Patent | Date |
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Method and system for calculating probability of success or failure for a lithographic process due to stochastic variations of the lithographic process Grant 11,061,373 - Khaira , et al. July 13, 2 | 2021-07-13 |
Source optimization for image fidelity and throughput Grant 10,248,028 - Granik | 2019-04-02 |
Horizontal development bias in negative tone development of photoresist Grant 9,678,435 - Deng , et al. June 13, 2 | 2017-06-13 |
Source Optimization For Image Fidelity And Throughput App 20160238950 - Granik; Yuri | 2016-08-18 |
Layout content analysis for source mask optimization acceleration Grant 9,418,195 - Torres Robles , et al. August 16, 2 | 2016-08-16 |
Density-based integrated circuit design adjustment Grant 9,355,201 - Granik May 31, 2 | 2016-05-31 |
Modeling Photoresist Shrinkage Effects In Lithography App 20160140278 - Deng; Yunfei ;   et al. | 2016-05-19 |
Generating guiding patterns for directed self-assembly Grant 9,330,228 - Robles , et al. May 3, 2 | 2016-05-03 |
Source optimization by assigning pixel intensities for diffractive optical element using mathematical relationship Grant 9,323,161 - Granik April 26, 2 | 2016-04-26 |
Generating Guiding Patterns For Directed Self-Assembly App 20150227676 - Robles; Juan Andres Torres ;   et al. | 2015-08-13 |
Generating Guiding Patterns For Directed Self-Assembly App 20150143323 - Robles; Juan Andres Torres ;   et al. | 2015-05-21 |
Generating guiding patterns for directed self-assembly Grant 9,032,357 - Robles , et al. May 12, 2 | 2015-05-12 |
Layout Content Analysis For Source Mask Optimization Acceleration App 20150067628 - Torres Robles; Juan Andres ;   et al. | 2015-03-05 |
Layout content analysis for source mask optimization acceleration Grant 8,843,859 - Torres Robles , et al. September 23, 2 | 2014-09-23 |
Optical Proximity Correction For Topographically Non-uniform Substrates App 20140229903 - Granik; Yuri ;   et al. | 2014-08-14 |
Optical proximity correction for topographically non-uniform substrates Grant 8,799,832 - Granik , et al. August 5, 2 | 2014-08-05 |
Layout design defect repair using inverse lithography Grant 8,788,982 - Lippincott , et al. July 22, 2 | 2014-07-22 |
Density-based Integrated Circuit Design Adjustment App 20140053123 - Granik; Yuri | 2014-02-20 |
Contour alignment for model calibration Grant 8,607,168 - Kusnadi , et al. December 10, 2 | 2013-12-10 |
Calculation System For Inverse Masks App 20130227500 - Sakajiri; Kyohei ;   et al. | 2013-08-29 |
Layout Design Defect Repair Using Inverse Lithography App 20130191795 - Lippincott; George ;   et al. | 2013-07-25 |
Electron beam simulation corner correction for optical lithography Grant 8,464,185 - Granik June 11, 2 | 2013-06-11 |
Inverse mask design and correction for electronic design Grant 8,434,031 - Granik April 30, 2 | 2013-04-30 |
Layout Content Analysis for Source Mask Optimization Acceleration App 20130036390 - Torres Robles; Juan Andres ;   et al. | 2013-02-07 |
Inverse Mask Design and Correction for Electronic Design App 20120042291 - Granik; Yuri ;   et al. | 2012-02-16 |
Contrast-based resolution enhancement for photolithographic processing Grant 8,108,806 - Robles , et al. January 31, 2 | 2012-01-31 |
Model-based SRAF insertion Grant 8,037,429 - Shang , et al. October 11, 2 | 2011-10-11 |
Contour Alignment For Model Calibration App 20110202898 - KUSNADI; IR ;   et al. | 2011-08-18 |
Contour Self-Alignment For Optical Proximity Correction Model Calibration App 20110202893 - Kusnadi; Ir ;   et al. | 2011-08-18 |
Calculation system for inverse masks Grant 7,987,434 - Granik , et al. July 26, 2 | 2011-07-26 |
Pattern Transfer Modeling for Optical Lithographic Processes App 20110138343 - Granik; Yuri | 2011-06-09 |
Layout Content Analysis for Source Mask Optimization Acceleration App 20110047519 - Torres Robles; Juan Andres ;   et al. | 2011-02-24 |
