| Patent | Date |
|---|
Method To Fabricate Large Scale Flat Optics Lenses
App 20220308460 - XU; Yongan ; et al. | 2022-09-29 |
Ion Implantation To Modify Glass Locally For Optical Devices
App 20220307127 - PI; Nai-Wen ; et al. | 2022-09-29 |
Methods To Dice Optical Devices With Optimization Of Laser Pulse Spatial Distribution
App 20220305588 - LEI; Wei-Sheng ; et al. | 2022-09-29 |
STACKED METALENS SURFACES FOR 3D SENSORs
App 20220308263 - FU; Jinxin ; et al. | 2022-09-29 |
Airgap Structures For Improved Eyepiece Efficiency
App 20220299677 - CHEN; Erica ; et al. | 2022-09-22 |
Method To Measure Light Loss Of Optical Films And Optical Substrates
App 20220291083 - FU; Jinxin ; et al. | 2022-09-15 |
Titanium Oxide Optical Device Films Deposited By Physical Vapor Deposition
App 20220290290 - OHNO; Kenichi ; et al. | 2022-09-15 |
Method Of Measuring Efficiency For Optical Devices
App 20220291082 - FU; Jinxin ; et al. | 2022-09-15 |
Method and apparatus for deposition of multilayer device with superconductive film
Grant 11,437,559 - Zhu , et al. September 6, 2 | 2022-09-06 |
Fabrication Of Diffraction Gratings
App 20220276498 - GODET; Ludovic ; et al. | 2022-09-01 |
Methods of optical device fabrication using an electron beam apparatus
Grant 11,430,634 - Godet , et al. August 30, 2 | 2022-08-30 |
Optical Device Film With Tunable Refractive Index
App 20220260766 - OHNO; Kenichi ; et al. | 2022-08-18 |
High Index Edge Blackening Material
App 20220221723 - GAO; Yige ; et al. | 2022-07-14 |
Edge Blackening For Optical Devices
App 20220212223 - WANG; Kangkang ; et al. | 2022-07-07 |
Interference In-sensitive Littrow System For Optical Device Structure Measurement
App 20220214163 - SUN; Yangyang ; et al. | 2022-07-07 |
Depth-modulated slanted gratings using gray-tone lithography and slant etch
Grant 11,372,149 - Meyer Timmerman Thijssen , et al. June 28, 2 | 2022-06-28 |
Lithography Method To Form Structures With Slanted Angle
App 20220171283 - XU; Yongan ; et al. | 2022-06-02 |
Minimal Contact Gripping Of Thin Optical Devices
App 20220161396 - AHAMED; Yaseer Arafath ; et al. | 2022-05-26 |
Optical Device Metrology Systems And Related Methods
App 20220163382 - FU; Jinxin ; et al. | 2022-05-26 |
Illumination System For Ar Metrology Tool
App 20220163423 - SUN; Yangyang ; et al. | 2022-05-26 |
Optical Resolution Measurement Method For Optical Devices
App 20220164972 - FU; Jinxin ; et al. | 2022-05-26 |
Optical Device Having Structural And Refractive Index Gradation, And Method Of Fabricating The Same
App 20220152724 - LUO; Kang ; et al. | 2022-05-19 |
Imprint Compositions With Passivated Nanoparticles And Materials And Processes For Making The Same
App 20220155678 - JOSHI; Amita ; et al. | 2022-05-19 |
Fabrication of diffraction gratings
Grant 11,333,896 - Godet , et al. May 17, 2 | 2022-05-17 |
Mask Orientation
App 20220128745 - XU; Yongan ; et al. | 2022-04-28 |
See-through Metrology Systems, Apparatus, And Methods For Optical Devices
App 20220120700 - SUN; Yangyang ; et al. | 2022-04-21 |
In-line Metrology Systems, Apparatus, And Methods For Optical Devices
App 20220122240 - SUN; Yangyang ; et al. | 2022-04-21 |
In-line Metrology Systems, Apparatus, And Methods For Optical Devices
App 20220122241 - SUN; Yangyang ; et al. | 2022-04-21 |
See-through Metrology Systems, Apparatus, And Methods For Optical Devices
App 20220121030 - SUN; Yangyang ; et al. | 2022-04-21 |
Patterning Of Multi-depth Optical Devices
App 20220100084 - GODET; Ludovic ; et al. | 2022-03-31 |
Patterned chuck for double-sided processing
Grant 11,289,361 - Godet , et al. March 29, 2 | 2022-03-29 |
Fabrication Of Diffractive Optic Element Having A Variable Refractive Index Profile By Inkjet Printing Deposition
App 20220091314 - Luo; Kang ; et al. | 2022-03-24 |
Method Of Building A 3d Functional Optical Material Layer Stacking Structure
App 20220082738 - YOUNG; Michael Yu-tak ; et al. | 2022-03-17 |
Handling And Processing Double-sided Devices On Fragile Substrates
App 20220077794 - MCMILLAN; Wayne ; et al. | 2022-03-10 |
Post exposure processing apparatus
Grant 11,262,662 - Babayan , et al. March 1, 2 | 2022-03-01 |
Method And Apparatus For Stamp Generation And Curing
App 20220057710 - YOUNG; Michael Y. ; et al. | 2022-02-24 |
Method For Manufacturing Optical Device Structures
App 20220050241 - Colak; Levent ; et al. | 2022-02-17 |
Nano Imprint Stamps
App 20220035245 - MCMACKIN; Ian Matthew ; et al. | 2022-02-03 |
Methods To Fabricate 2d Wedge And Localized Encapsulation For Diffractive Optics
App 20220035251 - GUO; Jinrui ; et al. | 2022-02-03 |
System, software application, and method for lithography stitching
Grant 11,237,485 - Xu , et al. February 1, 2 | 2022-02-01 |
Method For Deposition Of Depth-varying Refractive Index Films
App 20220026603 - CEBALLOS; Andrew ; et al. | 2022-01-27 |
Doped Amorphous Optical Device Films And Deposition Via Incorporation Of Dopant Atoms
App 20220025518 - CEBALLOS; Andrew ; et al. | 2022-01-27 |
System and method for forming surface relief gratings
Grant 11,226,439 - Olson , et al. January 18, 2 | 2022-01-18 |
Mask orientation
Grant 11,226,440 - Xu , et al. January 18, 2 | 2022-01-18 |
Patterning of multi-depth optical devices
Grant 11,226,556 - Godet , et al. January 18, 2 | 2022-01-18 |
Patterned vacuum chuck for double-sided processing
Grant 11,222,809 - Yudovsky , et al. January 11, 2 | 2022-01-11 |
