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Contact source/drain resistance Grant 11,322,588 - Lie , et al. May 3, 2 | 2022-05-03 |
Large grain copper interconnect lines for MRAM Grant 11,309,216 - Reznicek , et al. April 19, 2 | 2022-04-19 |
Sloped epitaxy buried contact Grant 11,227,922 - Li , et al. January 18, 2 | 2022-01-18 |
Sloped Epitaxy Buried Contact App 20210399098 - Li; Tao ;   et al. | 2021-12-23 |
Multiple nanosecond laser pulse anneal processes and resultant semiconductor structure Grant 11,201,061 - Dasgupta , et al. December 14, 2 | 2021-12-14 |
Analog Nonvolatile Memory Cells Using Dopant Activation App 20210343358 - Wu; Heng ;   et al. | 2021-11-04 |
Analog nonvolatile memory cells using dopant activation Grant 11,145,380 - Wu , et al. October 12, 2 | 2021-10-12 |
Laser Anneal For Mram Encapsulation Enhancement App 20210313511 - Rizzolo; Michael ;   et al. | 2021-10-07 |
Hybrid gate stack integration for stacked vertical transport field-effect transistors Grant 11,139,215 - Yamashita , et al. October 5, 2 | 2021-10-05 |
All-semiconductor Josephson Junction Device For Qubit Applications App 20210296557 - HOLMES; STEVEN J. ;   et al. | 2021-09-23 |
MRAM devices containing a harden gap fill dielectric material Grant 11,114,606 - Reznicek , et al. September 7, 2 | 2021-09-07 |
All-semiconductor Josephson junction device for qubit applications Grant 11,107,968 - Holmes , et al. August 31, 2 | 2021-08-31 |
Transistor and method of forming same Grant 11,088,280 - Basker , et al. August 10, 2 | 2021-08-10 |
Large Grain Copper Interconnect Lines For Mram App 20210233812 - Reznicek; Alexander ;   et al. | 2021-07-29 |
Self-aligned gate and junction for VTFET Grant 11,075,280 - Liu , et al. July 27, 2 | 2021-07-27 |
Soi FinFET fins with recessed fins and epitaxy in source drain region Grant 11,069,809 - Reznicek , et al. July 20, 2 | 2021-07-20 |
Laser anneal for MRAM encapsulation enhancement Grant 11,069,854 - Rizzolo , et al. July 20, 2 | 2021-07-20 |
EUV pattern transfer with ion implantation and reduced impact of resist residue Grant 11,031,246 - Mignot , et al. June 8, 2 | 2021-06-08 |
Tunable adhesion of EUV photoresist on oxide surface Grant 11,022,887 - Xu , et al. June 1, 2 | 2021-06-01 |
Low resistivity epitaxially formed contact region for nanosheet external resistance reduction Grant 11,004,984 - Wu , et al. May 11, 2 | 2021-05-11 |
Stackable Symmetrical Operation Memory Bit Cell Structure With Bidirectional Selectors App 20210118951 - Reznicek; Alexander ;   et al. | 2021-04-22 |
Uniform Horizontal Spacer App 20210119016 - Belyansky; Michael P. ;   et al. | 2021-04-22 |
Contact Source/drain Resistance App 20210111246 - Lie; Fee Li ;   et al. | 2021-04-15 |
Hybrid gate stack integration for stacked vertical transport field-effect transistors Grant 10,964,603 - Yamashita , et al. March 30, 2 | 2021-03-30 |
Low Resistivity Epitaxially Formed Contact Region For Nanosheet External Resistance Reduction App 20210091230 - Wu; Heng ;   et al. | 2021-03-25 |
Mram Devices Containing A Harden Gap Fill Dielectric Material App 20210091302 - Reznicek; Alexander ;   et al. | 2021-03-25 |
Uniform horizontal spacer Grant 10,957,781 - Belyansky , et al. March 23, 2 | 2021-03-23 |
Low parasitic capacitance and resistance finFET device Grant 10,930,780 - Gluschenkov , et al. February 23, 2 | 2021-02-23 |
Stackable symmetrical operation memory bit cell structure with bidirectional selectors Grant 10,910,435 - Reznicek , et al. February 2, 2 | 2021-02-02 |
Extreme ultraviolet lithography for high volume manufacture of a semiconductor device Grant 10,879,068 - Xu , et al. December 29, 2 | 2020-12-29 |
Bottom-up Curing Of Dielectric Films In Integrated Circuits App 20200388488 - Sil; Devika ;   et al. | 2020-12-10 |
