| Patent | Date |
|---|
Metrology For Additive Manufacturing
App 20220252392 - Goodwin; Eric Peter ; et al. | 2022-08-11 |
Non-coaxial Rotating Turntables For Additive Manufacturing
App 20220212263 - Phillips; Alton Hugh ; et al. | 2022-07-07 |
Determination Of A Change Of Object's Shape
App 20220065617 - Goodwin; Eric Peter ; et al. | 2022-03-03 |
Shearing interferometry measurement device for microscopy
Grant 11,248,901 - Goodwin , et al. February 15, 2 | 2022-02-15 |
Shearing Interferometry Measurement Device For Microscopy
App 20210302150 - Goodwin; Eric Peter ; et al. | 2021-09-30 |
Test of operational status of a digital scanner during lithographic exposure process
Grant 11,099,007 - Goodwin August 24, 2 | 2021-08-24 |
Compensation for Goos-Hanchen error in autofocus systems
Grant 10,928,187 - Smith , et al. February 23, 2 | 2021-02-23 |
System and method for a displacement measurement
Grant 10,845,191 - Goodwin November 24, 2 | 2020-11-24 |
Additive Manufacturing System With Rotary Powder Bed
App 20200346407 - Goodwin; Eric Peter ; et al. | 2020-11-05 |
Three-dimensional positioning system using surface pattern recognition and interpolation
Grant 10,812,695 - Wells , et al. October 20, 2 | 2020-10-20 |
Autofocus system and method
Grant 10,794,689 - Smith , et al. October 6, 2 | 2020-10-06 |
Determination of operability of a digital scanner with shearing interferometry
Grant 10,753,732 - Goodwin A | 2020-08-25 |
Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirror
Grant 10,719,017 - Goodwin , et al. | 2020-07-21 |
Test Of Operational Status Of A Digital Scanner During Lithographic Exposure Process
App 20200096326 - Goodwin; Eric Peter | 2020-03-26 |
Encoder head with a birefringent lens element and exposure system utilizing the same
Grant 10,591,826 - Goodwin | 2020-03-17 |
Transparent-block encoder head with isotropic wedged elements
Grant 10,488,228 - Goodwin Nov | 2019-11-26 |
Encoder head with birefringent elements for forming imperfect retroreflection and exposure system utilizing the same
Grant 10,483,107 - Goodwin Nov | 2019-11-19 |
System And Method For A Displacement Measurement
App 20190234729 - Goodwin; Eric Peter | 2019-08-01 |
Determination Of Operability Of A Digital Scanner With Shearing Interferometry
App 20190204074 - Goodwin; Eric Peter | 2019-07-04 |
System and method for a displacement measurement
Grant 10,302,419 - Goodwin | 2019-05-28 |
Determination of operability of a digital scanner with shearing interferometry
Grant 10,267,625 - Goodwin | 2019-04-23 |
Autofocus System And Method
App 20190107388 - Smith; Daniel Gene ; et al. | 2019-04-11 |
Laser radar with remote local oscillator
Grant 10,180,496 - Smith , et al. Ja | 2019-01-15 |
Optical system with a frustrated isotropic block
Grant 10,162,087 - Goodwin , et al. Dec | 2018-12-25 |
Radar systems with dual fiber coupled lasers
Grant 10,139,492 - Rezk , et al. Nov | 2018-11-27 |
Array of encoders for alignment measurement
Grant 10,078,269 - Goodwin , et al. September 18, 2 | 2018-09-18 |
Correction Of Errors Caused By Ambient Non-uniformities In A Fringe-projection Autofocus System In Absence Of A Reference Mirror
App 20180231899 - Goodwin; Eric Peter ; et al. | 2018-08-16 |
Encoder Head With A Birefringent Lens Element And Exposure System Utilizing The Same
App 20180181006 - Goodwin; Eric Peter | 2018-06-28 |
Determination Of Operability Of A Digital Scanner With Shearing Interferometry
App 20180172437 - Goodwin; Eric Peter | 2018-06-21 |
Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirror
Grant 9,977,343 - Goodwin , et al. May 22, 2 | 2018-05-22 |
Transparent-block Encoder Head With Isotropic Wedged Elements
App 20180128653 - Goodwin; Eric Peter | 2018-05-10 |
