Gondhalekar; Sudhir
Patent Applications and Registrations
Patent applications and USPTO patent grants for Gondhalekar; Sudhir.The latest application filed is for "low profile process kit".
- Gondhalekar; Sudhir - Fremont CA US
- Gondhalekar; Sudhir - Fremot CA
| Patent | Date |
|---|---|
| Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing Grant 9,202,736 - Narendrnath , et al. December 1, 2 | 2015-12-01 |
| Low profile process kit Grant 8,409,355 - Rasheed , et al. April 2, 2 | 2013-04-02 |
| Method of making an electrostatic chuck with reduced plasma penetration and arcing Grant 8,108,981 - Lubomirsky , et al. February 7, 2 | 2012-02-07 |
| Gas distribution system for improved transient phase deposition Grant 7,722,737 - Gondhalekar , et al. May 25, 2 | 2010-05-25 |
| Low Profile Process Kit App 20090266299 - RASHEED; MUHAMMAD M. ; et al. | 2009-10-29 |
| Gas delivery system for semiconductor processing Grant 7,498,268 - Gondhalekar , et al. March 3, 2 | 2009-03-03 |
| Method for refurbishing an electrostatic chuck with reduced plasma penetration and arcing App 20090034149 - Lubomirsky; Dmitry ; et al. | 2009-02-05 |
| Method and apparatus for providing an electrostatic chuck with reduced plasma penetration and arcing App 20090034147 - Narendrnath; Kadthala Ramaya ; et al. | 2009-02-05 |
| Method of making an electrostatic chuck with reduced plasma penetration and arcing App 20090034148 - Lubomirsky; Dmitry ; et al. | 2009-02-05 |
| Upper chamber for high density plasma CVD Grant 7,354,501 - Gondhalekar , et al. April 8, 2 | 2008-04-08 |
| Gas Distribution System for Improved Transient Phase Deposition App 20080041821 - Gondhalekar; Sudhir ; et al. | 2008-02-21 |
| Gas Delivery System For Semiconductor Processing App 20070048446 - Gondhalekar; Sudhir ; et al. | 2007-03-01 |
| Gas delivery system for semiconductor processing Grant 7,141,138 - Gondhalekar , et al. November 28, 2 | 2006-11-28 |
| High density plasma CVD chamber App 20060191478 - Gondhalekar; Sudhir ; et al. | 2006-08-31 |
| High density plasma CVD chamber Grant 7,074,298 - Gondhalekar , et al. July 11, 2 | 2006-07-11 |
| Gas distribution system for improved transient phase deposition App 20060113038 - Gondhalekar; Sudhir ; et al. | 2006-06-01 |
| Gas delivery system for semiconductor processing App 20040231798 - Gondhalekar, Sudhir ; et al. | 2004-11-25 |
| Gas delivery system for semiconductor processing App 20040126952 - Gondhalekar, Sudhir ; et al. | 2004-07-01 |
| Substrate support with extended radio frequency electrode upper surface Grant 6,682,603 - Gondhalekar , et al. January 27, 2 | 2004-01-27 |
| Upper chamber for high density plasma CVD App 20030213434 - Gondhalekar, Sudhir ; et al. | 2003-11-20 |
| High density plasma CVD chamber App 20030213562 - Gondhalekar, Sudhir ; et al. | 2003-11-20 |
| Substrate Support With Extended Radio Frequency Electrode Upper Surface App 20030211757 - Gondhalekar, Sudhir ; et al. | 2003-11-13 |
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