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers
App 20220004104 - BABAYAN; Viachslav ; et al. | 2022-01-06 |
Thin-film Electro-optical Waveguide Modulator Device
App 20210405399 - TEO; Russell Chin Yee ; et al. | 2021-12-30 |
Methods And Apparatus Of Processing Transparent Substrates
App 20210395139 - XU; Yongan ; et al. | 2021-12-23 |
Handling and processing double-sided devices on fragile substrates
Grant 11,205,978 - McMillan , et al. December 21, 2 | 2021-12-21 |
Methods of forming devices on a substrate
Grant 11,193,198 - Olson , et al. December 7, 2 | 2021-12-07 |
Method of building a 3D functional optical material layer stacking structure
Grant 11,187,836 - Young , et al. November 30, 2 | 2021-11-30 |
Controlled hardmask shaping to create tapered slanted fins
Grant 11,171,010 - Godet , et al. November 9, 2 | 2021-11-09 |
Controlled Hardmask Shaping To Create Tapered Slanted Fins
App 20210305055 - GODET; Ludovic ; et al. | 2021-09-30 |
Methods of forming variable-depth device structures
Grant 11,112,694 - LaBonte , et al. September 7, 2 | 2021-09-07 |
Methods and apparatus of processing transparent substrates
Grant 11,111,176 - Xu , et al. September 7, 2 | 2021-09-07 |
Method and apparatus for post exposure processing of photoresist wafers
Grant 11,112,697 - Babayan , et al. September 7, 2 | 2021-09-07 |
Methods And Apparatus Of Processing Transparent Substrates
App 20210269355 - XU; Yongan ; et al. | 2021-09-02 |
Maskless Lithography Method To Fabricate Topographic Substrate
App 20210263410 - XU; Yongan ; et al. | 2021-08-26 |
System, Software Application, And Method For Lithography Stitching
App 20210223704 - XU; Yongan ; et al. | 2021-07-22 |
High Refractive Index Imprint Compositions And Materials And Processes For Making The Same
App 20210223686 - JOSHI; Amita ; et al. | 2021-07-22 |
Chemical delivery chamber for self-assembled monolayer processes
Grant 11,066,747 - Liang , et al. July 20, 2 | 2021-07-20 |
Mask Orientation
App 20210208317 - XU; Yongan ; et al. | 2021-07-08 |
Bake Devices For Handling And Uniform Baking Of Substrates
App 20210195695 - CERVERA; Hiram ; et al. | 2021-06-24 |
Transparent substrate with light blocking edge exclusion zone
Grant 11,043,437 - Young , et al. June 22, 2 | 2021-06-22 |
Atomic Layer Deposition On Optical Structures
App 20210180183 - GUO; Jinrui ; et al. | 2021-06-17 |
Methods and apparatus for waveguide metrology
Grant 11,029,206 - Fu , et al. June 8, 2 | 2021-06-08 |
High temperature vapor delivery system and method
Grant 10,954,594 - Babayan , et al. March 23, 2 | 2021-03-23 |
Method of imprinting tilt angle light gratings
Grant 10,955,606 - Young , et al. March 23, 2 | 2021-03-23 |
Method and system for three-dimensional (3D) structure fill
Grant 10,943,779 - Yieh , et al. March 9, 2 | 2021-03-09 |
Methods Of Optical Device Fabrication Using An Electron Beam Apparatus
App 20210066036 - GODET; Ludovic ; et al. | 2021-03-04 |
Optical component having depth modulated angled gratings and method of formation
Grant 10,935,799 - Meyer Timmerman Thijssen , et al. March 2, 2 | 2021-03-02 |
Extension of PVD chamber with multiple reaction gases, high bias power, and high power impulse source for deposition, implantation, and treatment
Grant 10,927,449 - Liu , et al. February 23, 2 | 2021-02-23 |
Methods for forming a metal silicide interconnection nanowire structure
Grant 10,930,472 - Mebarki , et al. February 23, 2 | 2021-02-23 |
Measurement system and grating pattern array
Grant 10,921,721 - Fu , et al. February 16, 2 | 2021-02-16 |
Post Exposure Processing Apparatus
App 20210026257 - BABAYAN; Viachslav ; et al. | 2021-01-28 |
Methods For Gapfill In High Aspect Ratio Structures
App 20210028055 - Manna; Pramit ; et al. | 2021-01-28 |
Wafer Treatment For Achieving Defect-free Self-assembled Monolayers
App 20200402792 - Ke; Chang ; et al. | 2020-12-24 |
Air-spaced Encapsulated Dielectric Nanopillars For Flat Optical Devices
App 20200400990 - GODET; Ludovic ; et al. | 2020-12-24 |
Imaging System And Method Of Manufacturing A Metalens Array
App 20200393599 - FU; Jinxin ; et al. | 2020-12-17 |
Photoresist Loading Solutions For Flat Optics Fabrication
App 20200386926 - DOSHAY; Sage Toko Garrett ; et al. | 2020-12-10 |
Apertures For Flat Optical Devices
App 20200386911 - DOSHAY; Sage Toko Garrett ; et al. | 2020-12-10 |
Imaging System And Method Of Creating Composite Images
App 20200388642 - FU; Jinxin ; et al. | 2020-12-10 |
Patterned Vacuum Chuck For Double-sided Processing
App 20200373188 - YUDOVSKY; Joseph ; et al. | 2020-11-26 |
Post exposure processing apparatus
Grant 10,845,715 - Babayan , et al. November 24, 2 | 2020-11-24 |
Methods Of Forming Variable-depth Device Structures
App 20200363719 - LABONTE; Andre P. ; et al. | 2020-11-19 |
Directional treatment for multi-dimensional device processing
Grant 10,825,665 - Godet , et al. November 3, 2 | 2020-11-03 |
Methods of optical device fabrication using an electron beam apparatus
Grant 10,818,472 - Godet , et al. October 27, 2 | 2020-10-27 |
Mehtod Of Thin Film Deposition In Trenches
App 20200332414 - GUO; Jinrui ; et al. | 2020-10-22 |
Methods for gapfill in high aspect ratio structures
Grant 10,811,303 - Manna , et al. October 20, 2 | 2020-10-20 |
Patterning Of Multi-depth Optical Devices
App 20200326621 - GODET; Ludovic ; et al. | 2020-10-15 |
Multi-depth Film For Optical Devices