Ion Implantation Assisted Curing For Flowable Porous Dielectrics App 20200388531 - Sil; Devika ;   et al. | 2020-12-10 |
Hybrid Gate Stack Integration For Stacked Vertical Transport Field-effect Transistors App 20200365469 - Yamashita; Tenko ;   et al. | 2020-11-19 |
Fast recrystallization of hafnium or zirconium based oxides in insulator-metal structures Grant 10,833,150 - Frank , et al. November 10, 2 | 2020-11-10 |
Stress modulation of nFET and pFET fin structures Grant 10,832,973 - Zhou , et al. November 10, 2 | 2020-11-10 |
Substantially defect free relaxed heterogeneous semiconductor fins on bulk substrates Grant 10,833,192 - Basker , et al. November 10, 2 | 2020-11-10 |
Self-Aligned Gate and Junction for VTFET App 20200335601 - Liu; Zuoguang ;   et al. | 2020-10-22 |
Hybrid Gate Stack Integration For Stacked Vertical Transport Field-effect Transistors App 20200328127 - Yamashita; Tenko ;   et al. | 2020-10-15 |
High temperature ultra-fast annealed soft mask for semiconductor devices Grant 10,804,106 - Ebrish , et al. October 13, 2 | 2020-10-13 |
Contact formation through low-tempearature epitaxial deposition in semiconductor devices Grant 10,804,270 - Gluschenkov , et al. October 13, 2 | 2020-10-13 |
Stackable Symmetrical Operation Memory Bit Cell Structure With Bidirectional Selectors App 20200312906 - Reznicek; Alexander ;   et al. | 2020-10-01 |
Stacked Vertical Field-effect Transistors With Sacrificial Layer Patterning App 20200303263 - Zhang; Chen ;   et al. | 2020-09-24 |
Self aligned top extension formation for vertical transistors Grant 10,784,371 - Gluschenkov , et al. Sept | 2020-09-22 |
Low thermal budget top source and drain region formation for vertical transistors Grant 10,777,464 - Reznicek , et al. Sept | 2020-09-15 |
Stacked vertical field-effect transistors with sacrificial layer patterning Grant 10,777,468 - Zhang , et al. Sept | 2020-09-15 |
Stress Modulation Of Nfet And Pfet Fin Structures App 20200266111 - Zhou; Huimei ;   et al. | 2020-08-20 |
Euv Pattern Transfer With Ion Implantation And Reduced Impact Of Resist Residue App 20200251338 - Kind Code | 2020-08-06 |
Substantially defect free relaxed heterogeneous semiconductor fins on bulk substrates Grant 10,734,518 - Basker , et al. | 2020-08-04 |
Vertical transport field-effect transistor architecture Grant 10,692,768 - Rubin , et al. | 2020-06-23 |
Contact formation through low-temperature epitaxial deposition in semiconductor devices Grant 10,692,868 - Gluschenkov , et al. | 2020-06-23 |
Contact formation in semiconductor devices Grant 10,685,961 - Gluschenkov , et al. | 2020-06-16 |
Stress modulation of nFET and pFET fin structures Grant 10,665,512 - Zhou , et al. | 2020-05-26 |
EUV pattern transfer with ion implantation and reduced impact of resist residue Grant 10,658,180 - Mignot , et al. | 2020-05-19 |
Self aligned top extension formation for vertical transistors Grant 10,651,308 - Gluschenkov , et al. | 2020-05-12 |
Low thermal budget top source and drain region formation for vertical transistors Grant 10,651,089 - Reznicek , et al. | 2020-05-12 |
Euv Pattern Transfer With Ion Implantation And Reduced Impact Of Resist Residue App 20200144061 - Mignot; Yann ;   et al. | 2020-05-07 |
Semiconductor chip including integrated security circuit Grant 10,643,006 - Cheng , et al. | 2020-05-05 |
Stress Modulation Of Nfet And Pfet Fin Structures App 20200126867 - Zhou; Huimei ;   et al. | 2020-04-23 |
Laser Anneal For Mram Encapsulation Enhancement App 20200119263 - Rizzolo; Michael ;   et al. | 2020-04-16 |
Structure and method to form defect free high-mobility semiconductor fins on insulator Grant 10,622,379 - Basker , et al. | 2020-04-14 |
Contact formation in semiconductor devices Grant 10,586,769 - Gluschenkov , et al. | 2020-03-10 |
