Goethals; Anne-Marie
Patent Applications and Registrations
Patent applications and USPTO patent grants for Goethals; Anne-Marie.The latest application filed is for "detection of contamination in euv systems".
- Goethals; Anne-Marie - Oud-Heverlee BE
| Patent | Date |
|---|---|
| Detection Of Contamination In Euv Systems App 20120099092 - Jonckheere; Rik ; et al. | 2012-04-26 |
| Systems and methods for UV lithography Grant 8,006,202 - Lorusso , et al. August 23, 2 | 2011-08-23 |
| Method and system for measuring contamination of a lithographical element Grant 7,750,319 - Lorusso , et al. July 6, 2 | 2010-07-06 |
| Detection Of Contamination In Euv Systems App 20090103069 - Jonckheere; Rik ; et al. | 2009-04-23 |
| Method And System For Measuring Contamination Of A Lithographical Element App 20080315125 - Lorusso; Gian Francesco ; et al. | 2008-12-25 |
| Systems And Methods For Uv Lithography App 20080229273 - Lorusso; Gian Francesco ; et al. | 2008-09-18 |
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