App 20200325576 - ARMSTRONG; Karl J. ; et al. | 2020-10-15 |
Measurement system and a method of diffracting light
Grant 10,801,890 - Fu , et al. October 13, 2 | 2020-10-13 |
Measurement System And A Method Of Diffracting Light
App 20200309598 - FU; Jinxin ; et al. | 2020-10-01 |
Method and Apparatus for Deposition of Multilayer Device with Superconductive Film
App 20200303616 - Zhu; Mingwei ; et al. | 2020-09-24 |
Method And Apparatus For Deposition Of Metal Nitrides
App 20200299830 - Zhu; Mingwei ; et al. | 2020-09-24 |
System and method for detecting etch depth of angled surface relief gratings
Grant 10,775,158 - Olson , et al. Sept | 2020-09-15 |
Gap Fill Of Imprinted Structure With Spin Coated High Refractive Index Material For Optical Components
App 20200284953 - Fu; Jinxin ; et al. | 2020-09-10 |
Multi Stack Optical Elements Using Temporary And Permanent Bonding
App 20200286778 - GODET; Ludovic ; et al. | 2020-09-10 |
Wafer treatment for achieving defect-free self-assembled monolayers
Grant 10,770,292 - Ke , et al. Sep | 2020-09-08 |
Method And Apparatus For Stamp Generation And Curing
App 20200278605 - YOUNG; Michael Y. ; et al. | 2020-09-03 |
Dielectric Filled Nanostructured Silica Substrate For Flat Optical Devices
App 20200270746 - ROY; Tapashree ; et al. | 2020-08-27 |
Transparent Substrate With Light Blocking Edge Exclusion Zone
App 20200219819 - Young; Michael Yu-tak ; et al. | 2020-07-09 |
Multi stack optical elements using temporary and permanent bonding
Grant 10,707,118 - Godet , et al. | 2020-07-07 |
Gap fill of imprinted structure with spin coated high refractive index material for optical components
Grant 10,705,268 - Fu , et al. | 2020-07-07 |
Pvd Directional Deposition For Encapsulation
App 20200192108 - GODET; Ludovic ; et al. | 2020-06-18 |
Methods Of Forming Devices On A Substrate
App 20200190658 - OLSON; Joseph C. ; et al. | 2020-06-18 |
Methods Of Optical Device Fabrication Using An Ion Beam Source
App 20200192028 - GODET; Ludovic ; et al. | 2020-06-18 |
Method Of Forming Gratings
App 20200192010 - OLSON; Joseph C. ; et al. | 2020-06-18 |
Ion Beam Source For Optical Device Fabrication
App 20200194217 - GODET; Ludovic ; et al. | 2020-06-18 |
Backside Coating For Transparent Substrate
App 20200194319 - DOSHAY; Sage Toko Garrett ; et al. | 2020-06-18 |
Handling And Processing Double-sided Devices On Fragile Substrates
App 20200195172 - MCMILLAN; Wayne ; et al. | 2020-06-18 |
Electron Beam Apparatus For Optical Device Fabrication
App 20200192027 - RAMASWAMY; Kartik ; et al. | 2020-06-18 |
Methods Of Optical Device Fabrication Using An Electron Beam Apparatus
App 20200194218 - GODET; Ludovic ; et al. | 2020-06-18 |
System And Method For Detecting Etch Depth Of Angled Surface Relief Gratings
App 20200158495 - Olson; Joseph C. ; et al. | 2020-05-21 |
System And Method For Forming Surface Relief Gratings
App 20200150325 - Olson; Joseph C. ; et al. | 2020-05-14 |
Methods And Apparatus For Waveguide Metrology
App 20200141802 - FU; Jinxin ; et al. | 2020-05-07 |
Depth-modulated Slanted Gratings Using Gray-tone Lithography And Slant Etch
App 20200142120 - MEYER TIMMERMAN THIJSSEN; Rutger ; et al. | 2020-05-07 |
Controlled Hardmask Shaping To Create Tapered Slanted Fins
App 20200135482 - GODET; Ludovic ; et al. | 2020-04-30 |
High pressure annealing of metal gate structures
Grant 10,636,705 - Wang , et al. | 2020-04-28 |
Optical Component Having Depth Modulated Angled Gratings And Method Of Formation
App 20200124865 - MEYER TIMMERMAN THIJSSEN; RUTGER ; et al. | 2020-04-23 |
Apparatus for field guided acid profile control in a photoresist layer
Grant 10,615,058 - Godet , et al. | 2020-04-07 |
Laminate and core shell formation of silicide nanowire
Grant 10,593,592 - Mebarki , et al. | 2020-03-17 |
Using Flowable Cvd To Gap Fill Micro/nano Structures For Optical Components
App 20200003937 - FU; Jinxin ; et al. | 2020-01-02 |
Fabrication Of Diffraction Gratings
App 20200004029 - GODET; Ludovic ; et al. | 2020-01-02 |
Gap Fill Of Imprinted Structure With Spin Coated High Refractive Index Material For Optical Components
App 20200003936 - FU; Jinxin ; et al. | 2020-01-02 |
Post Exposure Processing Apparatus
App 20190377272 - BABAYAN; Viachslav ; et al. | 2019-12-12 |
Method Of Imprinting Tilt Angle Light Gratings
App 20190369321 - YOUNG; Michael Yu-tak ; et al. | 2019-12-05 |
Method and apparatus for post exposure processing of photoresist wafers
Grant 10,474,033 - Babayan , et al. Nov | 2019-11-12 |
Multi Stack Optical Elements Using Temporary And Permanent Bonding
App 20190318957 - GODET; Ludovic ; et al. | 2019-10-17 |
Integrated Cluster Tool For Selective Area Deposition
App 20190301009 - KAUFMAN-OSBORN; Tobin ; et al. | 2019-10-03 |
Method Of Building A 3d Functional Optical Material Layer Stacking Structure
App 20190278005 - YOUNG; Michael Yu-tak ; et al. | 2019-09-12 |
Post exposure processing apparatus
Grant 10,401,742 - Babayan , et al. Sep | 2019-09-03 |
Patterned Vacuum Chuck For Double-sided Processing
App 20190259648 - YUDOVSKY; Joseph ; et al. | 2019-08-22 |
Modifying bulk properties of a glass substrate
Grant 10,377,665 - Olson , et al. A | 2019-08-13 |
Integrated cluster tool for selective area deposition
Grant 10,358,715 - Kaufman-Osborn , et al. | 2019-07-23 |
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers
App 20190187563 - BABAYAN; Viachslav ; et al. | 2019-06-20 |
Porous Surface For Biomedical Devices
App 20190186046 - JEONG; Sangmin ; et al. | 2019-06-20 |
Methods For Forming A Metal Silicide Interconnection Nanowire Structure
App 20190172686 - MEBARKI; Bencherki ; et al. | 2019-06-06 |
Methods For Gapfill In High Aspect Ratio Structures
App 20190157134 - Manna; Pramit ; et al. | 2019-05-23 |
Patterned Chuck For Double-sided Processing
App 20190148208 - GODET; Ludovic ; et al. | 2019-05-16 |
Material deposition for high aspect ratio structures
Grant 10,276,369 - Xue , et al. | 2019-04-30 |
Methods for forming a metal silicide interconnection nanowire structure
Grant 10,204,764 - Mebarki , et al. Feb | 2019-02-12 |
Method and apparatus for post exposure processing of photoresist wafers
Grant 10,203,604 - Babayan , et al. Feb | 2019-02-12 |
Methods for gapfill in high aspect ratio structures
Grant 10,192,775 - Manna , et al. Ja | 2019-01-29 |
Porous surface for biomedical devices
Grant 10,167,574 - Jeong , et al. J | 2019-01-01 |
Wafer Treatment For Achieving Defect-Free Self-Assembled Monolayers
App 20180366317 - Ke; Chang ; et al. | 2018-12-20 |
Selective Deposition Process Utilizing Polymer Structure Deactivation Process
App 20180366318 - OUYANG; Christine Y. ; et al. | 2018-12-20 |
Selective deposition process utilizing polymer structure deactivation process
Grant 10,157,740 - Ouyang , et al. Dec | 2018-12-18 |
Controlling photo acid diffusion in lithography processes
Grant 10,108,093 - Xie , et al. October 23, 2 | 2018-10-23 |
Gapfill film modification for advanced CMP and recess flow
Grant 10,096,512 - Chen , et al. October 9, 2 | 2018-10-09 |
Pulsed plasma for film deposition
Grant 10,096,466 - Xue , et al. October 9, 2 | 2018-10-09 |
Field guided post exposure bake application for photoresist microbridge defects
Grant 10,048,589 - Godet , et al. August 14, 2 | 2018-08-14 |
Post Exposure Processing Apparatus
App 20180224754 - BABAYAN; Viachslav ; et al. | 2018-08-09 |
Extension Of Pvd Chamber With Multiple Reaction Gases, High Bias Power, And High Power Impulse Source For Deposition, Implantation, And Treatment
App 20180209035 - LIU; Jingjing ; et al. | 2018-07-26 |
Apparatus For Field Guided Acid Profile Control In A Photoresist Layer
App 20180190518 - GODET; Ludovic ; et al. | 2018-07-05 |
Methods And Apparatus For Selective Removal Of Self-assembled Monolayers Using Laser Annealing
App 20180171476 - GODET; Ludovic ; et al. | 2018-06-21 |
Resist sensitivity and profile improvement via acid anion control during field-guided post exposure bake
Grant 9,996,006 - Ouyang , et al. June 12, 2 | 2018-06-12 |
Post exposure processing apparatus
Grant 9,964,863 - Babayan , et al. May 8, 2 | 2018-05-08 |
Resist Sensitivity And Profile Improvement Via Acid Anion Control During Field-guided Post Exposure Bake
App 20180107117 - OUYANG; Christine Y. ; et al. | 2018-04-19 |
Ion Implantation For Superconductor Tape Fabrication
App 20180105928 - Wang; Connie P. ; et al. | 2018-04-19 |
Plasma poisoning to enable selective deposition
Grant 9,947,539 - Godet , et al. April 17, 2 | 2018-04-17 |
Material Deposition For High Aspect Ratio Structures
App 20180102248 - XUE; Jun ; et al. | 2018-04-12 |
Resist sensitivity and profile improvement via acid anion control during field-guided post exposure bake
Grant 9,927,709 - Ouyang , et al. March 27, 2 | 2018-03-27 |
Selective atomic layer deposition process utilizing patterned self assembled monolayers for 3D structure semiconductor applications
Grant 9,911,594 - Nemani , et al. March 6, 2 | 2018-03-06 |
Controlling Photo Acid Diffusion In Lithography Processes
App 20180052396 - XIE; Peng ; et al. | 2018-02-22 |
Field Guided Post Exposure Bake Application For Photoresist Microbridge Defects
App 20180046085 - GODET; Ludovic ; et al. | 2018-02-15 |
Laser annealing and electric field
Grant 9,864,276 - Ouyang , et al. January 9, 2 | 2018-01-09 |
Nanocrystalline diamond carbon film for 3D NAND hardmask application
Grant 9,865,464 - Chen , et al. January 9, 2 | 2018-01-09 |
Material deposition for high aspect ratio structures
Grant 9,852,902 - Xue , et al. December 26, 2 | 2017-12-26 |
Ion implantation for superconductor tape fabrication
Grant 9,850,569 - Wang , et al. December 26, 2 | 2017-12-26 |
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers
App 20170363960 - BABAYAN; Viachslav ; et al. | 2017-12-21 |
Integrated Cluster Tool For Selective Area Deposition
App 20170350004 - KAUFMAN-OSBORN; Tobin ; et al. | 2017-12-07 |
Immersion field guided exposure and post-exposure bake process
Grant 9,829,790 - Buchberger, Jr. , et al. November 28, 2 | 2017-11-28 |
Field guided post exposure bake application for photoresist microbridge defects
Grant 9,823,570 - Godet , et al. November 21, 2 | 2017-11-21 |
Roll to roll wafer backside particle and contamination removal
Grant 9,815,091 - Ngai , et al. November 14, 2 | 2017-11-14 |
Plasma Poisoning To Enable Selective Deposition
App 20170323778 - Godet; Ludovic ; et al. | 2017-11-09 |
Chemical Delivery Chamber For Self-assembled Monolayer Processes
App 20170306491 - LIANG; Qiwei ; et al. | 2017-10-26 |
Controlling photo acid diffusion in lithography processes
Grant 9,798,240 - Xie , et al. October 24, 2 | 2017-10-24 |
Integrated Metrology And Process Tool To Enable Local Stress/overlay Correction
App 20170287752 - GODET; Ludovic ; et al. | 2017-10-05 |
