Goetz; Uwe
Patent Applications and Registrations
Patent applications and USPTO patent grants for Goetz; Uwe.The latest application filed is for "coordinate measuring machine with vibration decoupling and method for vibration decoupling of a coordinate measuring machine".
- Goetz; Uwe - Braunfels-Neukirchen DE
| Patent | Date |
|---|---|
| Device for measuring positions of structures on a substrate Grant 7,817,262 - Ehrenberg , et al. October 19, 2 | 2010-10-19 |
| Device for measuring positions of structures on a substrate App 20090002720 - Ehrenberg; Tillmann ; et al. | 2009-01-01 |
| Coordinate measuring machine with vibration decoupling and method for vibration decoupling of a coordinate measuring machine App 20090002715 - Goetz; Uwe ; et al. | 2009-01-01 |
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