loadpatents
Patent applications and USPTO patent grants for Goodwin; Francis.The latest application filed is for "extreme ultraviolet (euv) lithography mask".
Patent | Date |
---|---|
Extreme ultraviolet (EUV) lithography mask Grant 10,802,393 - Sun , et al. October 13, 2 | 2020-10-13 |
Extreme ultraviolet mirrors and masks with improved reflectivity Grant 10,468,149 - Chen , et al. No | 2019-11-05 |
Extreme Ultraviolet (euv) Lithography Mask App 20190113836 - SUN; Lei ;   et al. | 2019-04-18 |
Extreme Ultraviolet Mirrors And Masks With Improved Reflectivity App 20180226166 - Chen; Yulu ;   et al. | 2018-08-09 |
Plasma as a band pass filter for photo lithography Grant 8,493,546 - Goodwin July 23, 2 | 2013-07-23 |
Plasma as a Band Pass Filter for Photo Lithography App 20110149260 - Goodwin; Francis | 2011-06-23 |
Inspection systems and methods App 20080119060 - Goodwin; Francis | 2008-05-22 |
Inspection systems and methods App 20080078941 - Goodwin; Francis | 2008-04-03 |
Lithography systems and methods App 20070287073 - Goodwin; Francis | 2007-12-13 |
Fluids for immersion lithography systems Grant 7,291,569 - Goodwin , et al. November 6, 2 | 2007-11-06 |
Closing disk for immersion head Grant 7,286,205 - Goodwin October 23, 2 | 2007-10-23 |
Method and arrangement for controlling focus parameters of an exposure tool Grant 7,279,258 - Goodwin October 9, 2 | 2007-10-09 |
Dynamic memory App 20070189067 - Goodwin; Francis | 2007-08-16 |
Debris apparatus, system, and method App 20070182943 - Goodwin; Francis | 2007-08-09 |
Fluids for immersion lithography systems App 20070004234 - Goodwin; Francis ;   et al. | 2007-01-04 |
Closing disk for immersion head App 20060238900 - Goodwin; Francis | 2006-10-26 |
Method of determining the overlay accuracy of multiple patterns formed on a semiconductor wafer Grant 6,948,149 - Goodwin September 20, 2 | 2005-09-20 |
Method and arrangement for controlling focus parameters of an exposure tool App 20050202327 - Goodwin, Francis | 2005-09-15 |
Method Of Determining The Overlay Accuracy Of Multiple Patterns Formed On A Semiconductor Wafer App 20050188342 - Goodwin, Francis | 2005-08-25 |
Method of forming a gate contact in a semiconductor device Grant 6,927,462 - Goodwin , et al. August 9, 2 | 2005-08-09 |
Method of forming a gate contact in a semiconductor device App 20040043592 - Goodwin, Francis ;   et al. | 2004-03-04 |
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