Patent | Date |
---|
Chemical Mechanical Polishing Of Substrates Containing Copper And Ruthenium App 20220064485 - GUEVENC; Haci Osman ;   et al. | 2022-03-03 |
Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substrates Grant 11,264,250 - Reichardt , et al. March 1, 2 | 2022-03-01 |
Chemical Mechanical Polishing Of Substrates Containing Copper And Ruthenium App 20220056307 - GUEVENC; Haci Osman ;   et al. | 2022-02-24 |
Chemical Mechanical Polishing Of Substrates Containing Copper And Ruthenium App 20220049125 - GUEVENC; Haci Osman ;   et al. | 2022-02-17 |
Use Of A Chemical Mechanical Polishing (cmp) Composition For Polishing Of Cobalt Comprising Substrates App 20210102093 - REICHARDT; Robert ;   et al. | 2021-04-08 |
Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt comprising substrates Grant 10,899,945 - Reichardt , et al. January 26, 2 | 2021-01-26 |
Chemical Mechanical Polishing Composition App 20200299547 - DAESCHLEIN; Christian ;   et al. | 2020-09-24 |
Use Of A Chemical Mechanical Polishing (cmp) Composition For Polishing Of Cobalt And / Or Cobalt Alloy Comprising Substrates App 20200294813 - REICHARDT; Robert ;   et al. | 2020-09-17 |
Use of a chemical mechanical polishing (CMP) composition for polishing of cobalt and / or cobalt alloy comprising substrates Grant 10,738,219 - Reichardt , et al. A | 2020-08-11 |
Use Of A Chemical Mechanical Polishing (cmp) Composition For Polishing Of Cobalt Comprising Substrates App 20180230333 - REICHARDT; Robert ;   et al. | 2018-08-16 |
Unidirectionally conductive materials for interconnection Grant 7,405,419 - Golzarian , et al. July 29, 2 | 2008-07-29 |
Pre-coated particles for chemical mechanical polishing App 20070251157 - Golzarian; Reza M. ;   et al. | 2007-11-01 |
Pre-coated particles for chemical mechanical polishing Grant 7,229,484 - Golzarian , et al. June 12, 2 | 2007-06-12 |
Energy enhanced surface planarization Grant 7,156,947 - Golzarian January 2, 2 | 2007-01-02 |
Using acoustic energy including two lasers to activate implanted species Grant 7,153,760 - Golzarian December 26, 2 | 2006-12-26 |
Unidirectionally conductive materials for interconnection App 20060228884 - Golzarian; Reza M. ;   et al. | 2006-10-12 |
Electrically enhanced surface planarization Grant 7,097,536 - Golzarian August 29, 2 | 2006-08-29 |
Unidirectionally conductive materials for interconnection Grant 7,084,053 - Golzarian , et al. August 1, 2 | 2006-08-01 |
Substrate carrier for surface planarization App 20060000806 - Golzarian; Reza M. ;   et al. | 2006-01-05 |
Energy enhanced surface planarization App 20060000807 - Golzarian; Reza M. | 2006-01-05 |
Electrically enhanced surface planarization App 20060003670 - Golzarian; Reza M. | 2006-01-05 |
Polishing pad conditioning Grant 6,976,907 - Golzarian , et al. December 20, 2 | 2005-12-20 |
Using acoustic energy to activate implanted species App 20050112852 - Golzarian, Reza M. | 2005-05-26 |
Surface planarization Grant 6,875,086 - Golzarian , et al. April 5, 2 | 2005-04-05 |
Unidirectionally conductive materials for interconnection App 20050070096 - Golzarian, Reza M. ;   et al. | 2005-03-31 |
Polishing pad conditioning App 20040166785 - Golzarian, Reza M. ;   et al. | 2004-08-26 |
Surface planarization App 20040147205 - Golzarian, Reza M. ;   et al. | 2004-07-29 |
Pre-coated particles for chemical mechanical polishing App 20040106361 - Golzarian, Reza M. ;   et al. | 2004-06-03 |