Advanced process flow for high quality FCVD films
Grant 9,777,378 - Nemani , et al. October 3, 2 | 2017-10-03 |
3D material modification for advanced processing
Grant 9,773,675 - Godet , et al. September 26, 2 | 2017-09-26 |
Methods For Gapfill In High Aspect Ratio Structures
App 20170271196 - Manna; Pramit ; et al. | 2017-09-21 |
Method and system for modifying substrate relief features using ion implantation
Grant 9,767,987 - Godet , et al. September 19, 2 | 2017-09-19 |
Selective deposition utilizing masks and directional plasma treatment
Grant 9,754,791 - Godet , et al. September 5, 2 | 2017-09-05 |
Localized stress modulation for overlay and EPE
Grant 9,748,148 - Yieh , et al. August 29, 2 | 2017-08-29 |
Tooling configuration for electric/magnetic field guided acid profile control in a photoresist layer
Grant 9,733,579 - Nam , et al. August 15, 2 | 2017-08-15 |
Rtp Process For Directed Self-aligned Patterns
App 20170221701 - HUNTER; Aaron Muir ; et al. | 2017-08-03 |
Plasma poisoning to enable selective deposition
Grant 9,716,005 - Godet , et al. July 25, 2 | 2017-07-25 |
Atomic Layer Etching System With Remote Plasma Source And Dc Electrode
App 20170200587 - GODET; Ludovic ; et al. | 2017-07-13 |
Resist Sensitivity And Profile Improvement Via Acid Anion Control During Field-guided Post Exposure Bake
App 20170184976 - OUYANG; Christine Y. ; et al. | 2017-06-29 |
3d Material Modification For Advanced Processing
App 20170154776 - GODET; Ludovic ; et al. | 2017-06-01 |
Method And Apparatus For Post Exposure Processing Of Photoresist Wafers
App 20170154797 - Babayan; Viachslav ; et al. | 2017-06-01 |
Modifying Bulk Properties Of A Glass Substrate
App 20170144929 - Olson; Joseph C. ; et al. | 2017-05-25 |
Gapfill Film Modification For Advanced Cmp And Recess Flow
App 20170117157 - CHEN; Erica ; et al. | 2017-04-27 |
In situ control of ion angular distribution in a processing apparatus
Grant 9,620,335 - Biloiu , et al. April 11, 2 | 2017-04-11 |
3D material modification for advanced processing
Grant 9,620,407 - Godet , et al. April 11, 2 | 2017-04-11 |
Direct deposition of nickel silicide nanowire
Grant 9,613,859 - Lakshmanan , et al. April 4, 2 | 2017-04-04 |
High Temperature Vapor Delivery System And Method
App 20170088949 - BABAYAN; Viachslav ; et al. | 2017-03-30 |
Air gap formation in interconnection structure by implantation process
Grant 9,595,467 - Xue , et al. March 14, 2 | 2017-03-14 |
Method And System For Three-dimensional (3d) Structure Fill
App 20170069488 - Yieh; Ellie ; et al. | 2017-03-09 |
Nanocrystaline Diamond Carbon Film For 3d Nand Hardmask Application
App 20170062216 - CHEN; Yongmei ; et al. | 2017-03-02 |
Selective Atomic Layer Deposition Process Utilizing Patterned Self Assembled Monolayers For 3d Structure Semiconductor Applications
App 20170053797 - NEMANI; Srinivas D. ; et al. | 2017-02-23 |
Conversion process utilized for manufacturing advanced 3D features for semiconductor device applications
Grant 9,553,174 - Godet , et al. January 24, 2 | 2017-01-24 |
Plasma process chambers employing distribution grids having focusing surfaces thereon enabling angled fluxes to reach a substrate, and related methods
Grant 9,534,289 - Xue , et al. January 3, 2 | 2017-01-03 |
Techniques And Apparatus For Anisotropic Metal Etching
App 20160379844 - Omstead; Thomas R. ; et al. | 2016-12-29 |
Method and system for three-dimensional (3D) structure fill
Grant 9,530,674 - Yieh , et al. December 27, 2 | 2016-12-27 |
Plasma uniformity control by arrays of unit cell plasmas
Grant 9,528,185 - Nam , et al. December 27, 2 | 2016-12-27 |
Bias voltage frequency controlled angular ion distribution in plasma processing
Grant 9,520,267 - Godet , et al. December 13, 2 | 2016-12-13 |
Immersion Field Guided Exposure And Post-exposure Bake Process
App 20160357107 - BUCHBERGER, JR.; Douglas A. ; et al. | 2016-12-08 |
Multiple exposure treatment for processing a patterning feature
Grant 9,512,517 - Ma , et al. December 6, 2 | 2016-12-06 |
Selective atomic layer deposition process utilizing patterned self assembled monolayers for 3D structure semiconductor applications
Grant 9,515,166 - Nemani , et al. December 6, 2 | 2016-12-06 |
Guard aperture to control ion angular distribution in plasma processing
Grant 9,514,918 - Nam , et al. December 6, 2 | 2016-12-06 |
Nanocrystalline diamond carbon film for 3D NAND hardmask application
Grant 9,502,262 - Chen , et al. November 22, 2 | 2016-11-22 |
Anisotropic gap etch
Grant 9,502,258 - Xue , et al. November 22, 2 | 2016-11-22 |
Methods Of Affecting Material Properties And Applications Therefor
App 20160326636 - Godet; Ludovic ; et al. | 2016-11-10 |
Material modification by neutral beam source with selected collision angle
Grant 9,480,140 - Nam , et al. October 25, 2 | 2016-10-25 |
Laser Annealing And Electric Field
App 20160299435 - OUYANG; Christine Y. ; et al. | 2016-10-13 |
Field Guided Post Exposure Bake Application For Photoresist Microbridge Defects
App 20160291476 - GODET; Ludovic ; et al. | 2016-10-06 |
Techniques and apparatus for anisotropic metal etching
Grant 9,460,961 - Omstead , et al. October 4, 2 | 2016-10-04 |
Pulsed Plasma For Film Deposition
App 20160276150 - Xue; Jun ; et al. | 2016-09-22 |
Methods of affecting material properties and applications therefor
Grant 9,425,027 - Godet , et al. August 23, 2 | 2016-08-23 |