Tunable Adhesion Of Euv Photoresist On Oxide Surface App 20200073246 - Xu; Yongan ;   et al. | 2020-03-05 |
Low Thermal Budget Top Source And Drain Region Formation For Vertical Transistors App 20200066594 - Reznicek; Alexander ;   et al. | 2020-02-27 |
Uniform Horizontal Spacer App 20200044054 - Belyansky; Michael P. ;   et al. | 2020-02-06 |
Multiple nanosecond laser pulse anneal processes and resultant semiconductor structure Grant 10,553,439 - Dasgupta , et al. Fe | 2020-02-04 |
Tunable adhesion of EUV photoresist on oxide surface Grant 10,551,742 - Xu , et al. Fe | 2020-02-04 |
Fast Recrystallization Of Hafnium Or Zirconium Based Oxides In Insulator-metal Structures App 20200020762 - Frank; Martin M. ;   et al. | 2020-01-16 |
Method of forming vertical transistor having dual bottom spacers Grant 10,529,828 - Gluschenkov , et al. J | 2020-01-07 |
Self Aligned Top Extension Formation For Vertical Transistors App 20190386137 - Gluschenkov; Oleg ;   et al. | 2019-12-19 |
Multiple Nanosecond Laser Pulse Anneal Processes And Resultant Semiconductor Structure App 20190385857 - DASGUPTA; Aritra ;   et al. | 2019-12-19 |
CMOS VFET contacts with trench solid and liquid phase epitaxy Grant 10,510,617 - Gluschenkov , et al. Dec | 2019-12-17 |
Extreme Ultraviolet Lithography For High Volume Manufacture Of A Semiconductor Device App 20190348281 - Xu; Yongan ;   et al. | 2019-11-14 |
LOW PARASITIC CAPACITANCE AND RESISTANCE finFET DEVICE App 20190305131 - Gluschenkov; Oleg ;   et al. | 2019-10-03 |
Cmos Vfet Contacts With Trench Solid And Liquid Phase Epitaxy App 20190279913 - GLUSCHENKOV; Oleg ;   et al. | 2019-09-12 |
High Temperature Ultra-fast Annealed Soft Mask For Semiconductor Devices App 20190259616 - Ebrish; Mona ;   et al. | 2019-08-22 |
Reducing series resistance between source and/or drain regions and a channel region Grant 10,388,789 - Ebrish , et al. A | 2019-08-20 |
Low Thermal Budget Top Source And Drain Region Formation For Vertical Transistors App 20190252260 - Reznicek; Alexander ;   et al. | 2019-08-15 |
Low resistance source drain contact formation Grant 10,381,442 - Gluschenkov , et al. A | 2019-08-13 |
Low parasitic capacitance and resistance finFET device Grant 10,374,088 - Gluschenkov , et al. | 2019-08-06 |
High acceptor level doping in silicon germanium Grant 10,361,306 - Ebrish , et al. | 2019-07-23 |
Contact Formation In Semiconductor Devices App 20190221565 - Gluschenkov; Oleg ;   et al. | 2019-07-18 |
Contact formation in semiconductor devices Grant 10,347,581 - Gluschenkov , et al. July 9, 2 | 2019-07-09 |
Tunable Adhesion Of Euv Photoresist On Oxide Surface App 20190187565 - Xu; Yongan ;   et al. | 2019-06-20 |
Low Resistance Source Drain Contact Formation with Trench Metastable Alloys and Laser Annealing App 20190181012 - Gluschenkov; Oleg ;   et al. | 2019-06-13 |
Reducing series resistance between source and/or drain regions and a channel region Grant 10,319,855 - Ebrish , et al. | 2019-06-11 |
Contact formation in semiconductor devices Grant 10,319,722 - Gluschenkov , et al. | 2019-06-11 |
Method Of Forming Vertical Transistor Having Dual Bottom Spacers App 20190172928 - Gluschenkov; Oleg ;   et al. | 2019-06-06 |
Gate top spacer for FinFET Grant 10,297,614 - Basker , et al. | 2019-05-21 |
Contact Formation In Semiconductor Devices App 20190148299 - Gluschenkov; Oleg ;   et al. | 2019-05-16 |
Contact Formation Through Low-tempearature Epitaxial Deposition In Semiconductor Devices App 20190148377 - Gluschenkov; Oleg ;   et al. | 2019-05-16 |
Substantially Defect Free Relaxed Heterogeneous Semiconductor Fins On Bulk Substrates App 20190148549 - Basker; Veeraraghavan S. ;   et al. | 2019-05-16 |
Substantially Defect Free Relaxed Heterogeneous Semiconductor Fins On Bulk Substrates App 20190123199 - Basker; Veeraraghavan S. ;   et al. | 2019-04-25 |
