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Distributor and distributing method, plasma processing system and method, and process for fabricating LCD Grant 7,582,569 - Ohmi , et al. September 1, 2 | 2009-09-01 |
Microwave plasma processing apparatus, microwave processing method and microwave feeding apparatus Grant 7,325,511 - Goto , et al. February 5, 2 | 2008-02-05 |
Distributor and distributing method, plasma processing system and method, and process for fabricating lcd App 20070133919 - Ohmi; Tadahiro ;   et al. | 2007-06-14 |
Plasma processing apparatus and processing method, and flat panel display manufacturing method App 20070045242 - Goto; Naohisa ;   et al. | 2007-03-01 |
Microwave plasma processing apparatus, microwave processing method and microwave feeding apparatus App 20040026039 - Goto, Naohisa ;   et al. | 2004-02-12 |
Plasma-assisted processing system and plasma-assisted processing method Grant 6,646,224 - Ishii , et al. November 11, 2 | 2003-11-11 |
Plasma-assisted Processing System And Plasma-assisted Processing Method App 20030150846 - Ishii, Nobuo ;   et al. | 2003-08-14 |
Plasma processing apparatus and plasma processing method Grant 6,528,752 - Ishii , et al. March 4, 2 | 2003-03-04 |
Above deck unit for automatic identification system Grant 6,522,301 - Takayama , et al. February 18, 2 | 2003-02-18 |
Above deck unit for automatic identification system App 20020050952 - Takayama, Masaki ;   et al. | 2002-05-02 |
Plasma processing apparatus Grant 6,347,602 - Goto , et al. February 19, 2 | 2002-02-19 |
Plasma treatment system Grant 6,322,662 - Ishii , et al. November 27, 2 | 2001-11-27 |
Plasma processing apparatus App 20010008122 - Goto, Naohisa ;   et al. | 2001-07-19 |
Surface mounting antenna having a dielectric base and a radiating conductor film Grant 5,945,959 - Tanidokoro , et al. August 31, 1 | 1999-08-31 |
Plasma processing apparatus Grant 5,698,036 - Ishii , et al. December 16, 1 | 1997-12-16 |
Polarization-universal radial line slot antenna Grant 5,661,498 - Goto , et al. August 26, 1 | 1997-08-26 |
Slotted leaky waveguide array antenna Grant 5,579,019 - Uematsu , et al. November 26, 1 | 1996-11-26 |
Combined capacitive loaded monopole and notch array with slits for multiple resonance and impedance matching pins Grant 5,402,136 - Goto , et al. March 28, 1 | 1995-03-28 |
Single-layered radial line slot antenna Grant 5,175,561 - Goto December 29, 1 | 1992-12-29 |
Flat circular waveguide device Grant 5,049,895 - Ito , et al. September 17, 1 | 1991-09-17 |
Slotted waveguide antenna Grant 4,916,458 - Goto April 10, 1 | 1990-04-10 |
Flat circular unidirectional microwave antenna Grant 4,819,003 - Goto , et al. April 4, 1 | 1989-04-04 |
Portable radio communication apparatus comprising an antenna member for a broad-band signal Grant 4,641,366 - Yokoyama , et al. February 3, 1 | 1987-02-03 |