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Pellicle And Pellicle Assembly App 20220252974 - VLES; David Ferdinand ;   et al. | 2022-08-11 |
Pellicle and pellicle assembly Grant 11,347,142 - Vles , et al. May 31, 2 | 2022-05-31 |
Pellicle And Pellicle Assembly App 20210208500 - VLES; David Ferdinand ;   et al. | 2021-07-08 |
Pellicle and pellicle assembly Grant 10,983,431 - Vles , et al. April 20, 2 | 2021-04-20 |
Pellicle And Pellicle Assembly App 20200064731 - VLES; David Ferdinand ;   et al. | 2020-02-27 |
Pellicle and pellicle assembly Grant 10,466,585 - Vles , et al. No | 2019-11-05 |
Pellicle And Pellicle Assembly App 20180364561 - VLES; David Ferdinand ;   et al. | 2018-12-20 |
Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit Grant RE46,099 - Govil , et al. August 9, 2 | 2016-08-09 |
Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit Grant RE45,511 - Govil , et al. May 12, 2 | 2015-05-12 |
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Cooling of Actuator Coils App 20100026974 - Wiener; Roberto B. ;   et al. | 2010-02-04 |
Spatial light modulator using an integrated circuit actuator and method of making and using same Grant 7,525,718 - Govil , et al. April 28, 2 | 2009-04-28 |
Spatial Light Modulator Using an Integrated Circuit Actuator and Method of Making and Using Same App 20080231937 - GOVIL; Pradeep K. ;   et al. | 2008-09-25 |
Spatial light modulator using an integrated circuit actuator Grant 7,385,750 - Govil , et al. June 10, 2 | 2008-06-10 |
Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit Grant 7,372,614 - Govil , et al. May 13, 2 | 2008-05-13 |
System and method utilizing an illumination beam adjusting system Grant 7,265,815 - Govil September 4, 2 | 2007-09-04 |
Deformable mirror using piezoelectric actuators formed as an integrated circuit and method of use Grant 7,224,504 - Govil , et al. May 29, 2 | 2007-05-29 |
System and method utilizing an electrooptic modulator Grant 7,142,353 - Tsacoyeanes , et al. November 28, 2 | 2006-11-28 |
System and method utilizing an illumination beam adjusting system App 20060262288 - Govil; Pradeep K. | 2006-11-23 |
System and method utilizing an electrooptic modulator App 20060164711 - Govil; Pradeep K. ;   et al. | 2006-07-27 |
System and method utilizing an electrooptic modulator App 20060121375 - Tsacoyeanes; James G. ;   et al. | 2006-06-08 |
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Method of using deformable mirror using piezoelectric actuators formed as an integrated circuit App 20060028703 - Govil; Pradeep K. ;   et al. | 2006-02-09 |
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DUV scanner linewidth control by mask error factor compensation App 20040066496 - Govil, Pradeep K. ;   et al. | 2004-04-08 |
DUV scanner linewidth control by mask error factor compensation Grant 6,573,975 - Govil , et al. June 3, 2 | 2003-06-03 |
DUV scanner linewidth control by mask error factor compensation App 20020145719 - Govil, Pradeep K. ;   et al. | 2002-10-10 |
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