Goto; Shigehiro

Patent Applications and Registrations

Patent applications and USPTO patent grants for Goto; Shigehiro.The latest application filed is for "thermal processing apparatus and thermal processing method".

Company Profile

3.14.14

Goto; Shigehiro - Kyoto JP
GOTO; Shigehiro - Kyoto-shi Kyoto
Goto, Shigehiro - Horikawa-dori JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Treating liquid vaporizing apparatus Grant 10,651,056 - Tanaka , et al.	2020-05-12
Thermal processing apparatus and thermal processing method Grant 10,629,463 - Momma , et al.	2020-04-21
Substrate treating apparatus and treatment gas supplying nozzle Grant 10,214,814 - Fukumoto , et al. Feb	2019-02-26
Thermal Processing Apparatus And Thermal Processing Method App 20180033660 - MOMMA; Toru ; et al.	2018-02-01
Treating Liquid Vaporizing Apparatus And Substrate Treating Apparatus App 20170221731 - TANAKA; Atsushi ; et al.	2017-08-03
Substrate processing apparatus and substrate processing method Grant 9,508,573 - Kashiyama , et al. November 29, 2	2016-11-29
Substrate Treating Apparatus And Treatment Gas Supplying Nozzle App 20160281235 - FUKUMOTO; Yasuhiro ; et al.	2016-09-29
Substrate heat treatment apparatus Grant 8,608,885 - Goto , et al. December 17, 2	2013-12-17
Substrate Processing Apparatus And Substrate Processing Method App 20130084393 - KASHIYAMA; Masahito ; et al.	2013-04-04
Substrate heat treatment apparatus Grant 8,003,919 - Goto , et al. August 23, 2	2011-08-23
Substrate heat treatment apparatus Grant 7,718,925 - Goto , et al. May 18, 2	2010-05-18
Treating solution supply nozzle, a substrate treating apparatus having this nozzle, and a method of manufacturing a treating solution supply nozzle Grant 7,628,862 - Goto , et al. December 8, 2	2009-12-08
Substrate heat treatment apparatus Grant 7,432,476 - Morita , et al. October 7, 2	2008-10-07
Treating solution supply nozzle, a substrate treating apparatus having this nozzle, and a method of manufacturing a treating solution supply nozzle Grant 7,267,723 - Goto , et al. September 11, 2	2007-09-11
Substrate Heat Treatment Apparatus App 20070128888 - Goto; Shigehiro ; et al.	2007-06-07
Substrate Heat Treatment Apparatus App 20070128889 - Goto; Shigehiro ; et al.	2007-06-07
Substrate Heat Treatment Apparatus App 20070128570 - Goto; Shigehiro ; et al.	2007-06-07
Heat treatment apparatus App 20060292515 - Hisai; Akihiro ; et al.	2006-12-28
Substrate heat treatment apparatus App 20060289432 - Morita; Akihiko ; et al.	2006-12-28
Treating solution supply nozzle, a substrate treating apparatus having this nozzle, and a method of manufacturing a treating solution supply nozzle App 20060236928 - Goto; Shigehiro ; et al.	2006-10-26
Chemical treating apparatus Grant 6,827,782 - Goto , et al. December 7, 2	2004-12-07
Heat-treating apparatus App 20040232136 - Hisaii, Akihiro ; et al.	2004-11-25
Treating solution supply nozzle, a substrate treating apparatus having this nozzle, and a method of manufacturing a treating solution supply nozzle App 20040226505 - Goto, Shigehiro ; et al.	2004-11-18
Chemical treating apparatus App 20030141314 - Goto, Shigehiro ; et al.	2003-07-31
Coating solution applying method and apparatus Grant 6,440,218 - Sanada , et al. August 27, 2	2002-08-27

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