Vertical transistor top epitaxy source/drain and contact structure Grant 10,269,652 - Gluschenkov , et al. | 2019-04-23 |
Contact Formation Through Low-tempearature Epitaxial Deposition In Semiconductor Devices App 20190115347 - Gluschenkov; Oleg ;   et al. | 2019-04-18 |
Vertical transistor top epitaxy source/drain and contact structure Grant 10,262,904 - Gluschenkov , et al. | 2019-04-16 |
Low resistance source drain contact formation with trench metastable alloys and laser annealing Grant 10,249,502 - Gluschenkov , et al. | 2019-04-02 |
Reducing Series Resistance Between Source And/or Drain Regions And A Channel Region App 20190097049 - Ebrish; Mona A. ;   et al. | 2019-03-28 |
Reducing Series Resistance Between Source And/or Drain Regions And A Channel Region App 20190097050 - Ebrish; Mona A. ;   et al. | 2019-03-28 |
Method of forming vertical transistor having dual bottom spacers Grant 10,236,360 - Gluschenkov , et al. | 2019-03-19 |
Low resistance source/drain contacts for complementary metal oxide semiconductor (CMOS) devices Grant 10,211,207 - Adusumilli , et al. Feb | 2019-02-19 |
Substantially defect free relaxed heterogeneous semiconductor fins on bulk substrates Grant 10,170,620 - Basker , et al. J | 2019-01-01 |
Semiconductor Chip Including Integrated Security Circuit App 20180365450 - CHENG; KANGGUO ;   et al. | 2018-12-20 |
Low resistance source/drain contacts for complementary metal oxide semiconductor (CMOS) devices Grant 10,141,308 - Adusumilli , et al. Nov | 2018-11-27 |
Gate top spacer for finFET Grant 10,134,763 - Basker , et al. November 20, 2 | 2018-11-20 |
Self Aligned Top Extension Formation For Vertical Transistors App 20180331216 - Gluschenkov; Oleg ;   et al. | 2018-11-15 |
Forming a contact for a semiconductor device Grant 10,115,824 - Gluschenkov , et al. October 30, 2 | 2018-10-30 |
Etch-resistant spacer formation on gate structure Grant 10,109,722 - Xie , et al. October 23, 2 | 2018-10-23 |
Contact Formation In Semiconductor Devices App 20180277483 - Gluschenkov; Oleg ;   et al. | 2018-09-27 |
Contact Formation In Semiconductor Devices App 20180277541 - Gluschenkov; Oleg ;   et al. | 2018-09-27 |
Vertical Transistor Top Epitaxy Source/drain And Contact Structure App 20180277446 - Gluschenkov; Oleg ;   et al. | 2018-09-27 |
Vertical Transistor Top Epitaxy Source/drain And Contact Structure App 20180277445 - Gluschenkov; Oleg ;   et al. | 2018-09-27 |
Self aligned top extension formation for vertical transistors Grant 10,079,299 - Gluschenkov , et al. September 18, 2 | 2018-09-18 |
Low Resistance Source/drain Contacts For Complementary Metal Oxide Semiconductor (cmos) Devices App 20180261597 - Adusumilli; Praneet ;   et al. | 2018-09-13 |
Low Resistance Source/drain Contacts For Complementary Metal Oxide Semiconductor (cmos) Devices App 20180261598 - Adusumilli; Praneet ;   et al. | 2018-09-13 |
Etch-resistant Spacer Formation On Gate Structure App 20180254331 - Xie; Ruilong ;   et al. | 2018-09-06 |
Silicon germanium fins on insulator formed by lateral recrystallization Grant 10,068,920 - Reznicek , et al. September 4, 2 | 2018-09-04 |
Gallium Implantation Cleaning Method App 20180247800 - Gluschenkov; Oleg ;   et al. | 2018-08-30 |
Gallium Implantation Cleaning Method App 20180247801 - Gluschenkov; Oleg ;   et al. | 2018-08-30 |
Low Resistance Source Drain Contact Formation App 20180240875 - Gluschenkov; Oleg ;   et al. | 2018-08-23 |
Structure And Method To Form Defect Free High-mobility Semiconductor Fins On Insulator App 20180219026 - Basker; Veeraraghavan S. ;   et al. | 2018-08-02 |
Silicon germanium heterojunction bipolar transistor structure and method Grant 10,032,883 - Gluschenkov , et al. July 24, 2 | 2018-07-24 |
