| Patent | Date |
|---|
Active-light-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Formation Method, Method For Manufacturing Electronic Device, Compound, And Resin
App 20220179307 - TAKADA; Akira ; et al. | 2022-06-09 |
Composition for forming upper layer film, pattern forming method, resist pattern, and method for manufacturing electronic device
Grant 11,281,103 - Hatakeyama , et al. March 22, 2 | 2022-03-22 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Pattern Forming Method, Resist Film, And Method For Manufacturing Electronic Device
App 20220082938 - USHIYAMA; Aina ; et al. | 2022-03-17 |
Pattern forming method, method for manufacturing electronic device, laminate film, and composition for forming upper layer film
Grant 11,249,395 - Inoue , et al. February 15, 2 | 2022-02-15 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20220043347 - TAKADA; Akira ; et al. | 2022-02-10 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20210364917 - UEMURA; Minoru ; et al. | 2021-11-25 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20210356862 - KOJIMA; Masafumi ; et al. | 2021-11-18 |
Method For Producing Salt
App 20210355082 - MINAMIKAWA; Ryo ; et al. | 2021-11-18 |
Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device
Grant 11,156,917 - Sakita , et al. October 26, 2 | 2021-10-26 |
Pattern forming method, method for manufacturing electronic device, monomer for producing resin for semiconductor device manufacturing process, resin, method for producing resin, actinic ray-sensitive or radiation-sensitive resin composition, and actinic ray-sensitive or radiation-sensitive film
Grant 11,150,557 - Hatakeyama , et al. October 19, 2 | 2021-10-19 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20210318616 - ASAKAWA; Daisuke ; et al. | 2021-10-14 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20210294217 - Goto; Akiyoshi ; et al. | 2021-09-23 |
Active Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20210286263 - TANGO; Naohiro ; et al. | 2021-09-16 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20210286264 - Kaneko; Akihiro ; et al. | 2021-09-16 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20210271162 - OU; Keiyu ; et al. | 2021-09-02 |
Actinic ray-sensitive or radiation sensitive resin composition, actinic raysensitive or radiation-sensitive film, pattern forming method, method for manufacturing electronic device, and photoacid generator
Grant 11,073,762 - Asakawa , et al. July 27, 2 | 2021-07-27 |
Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device
Grant 11,067,890 - Goto , et al. July 20, 2 | 2021-07-20 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20210216012 - KANEKO; Akihiro ; et al. | 2021-07-15 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20210191265 - YAGI; Kazunari ; et al. | 2021-06-24 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20210165323 - YAGI; Kazunari ; et al. | 2021-06-03 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Pattern Forming Method, Method For Manufacturing Electronic Device, And Resin
App 20210109446 - Goto; Akiyoshi ; et al. | 2021-04-15 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20210088905 - KOJIMA; Masafumi ; et al. | 2021-03-25 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, Method For Manufacturing Electronic Device, And Resin
App 20210072642 - ASAKAWA; Daisuke ; et al. | 2021-03-11 |
Active-ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Formation Method, And Method For Manufacturing Electronic Device
App 20200401045 - ASAKAWA; Daisuke ; et al. | 2020-12-24 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20200393756 - KATO; Keita ; et al. | 2020-12-17 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, Method For Manufacturing Electronic Device, And Resin
App 20200393762 - OGAWA; Michihiro ; et al. | 2020-12-17 |
Pattern forming method, method for producing electronic device, and actinic ray-sensitive or radiation-sensitive resin composition for organic solvent development
Grant 10,859,914 - Hatakeyama , et al. December 8, 2 | 2020-12-08 |
Pattern forming method, resist pattern, method for manufacturing electronic device, and composition for forming upper layer film
Grant 10,852,637 - Inoue , et al. December 1, 2 | 2020-12-01 |
Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device
Grant 10,802,399 - Nishio , et al. October 13, 2 | 2020-10-13 |
Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method, and method for manufacturing electronic device
Grant 10761424 - | 2020-09-01 |
Photosensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20200183274 - TANGO; Naohiro ; et al. | 2020-06-11 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturin
App 20200159117 - NISHIO; Ryo ; et al. | 2020-05-21 |
Pattern forming method, resist pattern, and process for producing electronic device
Grant 10,578,968 - Yamamoto , et al. | 2020-03-03 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturin
App 20200012189 - GOTO; Akiyoshi ; et al. | 2020-01-09 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturin
App 20190377261 - Sakita; Kyohei ; et al. | 2019-12-12 |
Actinic Ray-sensitive Or Radiation Sensitive Resin Composition, Actinic Raysensitive Or Radiation-sensitive Film, Pattern Formin
App 20190294043 - Asakawa; Daisuke ; et al. | 2019-09-26 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Actinic Ray-sensitive Or Radiation-sensitive Film, Pattern Formi
App 20190294042 - KATO; Keita ; et al. | 2019-09-26 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method Of Manufacturing
App 20190196326 - KOJIMA; Masafumi ; et al. | 2019-06-27 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Actinic Ray-sensitive Or Radiation-sensitive Film, Pattern Formi
App 20190171104 - Takada; Akira ; et al. | 2019-06-06 |
Pattern forming method, treating agent, electronic device, and method for manufacturing the same
Grant 10,303,058 - Furutani , et al. | 2019-05-28 |
Active-light-sensitive or radiation-sensitive resin composition, active-light-sensitive or radiation-sensitive film and pattern forming method, each using composition, and method for manufacturing electronic device
Grant 10,261,417 - Goto , et al. | 2019-04-16 |
Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film and method of forming pattern
Grant 10,234,759 - Kawabata , et al. | 2019-03-19 |
Pattern forming method, composition for forming protective film, method for manufacturing electronic device, and electronic device
Grant 10,175,578 - Inoue , et al. J | 2019-01-08 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20180364571 - NISHIO; Ryo ; et al. | 2018-12-20 |
Pattern forming method, resist pattern, and method for manufacturing electronic device
Grant 10,114,292 - Inoue , et al. October 30, 2 | 2018-10-30 |
Pattern Forming Method, Method For Manufacturing Electronic Device, Monomer For Producing Resin For Semiconductor Device Manufacturing Process, Resin, Method For Producing Resin, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, And Actinic Ray-sensitive Or Radiation-sensitive Film
App 20180299776 - HATAKEYAMA; Naoya ; et al. | 2018-10-18 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Actinic Ray-sensitive Or Radiation-sensitive Film, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20180292751 - ASAKAWA; Daisuke ; et al. | 2018-10-11 |
Pattern Forming Method, Method For Manufacturing Electronic Device, Laminate Film, And Composition For Forming Upper Layer Film
App 20180275518 - INOUE; Naoki ; et al. | 2018-09-27 |
Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device
Grant 10,025,186 - Goto , et al. July 17, 2 | 2018-07-17 |
Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device
Grant 10,018,913 - Goto , et al. July 10, 2 | 2018-07-10 |
Active-light-sensitive or radiation-sensitive resin composition, pattern forming method, and method for manufacturing electronic device
Grant 9,996,003 - Goto , et al. June 12, 2 | 2018-06-12 |
Pattern Forming Method, Laminate, And Resist Composition For Organic Solvent Development
App 20180120706 - SHIRAKAWA; Michihiro ; et al. | 2018-05-03 |
Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, method for manufacturing electronic device, and electronic device
Grant 9,952,509 - Kato , et al. April 24, 2 | 2018-04-24 |
Pattern Forming Method, Method For Manufacturing Electronic Device, And Actinic Ray-sensitive Or Radiation-sensitive Resin Composition
App 20180107118 - GOTO; Akiyoshi ; et al. | 2018-04-19 |
Pattern Forming Method, Resist Pattern, Method For Manufacturing Electronic Device, And Composition For Forming Upper Layer Film
App 20180081277 - INOUE; Naoki ; et al. | 2018-03-22 |
Pattern Forming Method, Resist Pattern, Method For Manufacturing Electronic Device, And Composition For Forming Upper Layer Film
App 20180011406 - HATAKEYAMA; Naoya ; et al. | 2018-01-11 |
Composition For Forming Upper Layer Film, Pattern Forming Method, Resist Pattern, And Method For Manufacturing Electronic Device
App 20170371244 - HATAKEYAMA; Naoya ; et al. | 2017-12-28 |
Pattern Forming Method, Resist Pattern, Method For Manufacturing Electronic Device, And Electronic Device
App 20170349686 - INOUE; Naoki ; et al. | 2017-12-07 |
