Goldberg; Kenneth Alan
Patent Applications and Registrations
Patent applications and USPTO patent grants for Goldberg; Kenneth Alan.The latest application filed is for "diffractive optical element for extreme ultraviolet wavefront control".
- Goldberg; Kenneth Alan - Berkeley CA
| Patent | Date |
|---|---|
| Diffractive optical element for extreme ultraviolet wavefront control Grant 7,027,226 - Goldberg , et al. April 11, 2 | 2006-04-11 |
| Dual-domain lateral shearing interferometer Grant 6,707,560 - Naulleau , et al. March 16, 2 | 2004-03-16 |
| Hybrid shearing and phase-shifting point diffraction interferometer Grant 6,573,997 - Goldberg , et al. June 3, 2 | 2003-06-03 |
| Diffractive optical element for extreme ultraviolet wavefront control App 20030081316 - Goldberg, Kenneth Alan ; et al. | 2003-05-01 |
| Phase-shifting point diffraction interferometer mask designs Grant 6,307,635 - Goldberg October 23, 2 | 2001-10-23 |
| Interferometric at-wavelength flare characterization of EUV optical systems Grant 6,233,056 - Naulleau , et al. May 15, 2 | 2001-05-15 |
| Phase-shifting point diffraction interferometer grating designs Grant 6,195,169 - Naulleau , et al. February 27, 2 | 2001-02-27 |
| In Situ alignment system for phase-shifting point-diffraction interferometry Grant 6,118,535 - Goldberg , et al. September 12, 2 | 2000-09-12 |
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