| Patent | Date |
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Sputtering method and sputtering apparatus
Grant 11,404,255 - Ono , et al. August 2, 2 | 2022-08-02 |
Film Forming Apparatus And Film Forming Method
App 20220098717 - IMAKITA; Kenichi ; et al. | 2022-03-31 |
Film Forming Apparatus And Film Forming Method
App 20210407779 - TAKEUCHI; Atsushi ; et al. | 2021-12-30 |
Sputtering Method And Sputtering Apparatus
App 20210082675 - ONO; Kazunaga ; et al. | 2021-03-18 |
Film Forming Apparatus
App 20200381226 - IMAKITA; Kenichi ; et al. | 2020-12-03 |
Oxidation Processing Module, Substrate Processing System, And Oxidation Processing Method
App 20200123649 - ONO; Kazunaga ; et al. | 2020-04-23 |
Substrate processing apparatus
Grant 10,468,237 - Gomi , et al. No | 2019-11-05 |
Deposition device and deposition method
Grant 10,309,005 - Kojima , et al. | 2019-06-04 |
Substrate Processing Apparatus
App 20180315585 - Gomi; Atsushi ; et al. | 2018-11-01 |
Substrate processing apparatus
Grant 10,049,860 - Gomi , et al. August 14, 2 | 2018-08-14 |
Film forming method using reversible decomposition reaction
Grant 9,976,217 - Gomi , et al. May 22, 2 | 2018-05-22 |
Method for Forming Perpendicular Magnetization Type Magnetic Tunnel Junction Element and Apparatus for Producing Perpendicular Magnetization Type Magnetic Tunnel Junction Element
App 20170317273 - KITADA; Toru ; et al. | 2017-11-02 |
Vacuum-processing apparatus, vacuum-processing method, and storage medium
Grant 9,790,590 - Furukawa , et al. October 17, 2 | 2017-10-17 |
Method for manufacturing semiconductor device
Grant 9,576,850 - Ishizaka , et al. February 21, 2 | 2017-02-21 |
Film forming apparatus and film forming method
Grant 9,551,060 - Gomi , et al. January 24, 2 | 2017-01-24 |
Deposition Device And Deposition Method
App 20160251746 - KOJIMA; Yasuhiko ; et al. | 2016-09-01 |
Deposition device
Grant 9,404,180 - Hara , et al. August 2, 2 | 2016-08-02 |
Film Forming Apparatus And Film Forming Method
App 20160032446 - GOMI; Atsushi ; et al. | 2016-02-04 |
Substrate mounting mechanism, and substrate processing apparatus
Grant 9,202,728 - Hara , et al. December 1, 2 | 2015-12-01 |
Substrate Processing Apparatus
App 20150235815 - Gomi; Atsushi ; et al. | 2015-08-20 |
Magnetron Sputtering Apparatus
App 20150187549 - Kitada; Toru ; et al. | 2015-07-02 |
Vacuum-Processing Apparatus, Vacuum-Processing Method, and Storage Medium
App 20150187546 - Furukawa; Shinji ; et al. | 2015-07-02 |
Method for film formation, apparatus for film formation, and computer-readable recording medium
Grant 9,062,374 - Hara , et al. June 23, 2 | 2015-06-23 |
Method for forming Cu wiring
Grant 9,064,690 - Ishizaka , et al. June 23, 2 | 2015-06-23 |
Magnetron Sputtering Device, Magnetron Sputtering Method, And Non-transitory Computer-readable Storage Medium
App 20150136596 - Nakamura; Kanto ; et al. | 2015-05-21 |
Film Forming Apparatus
App 20150114835 - GOMI; Atsushi ; et al. | 2015-04-30 |
Semiconductor device manufacturing method
Grant 8,999,841 - Ishizaka , et al. April 7, 2 | 2015-04-07 |
Mounting table structure, film forming apparatus and raw material recovery method
Grant 8,992,686 - Gomi , et al. March 31, 2 | 2015-03-31 |
Placing Table Structure
App 20150044368 - Gomi; Atsushi ; et al. | 2015-02-12 |
Method For Manufacturing Semiconductor Device
App 20140377947 - Ishizaka; Tadahiro ; et al. | 2014-12-25 |
Sputter Device
App 20140346037 - MIZUNO; Shigeru ; et al. | 2014-11-27 |
Method of forming copper wiring and method and system for forming copper film
Grant 8,859,422 - Ishizaka , et al. October 14, 2 | 2014-10-14 |
Method Of Forming Copper Wiring And Method And System For Forming Copper Film
App 20140287163 - ISHIZAKA; Tadahiro ; et al. | 2014-09-25 |
Semiconductor Device Manufacturing Method, Semiconductor Device, Semiconductor Device Manufacturing Apparatus And Storage Medium
