Patent | Date |
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Conditioner Disk For Use On Soft Or 3d Printed Pads During Cmp App 20210402563 - Gopalan; Periya ;   et al. | 2021-12-30 |
Polishing Pad with Secondary Window Seal App 20200361054 - Alagarsamy; Rajkumar ;   et al. | 2020-11-19 |
Methods And Apparatus For Removing Abrasive Particles App 20200306931 - LIANTO; PRAYUDI ;   et al. | 2020-10-01 |
Polishing pad with secondary window seal Grant 10,744,618 - Alagarsamy , et al. A | 2020-08-18 |
Printed Chemical Mechanical Polishing Pad Having Particles Therein App 20180297174 - Krishnan; Kasiraman ;   et al. | 2018-10-18 |
Printed chemical mechanical polishing pad having abrasives therein and system for printing Grant 10,016,877 - Krishnan , et al. July 10, 2 | 2018-07-10 |
Polishing Pad with Secondary Window Seal App 20180065227 - Alagarsamy; Rajkumar ;   et al. | 2018-03-08 |
Polishing pad with secondary window seal Grant 9,731,397 - Alagarsamy , et al. August 15, 2 | 2017-08-15 |
Printed Chemical Mechanical Polishing Pad Having Abrasives Therein And System For Printing App 20160354901 - Krishnan; Kasiraman ;   et al. | 2016-12-08 |
Printed chemical mechanical polishing pad having abrasives therein Grant 9,421,666 - Krishnan , et al. August 23, 2 | 2016-08-23 |
Printed Chemical Mechanical Polishing Pad Having Abrasives Therein App 20150126099 - Krishnan; Kasiraman ;   et al. | 2015-05-07 |
Polishing Pad with Secondary Window Seal App 20150126100 - Alagarsamy; Rajkumar ;   et al. | 2015-05-07 |
Polishing pad with secondary window seal Grant 8,961,266 - Alagarsamy , et al. February 24, 2 | 2015-02-24 |
Polishing Pad with Secondary Window Seal App 20140273762 - Alagarsamy; Rajkumar ;   et al. | 2014-09-18 |
Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface Grant 7,297,239 - Emesh , et al. November 20, 2 | 2007-11-20 |
Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface App 20050016681 - Emesh, Ismail ;   et al. | 2005-01-27 |
System and method for cleaning workpieces Grant 6,818,604 - Emesh , et al. November 16, 2 | 2004-11-16 |
Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface Grant 6,802,955 - Emesh , et al. October 12, 2 | 2004-10-12 |
Polishing pad window for a chemical mechanical polishing tool Grant 6,685,537 - Fruitman , et al. February 3, 2 | 2004-02-03 |
Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface App 20030132120 - Emesh, Ismail ;   et al. | 2003-07-17 |
System and method for cleaning workpieces App 20030069150 - Emesh, Ismail ;   et al. | 2003-04-10 |
Chemical mechanical polishing method and apparatus for removing material from a surface of a workpiece that includes low-k material App 20020151255 - Dyer, Tim ;   et al. | 2002-10-17 |
Reinforced CMP carrier bladders App 20020077049 - Fruitman, Clinton O. ;   et al. | 2002-06-20 |
Mapping system for semiconductor wafer cassettes Grant 6,364,745 - Gonzalez-Martin , et al. April 2, 2 | 2002-04-02 |
Integral machine for polishing, cleaning, rinsing and drying workpieces Grant 6,213,853 - Gonzalez-Martin , et al. April 10, 2 | 2001-04-10 |
Post-CMP wet-HF cleaning station Grant 5,954,888 - Gupta , et al. September 21, 1 | 1999-09-21 |