Encoder Head With Birefringent Elements For Forming Imperfect Retroreflection And Exposure System Utilizing The Same
App 20180061627 - Goodwin; Eric Peter | 2018-03-01 |
Compensation For Goos-hanchen Error In Autofocus Systems
App 20180038682 - Smith; Daniel Gene ; et al. | 2018-02-08 |
Autofocus System And Method
App 20180031368 - Smith; Daniel Gene ; et al. | 2018-02-01 |
System And Method For A Displacement Measurement
App 20180003484 - Goodwin; Eric Peter | 2018-01-04 |
Compensation for Goos-Hanchen error in autofocus systems
Grant 9,816,805 - Smith , et al. November 14, 2 | 2017-11-14 |
Autofocus system and method
Grant 9,810,530 - Smith , et al. November 7, 2 | 2017-11-07 |
Optical System With A Frustrated Isotropic Block
App 20170292860 - Goodwin; Eric Peter ; et al. | 2017-10-12 |
Radar Systems With Dual Fiber Coupled Lasers
App 20170168143 - Rezk; Mina A. ; et al. | 2017-06-15 |
Scan mirrors for laser radar
Grant 9,638,799 - Goodwin , et al. May 2, 2 | 2017-05-02 |
Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure
Grant 9,625,368 - Goodwin , et al. April 18, 2 | 2017-04-18 |
Radar systems with dual fiber coupled lasers
Grant 9,618,619 - Rezk , et al. April 11, 2 | 2017-04-11 |
Array Of Encoders For Alignment Measurement
App 20170097574 - GOODWIN; ERIC PETER ; et al. | 2017-04-06 |
Minimization of Abbe error caused by tip or tilt between an encoder head and a wafer stage for arbitrary location of a center of rotation
Grant 9,605,948 - Goodwin , et al. March 28, 2 | 2017-03-28 |
Three-dimensional Positioning System Using Surface Pattern Recognition And Interpolation
App 20170076439 - Wells; Jonathan K. ; et al. | 2017-03-16 |
High resolution encoder head
Grant 9,534,934 - Goodwin January 3, 2 | 2017-01-03 |
Two-dimensional encoder system and method
Grant 9,360,347 - Goodwin , et al. June 7, 2 | 2016-06-07 |
Light source assembly that generates heterodyne output beams
Grant 9,291,918 - Goodwin March 22, 2 | 2016-03-22 |
Interferometric Level Sensor
App 20160025480 - Goodwin; Eric Peter ; et al. | 2016-01-28 |
Apparatus and method for improving contrast detected in a fringe projection autofocus system
Grant 9,237,261 - Goodwin January 12, 2 | 2016-01-12 |
Custom color or polarization sensitive CCD for separating multiple signals in autofocus projection system
Grant 9,213,227 - Goodwin , et al. December 15, 2 | 2015-12-15 |
Scan Mirrors For Laser Radar
App 20150355327 - Goodwin; Eric Peter ; et al. | 2015-12-10 |
Interferometer devices for determining initial position of a stage or the like
Grant 9,194,694 - Goodwin November 24, 2 | 2015-11-24 |
Minimization Of Abbe Error Caused By Tip Or Tilt Between An Encoder Head And A Wafer Stage For Arbitrary Location Of A Center Of Rotation
App 20150276385 - Goodwin; Eric Peter ; et al. | 2015-10-01 |
Radar Systems With Dual Fiber Coupled Lasers
App 20150268344 - Rezk; Mina A. ; et al. | 2015-09-24 |
System and method for compensating instability in an autofocus system
Grant 9,097,851 - Goodwin , et al. August 4, 2 | 2015-08-04 |
Measurement system and method utilizing high contrast encoder head for measuring relative movement between objects
Grant 9,074,911 - Goodwin , et al. July 7, 2 | 2015-07-07 |
Laser Radar With Remote Local Oscillator
App 20150177379 - Smith; Daniel G. ; et al. | 2015-06-25 |
Method for spatially multiplexing two or more fringe projection signals on a single detector
Grant 9,030,668 - Goodwin , et al. May 12, 2 | 2015-05-12 |
Autofocus System And Method
App 20150116729 - Smith; Daniel Gene ; et al. | 2015-04-30 |
Color time domain integration camera having a single charge coupled device and fringe projection auto-focus system
Grant 8,993,974 - Goodwin March 31, 2 | 2015-03-31 |
Correction Of Errors Caused By Ambient Non-uniformities In A Fringe-projection Autofocus System In Absence Of A Reference Mirror