Selective Deposition Utilizing Masks And Directional Plasma Treatment
App 20160233100 - GODET; Ludovic ; et al. | 2016-08-11 |
Development of high etch selective hardmask material by ion implantation into amorphous carbon films
Grant 9,412,613 - Manna , et al. August 9, 2 | 2016-08-09 |
Multiple Exposure Treatment For Processing A Patterning Feature
App 20160215385 - Ma; Tristan Y. ; et al. | 2016-07-28 |
Techniques and apparatus for anisotropic metal etching
Grant 9,396,965 - Ma , et al. July 19, 2 | 2016-07-19 |
Laminate And Core Shell Formation Of Silicide Nanowire
App 20160204029 - MEBARKI; Bencherki ; et al. | 2016-07-14 |
Direct Deposition Of Nickel Silicide Nanowire
App 20160204027 - LAKSHMANAN; Annamalai ; et al. | 2016-07-14 |
Advanced Process Flow For High Quality Fcvd Films
App 20160194758 - NEMANI; Srinivas D. ; et al. | 2016-07-07 |
Method and apparatus for selective deposition
Grant 9,385,219 - Yieh , et al. July 5, 2 | 2016-07-05 |
Remote plasma source based cyclic CVD process for nanocrystalline diamond deposition
Grant 9,382,625 - Xue , et al. July 5, 2 | 2016-07-05 |
In Situ Control Of Ion Angular Distribution In A Processing Apparatus
App 20160189935 - Biloiu; Costel ; et al. | 2016-06-30 |
Electric/magnetic field guided acid diffusion
Grant 9,377,692 - Xie , et al. June 28, 2 | 2016-06-28 |
Method to reduce K value of dielectric layer for advanced FinFET formation
Grant 9,379,021 - Yieh , et al. June 28, 2 | 2016-06-28 |
Anisotropic Gap Etch
App 20160181112 - Xue; Jun ; et al. | 2016-06-23 |
Electric/magnetic field guided acid profile control in a photoresist layer
Grant 9,366,966 - Xie , et al. June 14, 2 | 2016-06-14 |
3d Material Modification For Advanced Processing
App 20160163546 - GODET; Ludovic ; et al. | 2016-06-09 |
Ion Implantation For Superconductor Tape Fabrication
App 20160160344 - Wang; Connie P. ; et al. | 2016-06-09 |
Material Modification By Neutral Beam Source With Selected Collision Angle
App 20160148713 - Nam; Sang Ki ; et al. | 2016-05-26 |
Air Gap Formation In Interconnection Structure By Implantation Process
App 20160141202 - XUE; Jun ; et al. | 2016-05-19 |
Method and system for modifying photoresist using electromagnetic radiation and ion implantation
Grant 9,340,877 - Godet , et al. May 17, 2 | 2016-05-17 |
Apparatus and method for dynamic control of ion beam energy and angle
Grant 9,336,998 - Godet , et al. May 10, 2 | 2016-05-10 |
Porous Surface For Biomedical Devices
App 20160121292 - JEONG; Sangmin ; et al. | 2016-05-05 |
Methods For Forming A Metal Silicide Interconnection Nanowire Structure
App 20160118260 - MEBARKI; Bencherki ; et al. | 2016-04-28 |
Tooling Configuration For Electric/magnetic Field Guided Acid Profile Control In A Photoresist Layer
App 20160109813 - NAM; Sang Ki ; et al. | 2016-04-21 |
Material Deposition For High Aspect Ratio Structures
App 20160099154 - Xue; Jun ; et al. | 2016-04-07 |
Guard Aperture To Control Ion Angular Distribution In Plasma Processing
App 20160093409 - NAM; Sang Ki ; et al. | 2016-03-31 |
In situ control of ion angular distribution in a processing apparatus
Grant 9,293,301 - Biloiu , et al. March 22, 2 | 2016-03-22 |
Flowable Film Properties Tuning Using Implantation
App 20160079034 - Yieh; Ellie Y. ; et al. | 2016-03-17 |
Apparatus and techniques for energetic neutral beam processing
Grant 9,288,889 - Radovanov , et al. March 15, 2 | 2016-03-15 |
Field guided exposure and post-exposure bake process
Grant 9,280,070 - Xie , et al. March 8, 2 | 2016-03-08 |
Nanocrystaline Diamond Carbon Film For 3d Nand Hardmask Application
App 20160064500 - CHEN; Yongmei ; et al. | 2016-03-03 |
Plasma Uniformity Control By Arrays Of Unit Cell Plasmas
App 20160053376 - NAM; Sang Ki ; et al. | 2016-02-25 |
Techniques for patterning a substrate
Grant 9,268,228 - Godet , et al. February 23, 2 | 2016-02-23 |
Techniques And Apparatus For Anisotropic Metal Etching
App 20160042922 - Omstead; Thomas R. ; et al. | 2016-02-11 |
Techniques And Apparatus For Anisotropic Metal Etching
App 20160042975 - MA; Tristan ; et al. | 2016-02-11 |
Neutral beam source with plasma sheath-shaping neutralization grid
Grant 9,253,868 - Nam , et al. February 2, 2 | 2016-02-02 |
Techniques for forming 3D structures
Grant 9,240,350 - Godet , et al. January 19, 2 | 2016-01-19 |
Controlling Photo Acid Diffusion In Lithography Processes
App 20160011518 - XIE; Peng ; et al. | 2016-01-14 |
Electric/magnetic Field Guided Acid Profile Control In A Photoresist Layer
App 20160011515 - XIE; Peng ; et al. | 2016-01-14 |
Field Guided Exposure And Post-exposure Bake Process
App 20160011526 - XIE; Peng ; et al. | 2016-01-14 |
Techniques to mitigate straggle damage to sensitive structures
Grant 9,236,257 - Hatem , et al. January 12, 2 | 2016-01-12 |
Method And Apparatus For Selective Deposition
App 20160005839 - YIEH; Ellie Y. ; et al. | 2016-01-07 |
Localized Stress Modulation For Overlay And Epe
App 20160005662 - YIEH; Ellie Y. ; et al. | 2016-01-07 |
Method and system for plasma-assisted ion beam processing
Grant 9,232,628 - Radovanov , et al. January 5, 2 | 2016-01-05 |
Methods For Forming Fin Structures With Desired Dimensions For 3d Structure Semiconductor Applications
App 20150380526 - GODET; Ludovic ; et al. | 2015-12-31 |
Plasma Process Chambers Employing Distribution Grids Having Focusing Surfaces Thereon Enabling Angled Fluxes To Reach A Substrate, And Related Methods
