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Patent applications and USPTO patent grants for GONDHALEKAR; Sudhir R..The latest application filed is for "faceplate tensioning method and apparatus to prevent droop".
Patent | Date |
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Faceplate Tensioning Method And Apparatus To Prevent Droop App 20220008946 - YANG; Yao-Hung ;   et al. | 2022-01-13 |
Electrostatic Chuck With Improved Temperature Control App 20220005723 - Panavalappil Kumarankutty; Hanish Kumar ;   et al. | 2022-01-06 |
Plasma Block With Integrated Cooling App 20210335603 - Gurjar; Tanmay P. ;   et al. | 2021-10-28 |
Component, Method Of Manufacturing The Component, And Method Of Cleaning The Component App 20200185202 - WIDLOW; Ian ;   et al. | 2020-06-11 |
Chamber coatings Grant 9,384,950 - Duan , et al. July 5, 2 | 2016-07-05 |
Chamber Coatings App 20150221480 - DUAN; Ren-Guan ;   et al. | 2015-08-06 |
Heater With Independent Center Zone Control App 20120103970 - Lubomirsky; Dmitry ;   et al. | 2012-05-03 |
Remote plasma clean process with cycled high and low pressure clean steps Grant 7,967,913 - Hua , et al. June 28, 2 | 2011-06-28 |
Remote Plasma Clean Process With Cycled High And Low Pressure Clean Steps App 20100095979 - Hua; Zhong Qiang ;   et al. | 2010-04-22 |
Method and apparatus for multi-chamber exhaust control App 20080006650 - Tseng; Ming-Kuei ;   et al. | 2008-01-10 |
Distributed temperature control system for point of dispense temperature control on track systems utilizing mixing of hot and cold streams App 20060158240 - Gondhalekar; Sudhir R. ;   et al. | 2006-07-20 |
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