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Structures, Acoustic Wave Resonators, Devices And Systems App 20220140806 - BURAK; DARIUSZ ;   et al. | 2022-05-05 |
Bulk Acoustic Wave (baw) Resonator With Patterned Layer Structures, Devices And Systems App 20220140803 - BURAK; DARIUSZ ;   et al. | 2022-05-05 |
Temperature Compensating Bulk Acoustic Wave (baw) Resonator Structures, Devices And Systems App 20220140805 - BURAK; DARIUSZ ;   et al. | 2022-05-05 |
Mass Loaded Bulk Acoustic Wave (baw) Resonator Structures, Devices, And Systems App 20220140804 - BURAK; DARIUSZ ;   et al. | 2022-05-05 |
Acoustic Devices Structures, Filters And Systems App 20220123729 - Burak; Dariusz ;   et al. | 2022-04-21 |
Acoustic Device Structures, Devices And Systems App 20220123709 - Burak; Dariusz ;   et al. | 2022-04-21 |
Acoustic Devices With Layer Structures, Devices And Systems App 20220123719 - Burak; Dariusz ;   et al. | 2022-04-21 |
Bulk Acoustic Wave (baw) Resonator Structures, Devices, And Systems App 20220123710 - BURAK; DARIUSZ ;   et al. | 2022-04-21 |
Doped Bulk Acoustic Wave (baw) Resonator Structures, Devices And Systems App 20220123718 - Burak; Dariusz ;   et al. | 2022-04-21 |
Bulk Acoustic Wave (baw) Reflector And Resonator Structures, Devices And Systems App 20220123725 - Burak; Dariusz ;   et al. | 2022-04-21 |
Structures, Acoustic Wave Resonators, Devices And Systems To Sense A Target Variable App 20210351759 - Burak; Dariusz ;   et al. | 2021-11-11 |
Structures, acoustic wave resonators, devices and systems to sense a target variable, including as a non-limiting example corona viruses Grant 11,101,783 - Burak , et al. August 24, 2 | 2021-08-24 |
Structures, Acoustic Wave Resonators, Devices And Systems To Sense A Target Variable, Including As A Non-limiting Example Corona Viruses App 20210036678 - Burak; Dariusz ;   et al. | 2021-02-04 |
Acoustic resonator including monolithic piezoelectric layer having opposite polarities Grant 10,432,162 - Grannen , et al. O | 2019-10-01 |
Acoustic resonator device with an electrically-isolated layer of high-acoustic-impedance material interposed therein Grant 10,404,231 - Burak , et al. Sep | 2019-09-03 |
Acoustic resonator having integrated lateral feature and temperature compensation feature Grant 10,367,472 - Burak , et al. July 30, 2 | 2019-07-30 |
Bulk acoustic wave devices with temperature-compensating niobium alloy electrodes Grant 10,340,885 - Grannen , et al. | 2019-07-02 |
Bulk Acoustic Wave Resonator With Piezoelectric Layer Comprising Lithium Niobate Or Lithium Tantalate App 20190103853 - Burak; Dariusz ;   et al. | 2019-04-04 |
Bulk acoustic wave resonator with piezoelectric layer comprising lithium niobate or lithium tantalate Grant 10,164,605 - Burak , et al. Dec | 2018-12-25 |
Electrical resonator Grant 10,128,812 - Grannen , et al. November 13, 2 | 2018-11-13 |
Rbar Device Including At Least One Air-ring App 20180085787 - Burak; Dariusz ;   et al. | 2018-03-29 |
Acoustic Resonator Including Composite Polarity Piezoelectric Layer Having Opposite Polarities App 20170288121 - Burak; Dariusz ;   et al. | 2017-10-05 |
Acoustic Resonator Including Monolithic Piezoelectric Layer Having Opposite Polarities App 20170288628 - Grannen; Kevin J. ;   et al. | 2017-10-05 |
Acoustic resonator comprising integrated structures for improved performance Grant 9,748,918 - Burak , et al. August 29, 2 | 2017-08-29 |
Bulk Acoustic Wave Resonator With Piezoelectric Layer Comprising Lithium Niobate Or Lithium Tantalate App 20170214387 - Burak; Dariusz ;   et al. | 2017-07-27 |