App 20150368801 - XUE; Jun ; et al. | 2015-12-24 |
Roll To Roll Wafer Backside Particle And Contamination Removal
App 20150371879 - NGAI; Christopher S. ; et al. | 2015-12-24 |
Bias Voltage Frequency Controlled Angular Ion Distribution In Plasma Processing
App 20150371827 - Godet; Ludovic ; et al. | 2015-12-24 |
Methods for silicon recess structures in a substrate by utilizing a doping layer
Grant 9,214,377 - Zhang , et al. December 15, 2 | 2015-12-15 |
Electric/magnetic Field Guided Acid Diffusion
App 20150355549 - XIE; Peng ; et al. | 2015-12-10 |
Technique for forming a FinFET device using selective ion implantation
Grant 9,190,498 - Brand , et al. November 17, 2 | 2015-11-17 |
Apparatus And Method For Dynamic Control Of Ion Beam Energy And Angle
App 20150325410 - Godet; Ludovic ; et al. | 2015-11-12 |
Directional Treatment For Multi-dimensional Device Processing
App 20150325411 - GODET; Ludovic ; et al. | 2015-11-12 |
Remote Plasma Source Based Cyclic Cvd Process For Nanocrystalline Diamond Deposition
App 20150315707 - XUE; Jun ; et al. | 2015-11-05 |
Selective Atomic Layer Deposition Process Utilizing Patterned Self Assembled Monolayers For 3d Structure Semiconductor Applications
App 20150294863 - NEMANI; Srinivas D. ; et al. | 2015-10-15 |
Conversion Process Utilized For Manufacturing Advanced 3d Features For Semiconductor Device Applications
App 20150279974 - GODET; Ludovic ; et al. | 2015-10-01 |
Three dimensional metal deposition technique
Grant 9,136,096 - Godet , et al. September 15, 2 | 2015-09-15 |
Grazing Angle Plasma Processing For Modifying A Substrate Surface
App 20150255243 - GODET; Ludovic ; et al. | 2015-09-10 |
Techniques for plasma processing a substrate
Grant 9,123,509 - Papasouliotis , et al. September 1, 2 | 2015-09-01 |
Techniques for treating sidewalls of patterned structures using angled ion treatment
Grant 9,118,001 - Godet , et al. August 25, 2 | 2015-08-25 |
Development Of High Etch Selective Hardmask Material By Ion Implantation Into Amorphous Carbon Films
App 20150194317 - MANNA; PRAMIT ; et al. | 2015-07-09 |
Techniques For Diamond Nucleation Control For Thin Film Processing
App 20150176116 - GODET; Ludovic ; et al. | 2015-06-25 |
In Situ Control Of Ion Angular Distribution In A Processing Apparatus
App 20150179409 - Biloiu; Costel ; et al. | 2015-06-25 |
Plasma processing of workpieces to form a coating
Grant 9,062,367 - Hatem , et al. June 23, 2 | 2015-06-23 |
Method And Apparatus For Film Deposition
App 20150136732 - TANG; Xianmin ; et al. | 2015-05-21 |
Techniques and apparatus for high rate hydrogen implantation and co-implantion
Grant 9,024,282 - Radovanov , et al. May 5, 2 | 2015-05-05 |
Method to generate molecular ions from ions with a smaller atomic mass
Grant 9,024,273 - Godet , et al. May 5, 2 | 2015-05-05 |
Methods For Silicon Recess Structures In A Substrate By Utilizing A Doping Layer
App 20150118822 - ZHANG; Ying ; et al. | 2015-04-30 |
Method To Reduce K Value Of Dielectric Layer For Advanced Finfet Formation
App 20150099360 - YIEH; Ellie Y. ; et al. | 2015-04-09 |
Method And System For Three-dimensional (3d) Structure Fill
App 20150093907 - YIEH; Ellie ; et al. | 2015-04-02 |
Method and system for modifying resist openings using multiple angled ions
Grant 8,974,683 - Godet , et al. March 10, 2 | 2015-03-10 |
Method for epitaxial layer overgrowth
Grant 8,969,181 - Godet , et al. March 3, 2 | 2015-03-03 |
Techniques for processing photoresist features using ions
Grant 8,952,344 - Sinclair , et al. February 10, 2 | 2015-02-10 |
Engineering of porous coatings formed by ion-assisted direct deposition
Grant 8,946,061 - Darby , et al. February 3, 2 | 2015-02-03 |
Apparatus and method for controllably implanting workpieces
Grant 8,937,004 - Renau , et al. January 20, 2 | 2015-01-20 |
Apparatus and method for maskless patterned implantation
Grant 8,907,307 - Leavitt , et al. December 9, 2 | 2014-12-09 |
Material engineering for high performance Li-ion battery electrodes
Grant 8,906,576 - Darby , et al. December 9, 2 | 2014-12-09 |
System and method for plasma control using boundary electrode
Grant 8,907,300 - Radovanov , et al. December 9, 2 | 2014-12-09 |
Method And System For Modifying Substrate Relief Features Using Ion Implantation
App 20140306127 - Godet; Ludovic ; et al. | 2014-10-16 |
Enhanced etch and deposition profile control using plasma sheath engineering
Grant 8,858,816 - Godet , et al. October 14, 2 | 2014-10-14 |
Carbon Film Hardmask Stress Reduction By Hydrogen Ion Implantation
App 20140273461 - LEE; Kwangduk Douglas ; et al. | 2014-09-18 |
Apparatus And Techniques For Energetic Neutral Beam Processing
App 20140272179 - Radovanov; Svetlana B. ; et al. | 2014-09-18 |
Techniques To Mitigate Straggle Damage To Sensitive Structures
App 20140273502 - Hatem; Christopher R. ; et al. | 2014-09-18 |
System And Method For Plasma Control Using Boundary Electrode
App 20140265853 - Radovanov; Svetlana B. ; et al. | 2014-09-18 |
Techniques For Processing Photoresist Features Using Ions
App 20140272728 - Sinclair; Frank ; et al. | 2014-09-18 |
Method of implanting a workpiece to improve growth of a compound semiconductor
Grant 8,835,287 - Godet , et al. September 16, 2 | 2014-09-16 |
Techniques And Apparatus For High Rate Hydrogen Implantation And Co-implantion
App 20140256121 - Radovanov; Svetlana B. ; et al. | 2014-09-11 |