Inverse Mask Design and Correction for Electronic Design App 20110004856 - Granik; Yuri ;   et al. | 2011-01-06 |
Visibility and Transport Kernels for Variable Etch Bias Modeling of Optical Lithography App 20100269084 - Granik; Yuri | 2010-10-21 |
Electron Beam Simulation Corner Correction For Optical Lithpography App 20100269086 - Granik; Yuri | 2010-10-21 |
Shape-based photolithographic model calibration Grant 7,805,699 - Kusnadi , et al. September 28, 2 | 2010-09-28 |
Source Optimization For Image Fidelity And Throughput App 20100039633 - Granik; Yuri | 2010-02-18 |
Calculation System For Inverse Masks App 20100023915 - Granik; Yuri | 2010-01-28 |
Source optimization for image fidelity and throughput Grant 7,623,220 - Granik November 24, 2 | 2009-11-24 |
Contrast-based Resolution Enhancement For Photolithographic Processing App 20090271759 - Torres Robles; Juan Andres ;   et al. | 2009-10-29 |
Contrast based resolution enhancement for photolithographic processing Grant 7,562,336 - Torres Robles , et al. July 14, 2 | 2009-07-14 |
Calculation system for inverse masks Grant 7,552,416 - Granik , et al. June 23, 2 | 2009-06-23 |
Calculation System For Inverse Masks App 20090125869 - Granik; Yuri ;   et al. | 2009-05-14 |
Shape-based photolithographic model calibration App 20090100389 - Kusnadi; Ir ;   et al. | 2009-04-16 |
Calculation system for inverse masks Grant 7,487,489 - Granik February 3, 2 | 2009-02-03 |
Source optimization for image fidelity and throughput App 20080174756 - Granik; Yuri | 2008-07-24 |
Method of compensating for etch effects in photolithographic processing Grant 7,392,168 - Granik , et al. June 24, 2 | 2008-06-24 |
Grid-based resist simulation Grant 7,378,202 - Granik , et al. May 27, 2 | 2008-05-27 |
Contrast based resolution enhancement for photolithographic processing Grant 7,293,249 - Torres Robles , et al. November 6, 2 | 2007-11-06 |
Calculation System For Inverse Masks App 20070198963 - Granik; Yuri ;   et al. | 2007-08-23 |
Grid-based resist simulation App 20070196747 - Granik; Yuri ;   et al. | 2007-08-23 |
Source optimization for image fidelity and throughput Grant 7,245,354 - Granik July 17, 2 | 2007-07-17 |
Matrix optical process correction Grant 7,237,221 - Granik , et al. June 26, 2 | 2007-06-26 |
Long range corrections in integrated circuit layout designs Grant 7,234,130 - Word , et al. June 19, 2 | 2007-06-19 |
Contrast Based Resolution Enhancement For Photolithographic Processing App 20070124708 - Torres Robles; Juan Andres ;   et al. | 2007-05-31 |
Calculation system for inverse masks App 20060269875 - Granik; Yuri | 2006-11-30 |
Model-based SRAF insertion App 20060200790 - Shang; Shumay Dou ;   et al. | 2006-09-07 |
Contrast based resolution enhancing technology Grant 7,013,439 - Robles , et al. March 14, 2 | 2006-03-14 |
Matrix optical process correction App 20050278685 - Granik, Yuri ;   et al. | 2005-12-15 |
Long range corrections in integrated circuit layout designs App 20050216878 - Word, James ;   et al. | 2005-09-29 |
Matrix optical process correction Grant 6,928,634 - Granik , et al. August 9, 2 | 2005-08-09 |
Source optimization for image fidelity and throughput App 20050168498 - Granik, Yuri | 2005-08-04 |
Contrast based resolution enhancement for photolithographic processing App 20050044513 - Robles, Juan Andres Torres ;   et al. | 2005-02-24 |
Matrix optical process correction App 20040133871 - Granik, Yuri ;   et al. | 2004-07-08 |
Contrast based resolution enhancing technology App 20040005089 - Robles, Juan Andres Torres ;   et al. | 2004-01-08 |
Integrated device structure prediction based on model curvature Grant 6,643,616 - Granik , et al. November 4, 2 | 2003-11-04 |
Method of compensating for etch effects in photolithographic processing App 20020133801 - Granik, Yuri ;   et al. | 2002-09-19 |