| Patent | Date |
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Pillar-supported array of micro electron lenses
Grant 9,214,344 - Brodie , et al. December 15, 2 | 2015-12-15 |
Pillar-supported Array Of Micro Electron Lenses
App 20150340195 - BRODIE; Alan D. ; et al. | 2015-11-26 |
Sharp scattering angle trap for electron beam apparatus
Grant 8,890,066 - Gotkis , et al. November 18, 2 | 2014-11-18 |
Inline inspection of photovoltaics for electrical defects
Grant 8,427,185 - Zapalac, Jr. , et al. April 23, 2 | 2013-04-23 |
Wet Surface Treatment By Usage of a Liquid Bath Containing Energy Limited Bubbles
App 20130056038 - Gotkis; Yehiel | 2013-03-07 |
Wet surface treatment by usage of a liquid bath containing energy limited bubbles
Grant 8,206,508 - Gotkis June 26, 2 | 2012-06-26 |
Methods and apparatus for thin metal film thickness measurement
Grant 8,128,278 - Gotkis , et al. March 6, 2 | 2012-03-06 |
Inline Inspection Of Photovoltaics For Electrical Defects
App 20110133750 - Zapalac, JR.; George H. ; et al. | 2011-06-09 |
Tungsten plug deposition quality evaluation method by EBACE technology
Grant 7,945,086 - Gotkis , et al. May 17, 2 | 2011-05-17 |
Inline inspection of photovoltaics for electrical defects
Grant 7,906,972 - Zapalac, Jr. , et al. March 15, 2 | 2011-03-15 |
Method for making semiconductor structures implementing sacrificial material
Grant 7,875,548 - Gotkis , et al. January 25, 2 | 2011-01-25 |
Dynamic pattern generator with cup-shaped structure
Grant 7,755,061 - Grella , et al. July 13, 2 | 2010-07-13 |
Inline Inspection Of Photovoltaics For Electrical Defects
App 20100079147 - Zapalac, Jr.; George H. ; et al. | 2010-04-01 |
Inline inspection of photovoltaics for electrical defects
Grant 7,649,365 - Zapalac, Jr. , et al. January 19, 2 | 2010-01-19 |
Methods and Apparatus for Thin Metal Film Thickness Measurement
App 20090310643 - Gotkis; Yehiel ; et al. | 2009-12-17 |
Method and apparatus for thin metal film thickness measurement
Grant 7,581,875 - Gotkis , et al. September 1, 2 | 2009-09-01 |
Dynamic pattern generator with cup-shaped structure
App 20090114837 - GRELLA; LUCA ; et al. | 2009-05-07 |
Temperature stabilization for substrate processing
Grant 7,528,349 - Gotkis , et al. May 5, 2 | 2009-05-05 |
Tungsten Plug Deposition Quality Evaluation Method By Ebace Technology
App 20090010526 - Gotkis; Yehiel ; et al. | 2009-01-08 |
Method for Making Semiconductor Structures Implementing Sacrificial Material
App 20090004845 - Gotkis; Yehiel ; et al. | 2009-01-01 |
Semiconductor structure implementing sacrificial material and methods for making and implementing the same
Grant 7,425,501 - Gotkis , et al. September 16, 2 | 2008-09-16 |
Wet Surface Treatment By Usage of a Liquid Bath Containing Energy Limited Bubbles
App 20080190459 - Gotkis; Yehiel | 2008-08-14 |
Method and apparatus for real time metal film thickness measurement
Grant 7,309,618 - Gotkis , et al. December 18, 2 | 2007-12-18 |
Method And Apparatus Of Arrayed, Clustered Or Coupled Eddy Current Sensor Configuration For Measuring Conductive Film Properties
App 20070163712 - Gotkis; Yehiel ; et al. | 2007-07-19 |
Method and apparatus for thin metal film thickness measurement
App 20070160107 - Gotkis; Yehiel ; et al. | 2007-07-12 |
Method and apparatus for thin metal film thickness measurement
Grant 7,204,639 - Gotkis , et al. April 17, 2 | 2007-04-17 |
Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties
Grant 7,205,166 - Gotkis , et al. April 17, 2 | 2007-04-17 |
Apparatus and method for controlling fluid material composition on a polishing pad
Grant 7,166,015 - Gotkis , et al. January 23, 2 | 2007-01-23 |
Integration of sensor based metrology into semiconductor processing tools
Grant 7,128,803 - Owczarz , et al. October 31, 2 | 2006-10-31 |
Enhancement of eddy current based measurement capabilities
Grant 7,084,621 - Gotkis , et al. August 1, 2 | 2006-08-01 |
Method for chemical mechanical planarization
Grant 7,033,250 - Gotkis , et al. April 25, 2 | 2006-04-25 |
End-point detection apparatus
Grant 7,029,369 - Mikhaylich , et al. April 18, 2 | 2006-04-18 |
Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection
Grant 7,010,468 - Gotkis , et al. March 7, 2 | 2006-03-07 |
Semiconductor structure implementing sacrificial material and methods for making and implementing the same
App 20060043596 - Gotkis; Yehiel ; et al. | 2006-03-02 |
Chemical mechanical planarization system with replaceable pad assembly
