Golovanevsky; Boris

Patent Applications and Registrations

Patent applications and USPTO patent grants for Golovanevsky; Boris.The latest application filed is for "hot spot and process window monitoring".

Company Profile

3.16.12

Golovanevsky; Boris - Haifa IL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Direct focusing with image binning in metrology tools Grant 10,897,566 - Gutman , et al. January 19, 2	2021-01-19
Hot spot and process window monitoring Grant 10,755,016 - Golovanevsky A	2020-08-25
Hot Spot and Process Window Monitoring App 20190286781 - Golovanevsky; Boris	2019-09-19
Hot spot and process window monitoring Grant 10,354,035 - Golovanevsky July 16, 2	2019-07-16
Direct Focusing with Image Binning in Metrology Tools App 20190208108 - GUTMAN; Nadav ; et al.	2019-07-04
Hot Spot and Process Window Monitoring App 20180232478 - Golovanevsky; Boris	2018-08-16
Metrology tool stage configurations and operation methods Grant 9,970,886 - Golovanevsky May 15, 2	2018-05-15
Phase characterization of targets Grant 9,581,430 - Manassen , et al. February 28, 2	2017-02-28
Metrology target indentification, design and verification Grant 9,546,946 - Golovanevsky , et al. January 17, 2	2017-01-17
Metrology Target Indentification, Design And Verification App 20150233814 - Golovanevsky; Boris ; et al.	2015-08-20
Metrology Tool Stage Configurations And Operation Methods App 20150098081 - Golovanevsky; Boris	2015-04-09
Flexible scatterometry metrology system and method Grant 8,908,175 - Kandel , et al. December 9, 2	2014-12-09
Multichip CCD camera inspection system Grant 8,804,111 - Golovanevsky August 12, 2	2014-08-12
Phase Characterization Of Targets App 20140111791 - Manassen; Amnon ; et al.	2014-04-24
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,933,016 - Mieher , et al. April 26, 2	2011-04-26
Overlay metrology and control method Grant 7,804,994 - Adel , et al. September 28, 2	2010-09-28
Apparatus And Methods For Detecting Overlay Errors Using Scatterometry App 20100091284 - Mieher; Walter D. ; et al.	2010-04-15
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,663,753 - Mieher , et al. February 16, 2	2010-02-16
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,616,313 - Kandel , et al. November 10, 2	2009-11-10
Multichip Ccd Camera Inspection System App 20090091751 - Golovanevsky; Boris	2009-04-09
Apparatus and methods for detecting overlay errors using scatterometry Grant 7,298,481 - Mieher , et al. November 20, 2	2007-11-20
Apparatus and methods for detecting overlay errors using scatterometry App 20070229829 - Kandel; Daniel ; et al.	2007-10-04
Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals Grant 7,277,172 - Kandel , et al. October 2, 2	2007-10-02
Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals App 20060274310 - Kandel; Daniel ; et al.	2006-12-07
Apparatus and methods for detecting overlay errors using scatterometry App 20040233439 - Mieher, Walter D. ; et al.	2004-11-25
Overlay metrology and control method App 20030223630 - Adel, Michael ; et al.	2003-12-04

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