Techniques For Patterning A Substrate
App 20140242523 - Godet; Ludovic ; et al. | 2014-08-28 |
Method of etching a workpiece
Grant 8,815,720 - Godet , et al. August 26, 2 | 2014-08-26 |
Method And System For Plasma-assisted Ion Beam Processing
App 20140234554 - Radovanov; Svetlana B. ; et al. | 2014-08-21 |
Method And System For Ion-assisted Processing
App 20140202633 - Godet; Ludovic ; et al. | 2014-07-24 |
Method and system for modifying substrate relief features using ion implantation
Grant 8,778,603 - Godet , et al. July 15, 2 | 2014-07-15 |
Ion-assisted direct growth of porous materials
Grant 8,778,465 - Godet , et al. July 15, 2 | 2014-07-15 |
Techniques For Forming 3D Structures
App 20140193963 - Godet; Ludovic ; et al. | 2014-07-10 |
Method of ionization
Grant 8,742,373 - Radovanov , et al. June 3, 2 | 2014-06-03 |
Method and system for ion-assisted processing
Grant 8,728,951 - Godet , et al. May 20, 2 | 2014-05-20 |
Apparatus and method for multiple slot ion implantation
Grant 8,716,682 - Renau , et al. May 6, 2 | 2014-05-06 |
Deposition of porous films for thermoelectric applications
Grant 8,697,549 - Lu , et al. April 15, 2 | 2014-04-15 |
Method and system for controlling critical dimension and roughness in resist features
Grant 8,698,109 - Godet , et al. April 15, 2 | 2014-04-15 |
Technique and apparatus for monitoring ion mass, energy, and angle in processing systems
Grant 8,698,107 - Godet , et al. April 15, 2 | 2014-04-15 |
Technique for processing a substrate having a non-planar surface
Grant 8,679,960 - Papasouliotis , et al. March 25, 2 | 2014-03-25 |
Technique For Forming A FinFET Device
App 20140080276 - Brand; Adam ; et al. | 2014-03-20 |
Plasma processing apparatus
Grant 8,664,098 - Godet , et al. March 4, 2 | 2014-03-04 |
Plasma attenuation for uniformity control
Grant 8,659,229 - Kurunczi , et al. February 25, 2 | 2014-02-25 |
Anisotropic Surface Energy Modulation By Ion Implantation
App 20140037858 - Ma; Tristan ; et al. | 2014-02-06 |
Method And System For Ion-assisted Processing
App 20140038393 - Godet; Ludovic ; et al. | 2014-02-06 |
Enhanced Etch And Deposition Profile Control Using Plasma Sheath Engineering
App 20140034611 - Godet; Ludovic ; et al. | 2014-02-06 |
Three Dimensional Metal Deposition Technique
App 20140027274 - Godet; Ludovic ; et al. | 2014-01-30 |
Techniques For Treating Sidewalls Of Patterned Structures Using Angled Ion Treatment
App 20140017817 - Godet; Ludovic ; et al. | 2014-01-16 |
Plasma processing apparatus
Grant 8,623,171 - Godet , et al. January 7, 2 | 2014-01-07 |
Enhanced etch and deposition profile control using plasma sheath engineering
Grant 8,603,591 - Godet , et al. December 10, 2 | 2013-12-10 |
Method for patterning a substrate using ion assisted selective depostion
Grant 8,592,230 - Ramappa , et al. November 26, 2 | 2013-11-26 |
Plasma Potential Modulated ION Implantation Apparatus
App 20130287963 - Radovanov; Svetlana B. ; et al. | 2013-10-31 |
Method and system for post-etch treatment of patterned substrate features
Grant 8,460,569 - Godet , et al. June 11, 2 | 2013-06-11 |
Apparatus and method for controllably implanting workpieces
Grant 8,461,030 - Renau , et al. June 11, 2 | 2013-06-11 |
Method and system for modifying photoresist using electromagnetic radiation and ion implantation
Grant 8,435,727 - Godet , et al. May 7, 2 | 2013-05-07 |
USJ techniques with helium-treated substrates
Grant 8,372,735 - Hatem , et al. February 12, 2 | 2013-02-12 |
Method and system for controlling critical dimension and roughness in resist features
Grant 8,354,655 - Godet , et al. January 15, 2 | 2013-01-15 |
Apparatus and method for three dimensional ion processing
Grant 8,288,741 - Miller , et al. October 16, 2 | 2012-10-16 |
N-type doping of zinc telluride
Grant 8,288,255 - Lu , et al. October 16, 2 | 2012-10-16 |
Workpiece patterning with plasma sheath modulation
Grant 8,187,979 - Ramappa , et al. May 29, 2 | 2012-05-29 |
Ion source
Grant 8,188,445 - Godet , et al. May 29, 2 | 2012-05-29 |
Method and system for modifying patterned photoresist using multi-step ion implantation
Grant 8,133,804 - Godet , et al. March 13, 2 | 2012-03-13 |
USJ techniques with helium-treated substrates
Grant 8,124,506 - Hatem , et al. February 28, 2 | 2012-02-28 |
Plasma processing apparatus
Grant 8,101,510 - Godet , et al. January 24, 2 | 2012-01-24 |
Particle beam assisted modification of thin film materials
Grant 8,003,498 - England , et al. August 23, 2 | 2011-08-23 |
Ion implantation with heavy halogenide compounds
Grant 7,927,986 - Godet , et al. April 19, 2 | 2011-04-19 |
Monitoring plasma ion implantation systems for fault detection and process control
Grant 7,878,145 - Fang , et al. February 1, 2 | 2011-02-01 |
Ion source
Grant 7,767,977 - Godet , et al. August 3, 2 | 2010-08-03 |
Profile adjustment in plasma ion implanter
Grant 7,687,787 - Godet , et al. March 30, 2 | 2010-03-30 |
Closed loop control and process optimization in plasma doping processes using a time of flight ion detector
Grant 7,586,100 - Raj , et al. September 8, 2 | 2009-09-08 |
Technique for monitoring and controlling a plasma process
Grant 7,476,849 - Koo , et al. January 13, 2 | 2009-01-13 |
Technique for monitoring and controlling a plasma process
Grant 7,453,059 - Koo , et al. November 18, 2 | 2008-11-18 |
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