Grant 6,994,609 - Gotkis February 7, 2 | 2006-02-07 |
Semiconductor structure implementing low-K dielectric materials and supporting stubs
Grant 6,984,892 - Gotkis , et al. January 10, 2 | 2006-01-10 |
Apparatus for reducing compressed dry air usage during chemical mechanical planarization
Grant 6,976,906 - Boyd , et al. December 20, 2 | 2005-12-20 |
System and method for in-situ measuring and monitoring CMP polishing pad thickness
Grant 6,951,503 - Gotkis , et al. October 4, 2 | 2005-10-04 |
Method and apparatus of arrayed sensors for metrological control
Grant 6,951,624 - Gotkis , et al. October 4, 2 | 2005-10-04 |
Method and apparatus for measurement of thin films and residues on semiconductor substrates
App 20050211667 - Gotkis, Yehiel | 2005-09-29 |
Semiconductor Structure Implementing Low-k Dielectric Materials And Supporting Stubs
App 20050194688 - Gotkis, Yehiel ; et al. | 2005-09-08 |
Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control
Grant 6,937,915 - Kistler , et al. August 30, 2 | 2005-08-30 |
Multiple-conditioning member device for chemical mechanical planarization conditioning
Grant 6,935,938 - Gotkis , et al. August 30, 2 | 2005-08-30 |
System and method for metal residue detection and mapping within a multi-step sequence
Grant 6,929,531 - Gotkis , et al. August 16, 2 | 2005-08-16 |
Methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control
Grant 6,925,348 - Kistler , et al. August 2, 2 | 2005-08-02 |
Complementary sensors metrological process and method and apparatus for implementing the same
Grant 6,922,053 - Gotkis , et al. July 26, 2 | 2005-07-26 |
Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection
App 20050125202 - Gotkis, Yehiel ; et al. | 2005-06-09 |
Polishing pad ironing system
Grant 6,896,596 - Gotkis , et al. May 24, 2 | 2005-05-24 |
Method and apparatus for metrological process control implementing complementary sensors
Grant 6,894,491 - Gotkis , et al. May 17, 2 | 2005-05-17 |
CMP belt stretch compensation apparatus and methods for using the same
Grant 6,878,048 - Gotkis , et al. April 12, 2 | 2005-04-12 |
Integration of sensor based metrology into semiconductor processing tools
App 20050072528 - Owczarz, Aleksander ; et al. | 2005-04-07 |
Method and apparatus for wafer mechanical stress monitoring and wafer thermal stress monitoring
App 20050066739 - Gotkis, Yehiel ; et al. | 2005-03-31 |
System and method for polishing and planarizing semiconductor wafers using reduced surface area polishing pads and variable partial pad-wafer overlapping techniques
Grant 6,869,337 - Boyd , et al. March 22, 2 | 2005-03-22 |
Activated slurry CMP system and methods for implementing the same
Grant 6,866,567 - Gotkis March 15, 2 | 2005-03-15 |
Methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control
App 20050054268 - Kistler, Rodney ; et al. | 2005-03-10 |
Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection
Grant 6,859,765 - Gotkis , et al. February 22, 2 | 2005-02-22 |
Complementary sensors metrological process and method and apparatus for implementing the same
App 20050007107 - Gotkis, Yehiel ; et al. | 2005-01-13 |
Method and apparatus of arrayed sensors for metrological control
App 20050000653 - Gotkis, Yehiel ; et al. | 2005-01-06 |
Method for chemical mechanical planarization
App 20040238493 - Gotkis, Yehiel ; et al. | 2004-12-02 |
CMP belt stretch compensation apparatus and methods for using the same
App 20040224610 - Gotkis, Yehiel ; et al. | 2004-11-11 |
Apparatus and method for controlling fluid material composition on a polishing pad
App 20040219867 - Gotkis, Yehiel ; et al. | 2004-11-04 |
Apparatus and method for controlling film thickness in a chemical mechanical planarization system
App 20040214508 - Gotkis, Yehiel | 2004-10-28 |
Apparatus for removal/remaining thickness profile manipulation
Grant 6,808,442 - Wei , et al. October 26, 2 | 2004-10-26 |
Method and apparatus of arrayed sensors for metrological control
Grant 6,808,590 - Gotkis , et al. October 26, 2 | 2004-10-26 |
Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties
App 20040206455 - Gotkis, Yehiel ; et al. | 2004-10-21 |
System, method and apparatus for thin-film substrate signal separation using eddy current
Grant 6,788,050 - Gotkis September 7, 2 | 2004-09-07 |
System and method for polishing and planarizing semiconductor wafers using reduced surface area polishing pads and variable partial pad-wafer overlapping techniques
App 20040166782 - Boyd, John M. ; et al. | 2004-08-26 |