Composition For Forming Upper Layer Film, Pattern Forming Method Using The Same, And Method For Manufacturing Electronic Device
App 20170351179 - GOTO; Akiyoshi ; et al. | 2017-12-07 |
Pattern Forming Method, Method For Producing Electronic Device, And Actinic Ray-sensitive Or Radiation-sensitive Resin Composition For Organic Solvent Development
App 20170322490 - HATAKEYAMA; Naoya ; et al. | 2017-11-09 |
Active light sensitive or radiation sensitive resin composition, pattern forming method, method for manufacturing electronic device, and electronic device
Grant 9,791,777 - Goto , et al. October 17, 2 | 2017-10-17 |
Method For Forming Negative Tone Pattern, Method For Manufacturing Electronic Device, And Active-light-sensitive Or Radiation-sensitive Resin Composition
App 20170199455 - KOJIMA; Masafumi ; et al. | 2017-07-13 |
Pattern Forming Method, Resist Pattern, And Method For Manufacturing Electronic Device
App 20170199460 - TANGO; Naohiro ; et al. | 2017-07-13 |
Pattern Forming Method, Resist Pattern, And Process For Producing Electronic Device
App 20170199461 - YAMAMOTO; Kei ; et al. | 2017-07-13 |
Method For Forming Negative Tone Pattern, Method For Manufacturing Electronic Device, And Active-light-sensitive Or Radiation-sensitive Resin Composition
App 20170192355 - KOJIMA; Masafumi ; et al. | 2017-07-06 |
Pattern Forming Method, Resist Pattern, And Method For Manufacturing Electronic Device
App 20170184974 - INOUE; Naoki ; et al. | 2017-06-29 |
Pattern Forming Method, Composition For Forming Upper Layer Film, Resist Pattern, And Method For Manufacturing Electronic Device
App 20170184970 - GOTO; Akiyoshi ; et al. | 2017-06-29 |
Pattern Forming Method, Composition For Forming Protective Film, Method For Manufacturing Electronic Device, And Electronic Device
App 20170176862 - INOUE; Naoki ; et al. | 2017-06-22 |
Active-light-sensitive Or Radiation-sensitive Resin Composition, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20170168394 - GOTO; Akiyoshi ; et al. | 2017-06-15 |
Active-light-sensitive Or Radiation-sensitive Resin Composition, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20170115568 - GOTO; Akiyoshi ; et al. | 2017-04-27 |
Active-light-sensitive Or Radiation-sensitive Resin Composition, Pattern Forming Method, And Method For Manufacturing Electronic Device
App 20170115569 - GOTO; Akiyoshi ; et al. | 2017-04-27 |
Pattern Forming Method And Method For Manufacturing Electronic Device Using Same
App 20170115571 - KATO; Keita ; et al. | 2017-04-27 |
Pattern Forming Method, Active Light Sensitive Or Radiation Sensitive Resin Composition, Active Light Sensitive Or Radiation Sensitive Film, Method For Manufacturing Electronic Device, And Electronic Device
App 20170059995 - FURUTANI; Hajime ; et al. | 2017-03-02 |
Active-light-sensitive Or Radiation-sensitive Resin Composition, Active-light-sensitive Or Radiation-sensitive Film And Pattern Forming Method, Each Using Composition, And Method For Manufacturing Electronic Device
App 20170038685 - GOTO; Akiyoshi ; et al. | 2017-02-09 |
Method of forming pattern, actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film, process for manufacturing electronic device and electronic device
Grant 9,551,931 - Ito , et al. January 24, 2 | 2017-01-24 |
Active Light Sensitive Or Radiation Sensitive Resin Composition, Pattern Forming Method, Method For Manufacturing Electronic Device, And Electronic Device
App 20160347897 - GOTO; Akiyoshi ; et al. | 2016-12-01 |
Active Light Sensitive Or Radiation Sensitive Resin Composition, Pattern Forming Method, Method For Manufacturing Electronic Device, And Electronic Device
App 20160349613 - GOTO; Akiyoshi ; et al. | 2016-12-01 |
Pattern Forming Method, Treating Agent, Electronic Device, And Method For Manufacturing The Same
App 20160327866 - FURUTANI; Hajime ; et al. | 2016-11-10 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Method For Manufacturing Electronic Device, And Electronic Device
App 20160313645 - KATO; Keita ; et al. | 2016-10-27 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Pattern Forming Method, Method For Manufacturing Electronic Device, And Electronic Device
App 20160266488 - KOJIMA; Masafumi ; et al. | 2016-09-15 |
Active Lightray-sensitive Or Radiation-sensitive Resin Composition And Pattern Forming Method
App 20160223905 - OU; Keiyu ; et al. | 2016-08-04 |
Pattern forming method, method for manufacturing electronic device, and electronic device
Grant 9,405,197 - Shibuya , et al. August 2, 2 | 2016-08-02 |
