon , et al. August 5, 2 | 2003-08-05 |
Alternating phase-shift mask inspection method and apparatus App 20020186879 - Hemar, Shirley ;   et al. | 2002-12-12 |
Straight line defect detection tool Grant 6,444,382 - Sarig , et al. September 3, 2 | 2002-09-03 |
Straight line defect detection Grant 6,361,910 - Sarig , et al. March 26, 2 | 2002-03-26 |
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