End-point detection apparatus
App 20040157531 - Mikhaylich, Katrina A. ; et al. | 2004-08-12 |
Method and apparatus for chemical mechanical planarization
Grant 6,767,428 - Gotkis , et al. July 27, 2 | 2004-07-27 |
System, Method And Apparatus For Thin-film Substrate Signal Separation Using Eddy Current
App 20040119469 - Gotkis, Yehiel | 2004-06-24 |
Method And Apparatus For Metrological Process Control Implementing Complimentary Sensors
App 20040119468 - Gotkis, Yehiel ; et al. | 2004-06-24 |
Method and apparatus for slope to threshold conversion for process state monitoring and endpoint detection
App 20040117054 - Gotkis, Yehiel ; et al. | 2004-06-17 |
CMP belt stretch compensation apparatus and methods for using the same
Grant 6,749,491 - Gotkis , et al. June 15, 2 | 2004-06-15 |
System and method for controlled polishing and planarization of semiconductor wafers
Grant 6,729,943 - Kistler , et al. May 4, 2 | 2004-05-04 |
End-point detection system for chemical mechanical polishing applications
Grant 6,726,530 - Mikhaylich , et al. April 27, 2 | 2004-04-27 |
Active retaining ring support
Grant 6,719,874 - Gotkis , et al. April 13, 2 | 2004-04-13 |
Method and apparatus for reducing compressed dry air usage during chemical mechanical planarization
App 20040067720 - Boyd, John M. ; et al. | 2004-04-08 |
Profiled retaining ring for chemical mechanical planarization
Grant 6,716,299 - Gotkis , et al. April 6, 2 | 2004-04-06 |
System and method for metal residue detection and mapping within a multi-step sequence
App 20040058620 - Gotkis, Yehiel ; et al. | 2004-03-25 |
Enhancement of eddy current based measurement capabilities
App 20040058545 - Gotkis, Yehiel ; et al. | 2004-03-25 |
System and method for polishing and planarizing semiconductor wafers using reduced surface area polishing pads and variable partial pad-wafer overlapping techniques
Grant 6,705,930 - Boyd , et al. March 16, 2 | 2004-03-16 |
Method and apparatus for applying differential removal rates to a surface of a substrate
App 20040011462 - Gotkis, Yehiel ; et al. | 2004-01-22 |
Integrated planarization and clean wafer processing system
Grant 6,676,493 - Owczarz , et al. January 13, 2 | 2004-01-13 |
Method and apparatus for real time metal film thickness measurement
App 20040002171 - Gotkis, Yehiel ; et al. | 2004-01-01 |
Method and apparatus for reducing compressed dry air usage during chemical mechanical planarization
Grant 6,656,024 - Boyd , et al. December 2, 2 | 2003-12-02 |
Methods for fabricating interconnect structures having Low K dielectric properties
Grant 6,653,224 - Gotkis , et al. November 25, 2 | 2003-11-25 |
Polishing pad ironing system and methods for implementing the same
App 20030194956 - Gotkis, Yehiel ; et al. | 2003-10-16 |
Subaperture chemical mechanical polishing system
Grant 6,585,572 - Saldana , et al. July 1, 2 | 2003-07-01 |
Activated slurry CMP system and methods for implementing the same
App 20030077988 - Gotkis, Yehiel | 2003-04-24 |
Wafer cleaning module and method for cleaning the surface of a substrate
Grant 6,527,870 - Gotkis March 4, 2 | 2003-03-04 |
System and method for controlled polishing and planarization of semiconductor wafers
App 20020137436 - Kistler, Rod ; et al. | 2002-09-26 |
Edge instability suppressing device and system
Grant 6,454,637 - Gotkis September 24, 2 | 2002-09-24 |
End-point detection system for chemical mechanical polishing applications
App 20020061713 - Mikhaylich, Katrina A. ; et al. | 2002-05-23 |
Wafer carrier with groove for decoupling retainer ring from water
Grant 6,386,962 - Gotkis , et al. May 14, 2 | 2002-05-14 |
End-point detection system for chemical mechanical posing applications
Grant 6,375,540 - Mikhaylich , et al. April 23, 2 | 2002-04-23 |
Wafer cleaning module and method for cleaning the surface of a substrate
App 20020040724 - Gotkis, Yehiel | 2002-04-11 |
Method and apparatus for removing a material layer from a substrate
App 20020023719 - Epshteyn, Yakov ; et al. | 2002-02-28 |
System and method for polishing and planarizing semiconductor wafers using reduced surface area polishing pads and variable partial pad-wafer overlapping techniques
App 20010012751 - Boyd, John M. ; et al. | 2001-08-09 |
Multi-step chemical mechanical polishing
Grant 6,261,158 - Holland , et al. July 17, 2 | 2001-07-17 |
Method and apparatus for removing a material layer from a substrate
App 20010000497 - Epshteyn, Yakov ; et al. | 2001-04-26 |
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