Goodman; Matthew G.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Goodman; Matthew G..The latest application filed is for "susceptor with ring to limit backside deposition".
- Goodman; Matthew G. - Chandler AZ
- Goodman, Matthew G. - Tempe AZ
| Patent | Date |
|---|---|
| Susceptor With Ring To Limit Backside Deposition App 20210363637 - Hawkins; Mark ; et al. | 2021-11-25 |
| Susceptor with ring to limit backside deposition Grant 11,085,112 - Hawkins , et al. August 10, 2 | 2021-08-10 |
| Plasma pre-clean module and process Grant 9,514,927 - Tolle , et al. December 6, 2 | 2016-12-06 |
| Germanium oxide pre-clean module and process Grant 9,474,163 - Tolle , et al. October 18, 2 | 2016-10-18 |
| Plasma Pre-clean Module And Process App 20160254137 - Tolle; John ; et al. | 2016-09-01 |
| Germanium Oxide Pre-clean Module And Process App 20160192502 - Tolle; John ; et al. | 2016-06-30 |
| Plasma pre-clean module and process Grant 9,299,557 - Tolle , et al. March 29, 2 | 2016-03-29 |
| Plasma Pre-clean Module And Process App 20150270122 - Tolle; John ; et al. | 2015-09-24 |
| Doped semiconductor films and processing Grant 9,099,423 - Weeks , et al. August 4, 2 | 2015-08-04 |
| Doped Semiconductor Films And Processing App 20150014816 - Weeks; Keith Doran ; et al. | 2015-01-15 |
| Susceptor With Ring To Limit Backside Deposition App 20130109192 - Hawkins; Mark ; et al. | 2013-05-02 |
| Calibration of temperature control system for semiconductor processing chamber Grant 8,047,706 - Goodman , et al. November 1, 2 | 2011-11-01 |
| Substrate Holder With Varying Density App 20100107974 - Givens; Michael ; et al. | 2010-05-06 |
| Porous Substrate Holder With Thinned Portions App 20090280248 - Goodman; Matthew G. ; et al. | 2009-11-12 |
| Calibration Of Temperature Control System For Semiconductor Processing Chamber App 20090147819 - GOODMAN; MATTHEW G. ; et al. | 2009-06-11 |
| Wafer holder with peripheral lift ring Grant 7,449,071 - Aggarwal , et al. November 11, 2 | 2008-11-11 |
| Wafer holder with stiffening rib Grant 7,070,660 - Keeton , et al. July 4, 2 | 2006-07-04 |
| Low-mass susceptor improvements App 20050183829 - Goodman, Matthew G. ; et al. | 2005-08-25 |
| Two-stage load for processing both sides of a wafer App 20050176252 - Goodman, Matthew G. ; et al. | 2005-08-11 |
| Self-centering wafer support system Grant 6,893,507 - Goodman , et al. May 17, 2 | 2005-05-17 |
| Low/high temperature substrate holder to reduce edge rolloff and backside damage App 20050092439 - Keeton, Tony J. ; et al. | 2005-05-05 |
| Localized heating of substrates using optics Grant 6,879,777 - Goodman , et al. April 12, 2 | 2005-04-12 |
| Wafer holder with peripheral lift ring App 20050011458 - Aggarwal, Ravinder K. ; et al. | 2005-01-20 |
| Susceptor pocket profile to improve process performance Grant 6,840,767 - Goodman January 11, 2 | 2005-01-11 |
| Wafer holder with peripheral lift ring Grant 6,776,849 - Aggarwal , et al. August 17, 2 | 2004-08-17 |
| Susceptor pocket profile to improve process performance App 20040137398 - Goodman, Matthew G. | 2004-07-15 |
| Susceptor pocket profile to improve process performance Grant 6,729,875 - Goodman May 4, 2 | 2004-05-04 |
| Localized heating of substrates using optics App 20040067052 - Goodman, Matthew G. ; et al. | 2004-04-08 |
| Substrate holder with deep annular groove to prevent edge heat loss Grant 6,709,267 - Hawkins , et al. March 23, 2 | 2004-03-23 |
| Wafer holder with stiffening rib App 20030205324 - Keeton, Tony J. ; et al. | 2003-11-06 |
| Susceptor pocket profile to improve process performance App 20030198910 - Goodman, Matthew G. | 2003-10-23 |
| Susceptor pocket profile to improve process performance Grant 6,634,882 - Goodman October 21, 2 | 2003-10-21 |
| Wafer holder with peripheral lift ring App 20030173031 - Aggarwal, Ravinder K. ; et al. | 2003-09-18 |
| Susceptor pocket profile to improve process performance App 20030049580 - Goodman, Matthew G. | 2003-03-13 |
| Self-centering wafer support system App 20030029571 - Goodman, Matthew G. ; et al. | 2003-02-13 |
| Low mass wafer support system Grant 6,454,865 - Goodman , et al. September 24, 2 | 2002-09-24 |
| Low mass wafer support system App 20020043337 - Goodman, Matthew G. ; et al. | 2002-04-18 |
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