App 20150070670 - Goodwin; Eric Peter ; et al. | 2015-03-12 |
Two-dimensional Encoder System And Method
App 20140374579 - Goodwin; Eric Peter ; et al. | 2014-12-25 |
Compensation For Goos-hanchen Error In Autofocus Systems
App 20140293278 - Smith; Daniel Gene ; et al. | 2014-10-02 |
Two dimensional encoder system and method
Grant 8,829,420 - Goodwin , et al. September 9, 2 | 2014-09-09 |
System And Method For Compensating Instability In An Autofocus System
App 20140233011 - Goodwin; Eric Peter ; et al. | 2014-08-21 |
High Resolution Encoder Head
App 20140183345 - Goodwin; Eric Peter | 2014-07-03 |
Exposure apparatus with an illumination system generating multiple illumination beams
Grant 8,736,813 - Smith , et al. May 27, 2 | 2014-05-27 |
Optical assembly for laser radar
Grant 8,724,095 - Goodwin , et al. May 13, 2 | 2014-05-13 |
Design Rules For Reducing The Sensitivity Of Fringe Projection Autofocus To Air Temperature Changes
App 20140049761 - Goodwin; Eric Peter ; et al. | 2014-02-20 |
Two Axis Encoder Head Assembly
App 20140049762 - Goodwin; Eric Peter | 2014-02-20 |
Color Time Domain Integration Camera Having A Single Charge Coupled Device And Fringe Projection Auto-focus System
App 20130330662 - Goodwin; Eric Peter | 2013-12-12 |
Method For Spatially Multiplexing Two Or More Fringe Projection Signals On A Single Detector
App 20130308140 - Goodwin; Eric Peter ; et al. | 2013-11-21 |
Light-beam Scanning For Laser Radar And Other Uses
App 20130241762 - Smith; Daniel G. ; et al. | 2013-09-19 |
Custom color or polarization sensitive CCD for separating multiple signals in Autofocus projection system
App 20130208104 - Goodwin; Eric Peter ; et al. | 2013-08-15 |
Optical Assembly For Laser Radar
App 20130194563 - Goodwin; Eric Peter ; et al. | 2013-08-01 |
Interferometer Devices For Determining Initial Position Of A Stage Or The Like
App 20130194583 - Goodwin; Eric Peter | 2013-08-01 |
Apparatus and method for improving contrast detected in a fringe projection autofocus system
App 20130188084 - Goodwin; Eric Peter | 2013-07-25 |
Optical Assembly for Laser Radar
App 20130099957 - Goodwin; Eric Peter ; et al. | 2013-04-25 |
High Contrast Encoder Head
App 20130048842 - Goodwin; Eric Peter ; et al. | 2013-02-28 |
Light Source Assembly That Generates Heterodyne Output Beams
App 20120229817 - Goodwin; Eric Peter | 2012-09-13 |
Optical components for use in measuring projection lens distortion or focus of an optical imaging system that images a substrate
App 20120224172 - Goodwin; Eric Peter ; et al. | 2012-09-06 |
Target For Large Scale Metrology System
App 20120186059 - Goodwin; Eric Peter ; et al. | 2012-07-26 |
Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure
App 20120188557 - Goodwin; Eric Peter ; et al. | 2012-07-26 |
Two dimensional encoder system and method
App 20120032067 - Goodwin; Eric Peter ; et al. | 2012-02-09 |
Autofocus system and method
App 20120008150 - Smith; Daniel Gene ; et al. | 2012-01-12 |
Goos-Hanchen compensation in autofocus systems
App 20110071784 - Smith; Daniel Gene ; et al. | 2011-03-24 |
System and method for compensating instability in an autofocus system
App 20100245829 - Goodwin; Eric Peter ; et al. | 2010-09-30 |
Substrate Handling Structure
App 20100245797 - Goodwin; Eric Peter ; et al. | 2010-09-30 |
Exposure Apparatus With An Illumination System Generating Multiple Illumination Beams
App 20100053583 - Smith; Daniel Gene ; et al. | 2010-03-04 |
Substrate Stage movement patterns for high throughput While Imaging a Reticle to a pair of Imaging Locations
App 20100053588 - Binnard; Michael B. ; et al. | 2010-03-04 |
Apparatus For Scanning Sites On A Wafer Along A Short Dimension Of The Sites
App 20090305171 - Goodwin; Eric Peter ; et al. | 2009-12-10 |
| 