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Particle beam inspection apparatus Grant 11,430,678 - Gosen , et al. August 30, 2 | 2022-08-30 |
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System And Methods For Thermally Conditioning A Wafer In A Charged Particle Beam Apparatus App 20220102106 - VAN HEUMEN; Martijn Petrus Christianus ;   et al. | 2022-03-31 |
Pressure Control Valve, A Fluid Handling Structure For Lithographic Apparatus And A Lithographic Apparatus App 20220075264 - JANSSENS; Stef Marten Johan ;   et al. | 2022-03-10 |
Pressure control valve, a fluid handling structure for lithographic apparatus and a lithographic apparatus Grant 11,199,771 - Janssens , et al. December 14, 2 | 2021-12-14 |
Electron beam inspection tool and method of controlling heat load Grant 11,158,484 - Van Banning , et al. October 26, 2 | 2021-10-26 |
Systems and methods for thermally conditioning a wafer in a charged particle beam apparatus Grant 11,139,141 - Van Heumen , et al. October 5, 2 | 2021-10-05 |
Particle Beam Apparatus App 20210132513 - VAN BANNING; Dennis Herman Caspar ;   et al. | 2021-05-06 |
Electron Beam Inspection Tool And Method Of Controlling Heat Load App 20200203117 - VAN BANNING; Dennis Herman Caspar ;   et al. | 2020-06-25 |
Systems And Methods For Thermally Conditioning A Wafer In A Charged Particle Beam Apparatus App 20200144019 - VAN HEUMEN; Martijn Petrus, Christianus ;   et al. | 2020-05-07 |
A Pressure Control Valve, A Fluid Handling Structure For Lithographic Apparatus And A Lithographic Apparatus App 20200041895 - JANSSENS; Stef Marten Johan ;   et al. | 2020-02-06 |
Particle Beam Inspection Apparatus App 20200027763 - GOSEN; Jeroen Gerard ;   et al. | 2020-01-23 |
Lithographic apparatus and device manufacturing method Grant 9,939,740 - Nakiboglu , et al. April 10, 2 | 2018-04-10 |
Lithographic Apparatus And Device Manufacturing Method App 20160349631 - NAKIBOGLU; Gunes ;   et al. | 2016-12-01 |
Lithographic apparatus and device manufacturing method Grant 9,081,311 - Vogel , et al. July 14, 2 | 2015-07-14 |
Lithographic apparatus and device manufacturing method Grant 9,013,673 - Gosen , et al. April 21, 2 | 2015-04-21 |
Lithographic apparatus and device manufacturing method Grant 8,988,657 - Van Boxtel , et al. March 24, 2 | 2015-03-24 |
Lithographic apparatus, an illumination system, a projection system and a method of manufacturing a device using a lithographic apparatus Grant 8,810,769 - Gosen , et al. August 19, 2 | 2014-08-19 |
Lithographic apparatus and a device manufacturing method Grant 8,755,026 - Gosen , et al. June 17, 2 | 2014-06-17 |
Lithographic Apparatus And Device Manufacturing Method App 20130010270 - VAN BOXTEL; Frank Johannes Jacobus ;   et al. | 2013-01-10 |
Lithographic Apparatus And Device Manufacturing Method App 20120249983 - Vogel; Herman ;   et al. | 2012-10-04 |
Lithographic Apparatus, An Illumination System, A Projection System And A Method Of Manufacturing A Device Using A Lithographic Apparatus App 20110228239 - GOSEN; Jeroen Gerard ;   et al. | 2011-09-22 |
Lithographic Apparatus And A Device Manufacturing Method App 20110149258 - Gosen; Jeroen Gerard ;   et al. | 2011-06-23 |
Lithographic Apparatus And Device Manufacturing Method App 20110129782 - GOSEN; Jeroen Gerard ;   et al. | 2011-06-02 |