Method of forming acoustic resonator using intervening seed layer Grant 9,608,589 - Grannen , et al. March 28, 2 | 2017-03-28 |
Bulk acoustic wave resonator having piezoelectric layer with varying amounts of dopant Grant 9,602,073 - Grannen , et al. March 21, 2 | 2017-03-21 |
Acoustic resonator comprising aluminum scandium nitride and temperature compensation feature Grant 9,590,165 - Zou , et al. March 7, 2 | 2017-03-07 |
Acoustic Resonator Device With An Electrically-isolated Layer Of High-acoustic-impedance Material Interposed Therein App 20170047907 - Burak; Dariusz ;   et al. | 2017-02-16 |
Acoustic resonator comprising acoustic redistribution layers Grant 9,548,438 - Burak , et al. January 17, 2 | 2017-01-17 |
Bulk acoustic wave resonators having doped piezoelectric material and frame elements Grant 9,520,855 - Feng , et al. December 13, 2 | 2016-12-13 |
Acoustic resonator comprising collar and acoustic reflector with temperature compensating layer Grant 9,490,418 - Burak , et al. November 8, 2 | 2016-11-08 |
Acoustic resonator comprising temperature compensating layer and perimeter distributed bragg reflector Grant 9,490,770 - Burak , et al. November 8, 2 | 2016-11-08 |
Acoustic resonator having temperature compensation Grant 9,484,882 - Burak , et al. November 1, 2 | 2016-11-01 |
Bulk acoustic wave resonator having doped piezoelectric layer Grant 9,455,681 - Feng , et al. September 27, 2 | 2016-09-27 |
Accoustic resonator having integrated lateral feature and temperature compensation feature Grant 9,444,426 - Burak , et al. September 13, 2 | 2016-09-13 |
Acoustic Resonator Having Integrated Lateral Feature And Temperature Compensation Feature App 20160182011 - Burak; Dariusz ;   et al. | 2016-06-23 |
Bulk acoustic wave resonator having doped piezoelectric layer with improved piezoelectric characteristics Grant 9,225,313 - Bradley , et al. December 29, 2 | 2015-12-29 |
Method of manufacturing an electrical resonator Grant 9,209,776 - Grannen , et al. December 8, 2 | 2015-12-08 |
Electrical Resonator App 20150341015 - Grannen; Kevin J. ;   et al. | 2015-11-26 |
Bulk Acoustic Wave Devices with Temperature-Compensating Niobium Alloy Electrodes App 20150326200 - Grannen; Kevin J. ;   et al. | 2015-11-12 |
Fabricating Low-defect Rare-earth Doped Piezoelectric Layer App 20150311046 - Yeh; Tangshiun ;   et al. | 2015-10-29 |
Acoustic Resonator Comprising Acoustic Redistribution Layers App 20150280100 - Burak; Dariusz ;   et al. | 2015-10-01 |
Bulk acoustic wave resonator having piezoelectric layer with multiple dopants Grant 9,136,819 - Grannen , et al. September 15, 2 | 2015-09-15 |
Bulk Acoustic Wave Resonator Having Doped Piezoelectric Layer App 20150244347 - Feng; Chris ;   et al. | 2015-08-27 |
Bulk Acoustic Wave Resonators Having Doped Piezoelectric Material And Frame Elements App 20150244346 - Feng; Chris ;   et al. | 2015-08-27 |
Magnetron Sputtering Device And Method Of Fabricating Thin Film Using Magnetron Sputtering Device App 20150240349 - Grannen; Kevin J. ;   et al. | 2015-08-27 |
Bulk acoustic wave resonator comprising a boron nitride piezoelectric layer Grant 9,088,265 - Bradley , et al. July 21, 2 | 2015-07-21 |
Film bulk acoustic resonator with multi-layers of different piezoelectric materials and method of making Grant 9,065,421 - Feng , et al. June 23, 2 | 2015-06-23 |
Bulk Acoustic Wave Resonator Having Piezoelectric Layer With Varying Amounts Of Dopant App 20140354109 - Grannen; Kevin J. ;   et al. | 2014-12-04 |
