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Patent applications and USPTO patent grants for Goodwin; Dennis L..The latest application filed is for "apparatus for delivering precursor gases to an epitaxial growth substrate".
Patent | Date |
---|---|
Apparatus for delivering precursor gases to an epitaxial growth substrate Grant 9,175,419 - Arena , et al. November 3, 2 | 2015-11-03 |
Apparatus For Delivering Precursor Gases To An Epitaxial Growth Substrate App 20100258053 - Arena; Chantal ;   et al. | 2010-10-14 |
Rotating semiconductor processing apparatus Grant 7,018,479 - Goodwin March 28, 2 | 2006-03-28 |
Rotating semiconductor processing apparatus App 20030200931 - Goodwin, Dennis L. | 2003-10-30 |
Method of processing a semiconductor wafer in a reaction chamber with a rotating component Grant 6,617,247 - Goodwin September 9, 2 | 2003-09-09 |
Rotating semiconductor processing apparatus Grant 6,554,905 - Goodwin April 29, 2 | 2003-04-29 |
Dual arm linear hand-off wafer transfer assembly Grant 6,435,809 - Goodwin , et al. August 20, 2 | 2002-08-20 |
Rotating semiconductor processing apparatus App 20020104205 - Goodwin, Dennis L. | 2002-08-08 |
Dual orientation leveling platform for semiconductor apparatus Grant 6,394,440 - Carrell , et al. May 28, 2 | 2002-05-28 |
Dual arm linear hand-off wafer transfer assembly App 20010001277 - Goodwin, Dennis L. ;   et al. | 2001-05-17 |
Dual arm linear hand-off wafer transfer assembly App 20010000720 - Goodwin, Dennis L. ;   et al. | 2001-05-03 |
Dual arm linear hand-off wafer transfer assembly Grant 6,183,183 - Goodwin , et al. February 6, 2 | 2001-02-06 |
Semiconductor processing system with gas curtain Grant 5,997,588 - Goodwin , et al. December 7, 1 | 1999-12-07 |
Chemical vapor desposition system Grant 5,435,682 - Crabb , et al. July 25, 1 | 1995-07-25 |
Wafer handling system with bernoulli pick-up Grant 5,324,155 - Goodwin , et al. * June 28, 1 | 1994-06-28 |
Substrate loading apparatus for a CVD process Grant 5,092,728 - Crabb , et al. March 3, 1 | 1992-03-03 |
Wafer handling system with Bernoulli pick-up Grant 5,080,549 - Goodwin , et al. January 14, 1 | 1992-01-14 |
Substrate handling and transporting apparatus Grant 5,020,475 - Crabb , et al. June 4, 1 | 1991-06-04 |
Process for epitaxial deposition of silicon Grant 4,874,464 - Goodwin , et al. October 17, 1 | 1989-10-17 |
Chemical vapor deposition system Grant 4,828,224 - Crabb , et al. May 9, 1 | 1989-05-09 |
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