App 20140103529 - Matsumoto; Kenji ; et al. | 2014-04-17 |
Method For Forming Cu Wiring
App 20140045329 - ISHIZAKA; Tadahiro ; et al. | 2014-02-13 |
Method For Forming Copper Wiring
App 20140030886 - FUKUSHIMA; Takara ; et al. | 2014-01-30 |
Thin Film Forming Method
App 20130252417 - ISHIZAKA; Tadahiro ; et al. | 2013-09-26 |
Film Forming Method And Film Forming Apparatus
App 20130237053 - Ishizaka; Tadahiro ; et al. | 2013-09-12 |
Semiconductor Device Manufacturing Method
App 20130203250 - Ishizaka; Tadahiro ; et al. | 2013-08-08 |
Magnetron Sputtering Apparatus And Method
App 20130081938 - MIZUNO; Shigeru ; et al. | 2013-04-04 |
Raw material recovery method and trapping mechanism for recovering raw material
Grant 8,408,025 - Gomi , et al. April 2, 2 | 2013-04-02 |
Methods of forming copper wiring and copper film, and film forming system
Grant 8,399,353 - Ishizaka , et al. March 19, 2 | 2013-03-19 |
Metal recovery method, metal recovery apparatus, gas exhaust system and film forming device using same
Grant 8,349,283 - Hara , et al. January 8, 2 | 2013-01-08 |
Deposition Device
App 20130000558 - Hara; Masamichi ; et al. | 2013-01-03 |
Apparatus For Thermal And Plasma Enhanced Vapor Deposition And Method Of Operating
App 20120315404 - LI; Yicheng ; et al. | 2012-12-13 |
Film formation method and film formation apparatus
Grant 8,277,889 - Gomi , et al. October 2, 2 | 2012-10-02 |
Method for film formation, apparatus for film formation, and computer-readable recording medium
Grant 8,273,409 - Hara , et al. September 25, 2 | 2012-09-25 |
Method and apparatus for reducing particle contamination in a deposition system
Grant 8,268,078 - Suzuki , et al. September 18, 2 | 2012-09-18 |
METHOD FOR FORMING Cu WIRING
App 20120222782 - Gomi; Atsushi ; et al. | 2012-09-06 |
Void-free copper filling of recessed features using a smooth non-agglomerated copper seed layer
Grant 8,247,030 - Suzuki , et al. August 21, 2 | 2012-08-21 |
Substrate Mounting Mechanism, And Substrate Processing
App 20120199573 - HARA; Masamichi ; et al. | 2012-08-09 |
Method Of Forming Copper Wiring And Method And System For Forming Copper Film
App 20120196052 - ISHIZAKA; Tadahiro ; et al. | 2012-08-02 |
Methods Of Forming Copper Wiring And Copper Film, And Film Forming System
App 20120196437 - ISHIZAKA; Tadahiro ; et al. | 2012-08-02 |
Method For Forming Cvd-ru Film And Method For Manufacturing Semiconductor Devices
App 20120064717 - KATO; Takara ; et al. | 2012-03-15 |
Mounting Table Structure, Film Forming Apparatus And Raw Material Recovery Method
App 20120055403 - GOMI; Atsushi ; et al. | 2012-03-08 |
Method for Film Formation, Apparatus for Film Formation, and Computer-Readable Recording Medium
App 20110300291 - Hara; Masamichi ; et al. | 2011-12-08 |
Placing Table Structure
App 20110263123 - Gomi; Atsushi ; et al. | 2011-10-27 |
Metal Recovery Method, Metal Recovery Apparatus, Gas Exhaust System And Film Forming Device Using Same
App 20110206585 - Hara; Masamichi ; et al. | 2011-08-25 |
Raw Material Recovery Method And Trapping Mechanism For Recovering Raw Material
App 20110203310 - Gomi; Atsushi ; et al. | 2011-08-25 |
Method For Film Formation, Apparatus For Film Formation, And Computer-readable Recording Medium
App 20110092070 - Hara; Masamichi ; et al. | 2011-04-21 |
Vehicle door structure
Grant 7,913,807 - Gomi March 29, 2 | 2011-03-29 |
System for introducing a precursor gas to a vapor deposition system
Grant 7,892,358 - Suzuki , et al. February 22, 2 | 2011-02-22 |
Rear combination lamp for an automobile
Grant D631,584 - Hazumi , et al. January 25, 2 | 2011-01-25 |
Method for reducing carbon monoxide poisoning in a thin film deposition system
Grant 7,858,522 - Suzuki , et al. December 28, 2 | 2010-12-28 |
Raw Material Gas Supply System And Film Forming Apparatus
App 20100236480 - Hara; Masamichi ; et al. | 2010-09-23 |
Substrate Mounting Mechanism And Substrate Processing Apparatus Having Same