Pattern Formation Method, Electronic-device Production Method, And Processing Agent
App 20160195814 - ENOMOTO; Yuichiro ; et al. | 2016-07-07 |
Pattern-forming Method, Electronic Device And Method For Producing Same, And Developing Fluid
App 20160048082 - KOJIMA; Masafumi ; et al. | 2016-02-18 |
Pattern forming method and actinic ray-sensitive or radiation-sensitive resin composition for use in the method
Grant 9,250,519 - Kataoka , et al. February 2, 2 | 2016-02-02 |
Pattern Forming Method, Actinic Ray-sensitive Or Radiation-sensitive Resin Composition For Organic Solvent Development Used Therefor And Method Of Manufacturing The Same, Method Of Manufacturing Electronic Device, And Electronic Device
App 20160004156 - SUGIYAMA; Shinichi ; et al. | 2016-01-07 |
Method Of Forming Pattern, Actinic-ray- Or Radiation-sensitive Resin Composition, Actinic-ray- Or Radiation-sensitive Film, Process For Manufacturing Electronic Device And Electronic Device
App 20160004157 - ITO; Junichi ; et al. | 2016-01-07 |
Actinic-ray- Or Radiation-sensitive Resin Composition, Actinic-ray- Or Radiation-sensitive Film And Method Of Forming Pattern
App 20150338736 - KAWABATA; Takeshi ; et al. | 2015-11-26 |
Actinic-ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film Formed Using Said Composition, Method For Forming Pattern Using Said Composition, Process For Producing Electronic Device, And Electronic Device
App 20150277225 - KOJIMA; MASAFUMI ; et al. | 2015-10-01 |
Dye compound, method of producing dipyrromethene metal complex compound, method of producing dye multimer, substituted pyrrole compound, colored curable composition, color filter, method of producing color filter, solid-state image sensor and liquid crystal display device
Grant 9,116,426 - Arayama , et al. August 25, 2 | 2015-08-25 |
Actinic Ray-sensitive Or Radiation-sensitive Resin Composition, Resist Film Using The Same, Pattern Forming Method, And Method For Manufacturing Electronic Device And Electronic Device, And Compound
App 20150168830 - GOTO; Akiyoshi ; et al. | 2015-06-18 |
Pattern Forming Method, Method For Manufacturing Electronic Device, And Electronic Device
App 20150160559 - SHIBUYA; Akinori ; et al. | 2015-06-11 |
Pattern Forming Method And Actinic Ray-sensitive Or Radiation-sensitive Resin Composition For Use In The Method
App 20150111135 - KATAOKA; Shohei ; et al. | 2015-04-23 |
Method Of Forming Pattern And Actinic-ray- Or Radiation-sensitive Resin Composition For Use In The Method
App 20150111157 - KATO; Keita ; et al. | 2015-04-23 |
Colored curable composition, resist liquid, ink for inkjet printing, color filter, method of producing color filter, solid-state image sensor, liquid crystal display, organic EL display, image display device and colorant compound
Grant 8,815,478 - Ito , et al. August 26, 2 | 2014-08-26 |
Colorant multimer, colored curable composition, color filter and method for producing the same, and solid-state image sensor, image display device, liquid crystal display device and organic EL display with the color filter
Grant 8,778,235 - Ito , et al. July 15, 2 | 2014-07-15 |
Method of producing acid halide and acid halide
Grant 8,729,302 - Goto May 20, 2 | 2014-05-20 |
Composition for optical materials
Grant 8,506,853 - Wada , et al. August 13, 2 | 2013-08-13 |
Dye Compound, Method Of Producing Dipyrromethene Metalcomplex Compound, Method Of Producing Dye Multimer,substituted Pyrrole Compound, Colored Curable Composition,color Filter, Method Of Producing Color Filter, Solid-stateimage Sensor And Liquid Crystal Display Device
App 20130137018 - ARAYAMA; Kyohei ; et al. | 2013-05-30 |
Colored Curable Composition, Resist Liquid, Ink For Inkjet Printing, Color Filter, Method Of Producing Color Filter, Solid-state Image Sensor, Liquid Crystal Display, Organic El Display, Image Display Device And Colorant Compound
App 20120264039 - Ito; Junichi ; et al. | 2012-10-18 |
Colorant Multimer, Colored Curable Composition, Color Filter And Method For Producing The Same, And Solid-state Image Sensor, Image Display Device, Liquid Crystal Display Device And Organic El Display With The Color Filter
App 20120187351 - Ito; Junichi ; et al. | 2012-07-26 |
Method Of Producing Acid Halide And Acid Halide
App 20120053365 - GOTO; Akiyoshi | 2012-03-01 |
Curable composition for nanoimprint, and patterning method
Grant 8,025,833 - Kodama , et al. September 27, 2 | 2011-09-27 |
Composition For Optical Materials
App 20110089385 - Wada; Kenji ; et al. | 2011-04-21 |
Curable Composition For Nanoimprint, And Patterning Method
App 20090283937 - KODAMA; Kunihiko ; et al. | 2009-11-19 |
| 