Bulk Acoustic Wave Resonator Comprising A Boron Nitride Piezoelectric Layer App 20140340172 - BRADLEY; Paul ;   et al. | 2014-11-20 |
Acoustic Resonator Comprising Integrated Structures For Improved Performance App 20140225683 - Burak; Dariusz ;   et al. | 2014-08-14 |
Acoustic Resonator Having Temperature Compensation App 20140225682 - BURAK; Dariusz ;   et al. | 2014-08-14 |
Bulk acoustic resonator comprising piezoelectric layer and inverse piezoelectric layer Grant 8,796,904 - Burak , et al. August 5, 2 | 2014-08-05 |
Acoustic Resonator Comprising Aluminum Scandium Nitride And Temperature Compensation Feature App 20140175950 - Zou; Qiang ;   et al. | 2014-06-26 |
Scandium-aluminum Alloy Sputtering Targets App 20140174908 - Feng; Chris ;   et al. | 2014-06-26 |
Acoustic Resonator Comprising Collar And Acoustic Reflector With Temperature Compensating Layer App 20140159548 - Burak; Dariusz ;   et al. | 2014-06-12 |
Acoustic Resonator Comprising Temperature Compensating Layer And Perimeter Distributed Bragg Reflector App 20140152152 - Burak; Dariusz ;   et al. | 2014-06-05 |
Bulk Acoustic Wave Resonator Having Doped Piezoelectric Layer With Improved Piezoelectric Characteristics App 20140118089 - Bradley; Paul ;   et al. | 2014-05-01 |
Accoustic Resonator Having Integrated Lateral Feature And Temperature Compensation Feature App 20140118092 - Burak; Dariusz ;   et al. | 2014-05-01 |
Bulk Acoustic Wave Resonator Having Piezoelectric Layer With Multiple Dopants App 20140118090 - Grannen; Kevin J. ;   et al. | 2014-05-01 |
Film Bulk Acoustic Resonator With Multi-layers Of Different Piezoelectric Materials And Method Of Making App 20130193808 - FENG; Chris ;   et al. | 2013-08-01 |
Bulk Acoustic Resonator Comprising Piezoelectric Layer And Inverse Piezoelectric Layer App 20130106248 - BURAK; Dariusz ;   et al. | 2013-05-02 |
Stacked Bulk Acoustic Resonator Comprising Distributed Bragg Reflector App 20120293278 - BURAK; Dariusz ;   et al. | 2012-11-22 |
Method Of Forming Acoustic Resonator Using Intervening Seed Layer App 20120096697 - GRANNEN; Kevin J. ;   et al. | 2012-04-26 |
Piezoelectric resonator structures having temperature compensation App 20100327701 - Grannen; Kevin J. ;   et al. | 2010-12-30 |
Film bulk acoustic resonator (FBAR) devices with temperature compensation Grant 7,561,009 - Larson, III , et al. July 14, 2 | 2009-07-14 |
Temperature compensation of film bulk acoustic resonator devices Grant 7,345,410 - Grannen , et al. March 18, 2 | 2008-03-18 |
Temperature compensation of film bulk acoustic resonator devices App 20070222336 - Grannen; Kevin J. ;   et al. | 2007-09-27 |
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Thin-film magnetic recording media with dual intermediate layer structure for increased coercivity Grant 6,982,071 - Ma , et al. January 3, 2 | 2006-01-03 |
Thin-film magnetic recording media with dual intermediate layer structure for increased coercivity App 20040146685 - Ma, Xiaoding ;   et al. | 2004-07-29 |
Nitrogen-doped hydrogenated carbon films by ion beam deposition Grant 6,689,425 - Ma , et al. February 10, 2 | 2004-02-10 |
Thin Films Of Crosslinked Fluoropolymer On A Carbon Substrate App 20030129372 - STIRNIMAN, MICHAEL J. ;   et al. | 2003-07-10 |
Thin films of crosslinked fluoropolymer on a carbon substrate Grant 6,589,641 - Stirniman , et al. July 8, 2 | 2003-07-08 |
Ion beam deposition of diamond-like carbon overcoats by hydrocarbon source gas pulsing Grant 6,392,244 - Grannen , et al. May 21, 2 | 2002-05-21 |