App 20100212594 - HARA; Masamichi ; et al. | 2010-08-26 |
Substrate Mounting Mechanism, Substrate Processing Apparatus, Method For Suppressing Film Deposition On Substrate Mounting Mechanism, And Storage Medium
App 20100210115 - HARA; Masamichi ; et al. | 2010-08-19 |
Gas switching mechanism for plasma processing apparatus
Grant 7,717,061 - Ishizaka , et al. May 18, 2 | 2010-05-18 |
Film Formation Method And Film Formation Apparatus
App 20100075035 - Gomi; Atsushi ; et al. | 2010-03-25 |
Gas Supply Method And Gas Supply Device
App 20100062158 - Hara; Masamichi ; et al. | 2010-03-11 |
Void-free Copper Filling Of Recessed Features Using A Smooth Non-agglomerated Copper Seed Layer
App 20090226611 - SUZUKI; Kenji ; et al. | 2009-09-10 |
Deposition method for forming a film including metal, nitrogen and carbon
Grant 7,491,430 - Ishizaka , et al. February 17, 2 | 2009-02-17 |
Interconnect Structures Containing A Ruthenium Barrier Film And Method Of Forming
App 20080237860 - Ishizaka; Tadahiro ; et al. | 2008-10-02 |
Film-Forming Method and Recording Medium
App 20080107825 - Ishizaka; Tadahiro ; et al. | 2008-05-08 |
System For Introducing A Precursor Gas To A Vapor Deposition System
App 20070234962 - Suzuki; Kenji ; et al. | 2007-10-11 |
Method And Apparatus For Reducing Carbon Monoxide Poisoning At The Peripheral Edge Of A Substrate In A Thin Film Deposition System
App 20070234955 - Suzuki; Kenji ; et al. | 2007-10-11 |
Method And System For Initiating A Deposition Process Utilizing A Metal Carbonyl Precursor
App 20070237895 - Suzuki; Kenji ; et al. | 2007-10-11 |
Method For Introducing A Precursor Gas To A Vapor Deposition System
App 20070231489 - Suzuki; Kenji ; et al. | 2007-10-04 |
Method For Reducing Carbon Monoxide Poisoning In A Thin Film Deposition System
App 20070232040 - Suzuki; Kenji ; et al. | 2007-10-04 |
Method and apparatus for reducing particle contamination in a deposition system
App 20070215048 - Suzuki; Kenji ; et al. | 2007-09-20 |
Method and apparatus for reducing particle formation in a vapor distribution system
App 20070218200 - Suzuki; Kenji ; et al. | 2007-09-20 |
Apparatus for thermal and plasma enhanced vapor deposition and method of operating
App 20070116873 - Li; Yicheng ; et al. | 2007-05-24 |
Apparatus for thermal and plasma enhanced vapor deposition and method of operating
App 20070116872 - Li; Yicheng ; et al. | 2007-05-24 |
Vehicle door structure
App 20070086609 - Gomi; Atsushi | 2007-04-19 |
Method of forming a tantalum-containing layer from a metalorganic precursor
App 20070054046 - Ishizaka; Tadahiro ; et al. | 2007-03-08 |
Method of forming a tantalum-containing layer from a metalorganic precursor
App 20070054047 - Ishizaka; Tadahiro ; et al. | 2007-03-08 |
Method of depositing metal layers from metal-carbonyl precursors
Grant 7,078,341 - Yamasaki , et al. July 18, 2 | 2006-07-18 |
Deposition method
App 20060029748 - Ishizaka; Tadahiro ; et al. | 2006-02-09 |
Processing apparatus and processing method
App 20060027167 - Ishizaka; Tadahiro ; et al. | 2006-02-09 |
Low-pressure deposition of metal layers from metal-carbonyl precursors
Grant 6,989,321 - Yamasaki , et al. January 24, 2 | 2006-01-24 |
Film-forming method
App 20060008595 - Ishizaka; Tadahiro ; et al. | 2006-01-12 |
Method of forming a metal layer using an intermittent precursor gas flow process
Grant 6,924,223 - Yamasaki , et al. August 2, 2 | 2005-08-02 |
Method of depositing metal layers from metal-carbonyl precursors
App 20050079708 - Yamasaki, Hideaki ; et al. | 2005-04-14 |
Method of forming a metal layer using an intermittent precursor gas flow process
App 20050069632 - Yamasaki, Hideaki ; et al. | 2005-03-31 |
Low-pressure deposition of metal layers from metal-carbonyl precursors
App 20050070100 - Yamasaki, Hideaki ; et al. | 2005-03-31 |
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