Method Of Forming Vertical Transistor Having Dual Bottom Spacers App 20180190794 - GLUSCHENKOV; OLEG ;   et al. | 2018-07-05 |
Soi Finfet Fins With Recessed Fins And Epitaxy In Source Drain Region App 20180175197 - REZNICEK; Alexander ;   et al. | 2018-06-21 |
Gate stack formed with interrupted deposition processes and laser annealing Grant 9,997,610 - Ando , et al. June 12, 2 | 2018-06-12 |
Gate stack formed with interrupted deposition processes and laser annealing Grant 9,997,361 - Ando , et al. June 12, 2 | 2018-06-12 |
Voidless contact metal structures Grant 9,997,407 - Basker , et al. June 12, 2 | 2018-06-12 |
Wafer stress control and topography compensation Grant 9,997,348 - Brunner , et al. June 12, 2 | 2018-06-12 |
Fin field effect transistor structure and method to form defect free merged source and drain epitaxy for low external resistance Grant 9,985,114 - Basker , et al. May 29, 2 | 2018-05-29 |
Gate Top Spacer For Finfet App 20180145092 - Basker; Veeraraghavan S. ;   et al. | 2018-05-24 |
Low resistance source/drain contacts for complementary metal oxide semiconductor (CMOS) devices Grant 9,978,750 - Adusumilli , et al. May 22, 2 | 2018-05-22 |
Low resistance source drain contact formation Grant 9,972,682 - Gluschenkov , et al. May 15, 2 | 2018-05-15 |
Forming A Contact For A Semiconductor Device App 20180114861 - Gluschenkov; Oleg ;   et al. | 2018-04-26 |
Bottom Spacer Formation For Vertical Transistor App 20180114860 - Gluschenkov; Oleg ;   et al. | 2018-04-26 |
Self Aligned Top Extension Formation For Vertical Transistors App 20180114859 - Gluschenkov; Oleg ;   et al. | 2018-04-26 |
Bottom spacer formation for vertical transistor Grant 9,954,103 - Gluschenkov , et al. April 24, 2 | 2018-04-24 |
Structure and method to form defect free high-mobility semiconductor fins on insulator Grant 9,941,302 - Basker , et al. April 10, 2 | 2018-04-10 |
Method of forming vertical transistor having dual bottom spacers Grant 9,941,391 - Gluschenkov , et al. April 10, 2 | 2018-04-10 |
Transistor And Method Of Forming Same App 20180097112 - Basker; Veeraraghavan S. ;   et al. | 2018-04-05 |
Multiple Nanosecond Laser Pulse Anneal Processes And Resultant Semiconductor Structure App 20180090328 - DASGUPTA; Aritra ;   et al. | 2018-03-29 |
Wafer Stress Control And Topography Compensation App 20180090307 - Brunner; Timothy A. ;   et al. | 2018-03-29 |
Forming a contact for a semiconductor device Grant 9,917,060 - Gluschenkov , et al. March 13, 2 | 2018-03-13 |
Transistor and method of forming same Grant 9,911,849 - Basker , et al. March 6, 2 | 2018-03-06 |
SOI FinFET fins with recessed fins and epitaxy in source drain region Grant 9,905,692 - Reznicek , et al. February 27, 2 | 2018-02-27 |
Gate Top Spacer For Finfet App 20180047754 - Basker; Veeraraghavan S. ;   et al. | 2018-02-15 |
Method Of Forming Vertical Transistor Having Dual Bottom Spacers App 20180047828 - GLUSCHENKOV; OLEG ;   et al. | 2018-02-15 |
High Acceptor Level Doping In Silicon Germanium App 20180026128 - Ebrish; Mona Abdulkhaleg ;   et al. | 2018-01-25 |
Multiple nanosecond laser pulse anneal processes and resultant semiconductor structure Grant 9,859,121 - Dasgupta , et al. January 2, 2 | 2018-01-02 |
Voidless contact metal structures Grant 9,859,216 - Basker , et al. January 2, 2 | 2018-01-02 |
Soi Finfet Fins With Recessed Fins And Epitaxy In Source Drain Region App 20170338345 - REZNICEK; Alexander ;   et al. | 2017-11-23 |
Substantially Defect Free Relaxed Heterogeneous Semiconductor Fins On Bulk Substrates App 20170338344 - Basker; Veeraraghavan S. ;   et al. | 2017-11-23 |
Structure And Method To Form Defect Free High-mobility Semiconductor Fins On Insulator App 20170309647 - Basker; Veeraraghavan S. ;   et al. | 2017-10-26 |
Localized elastic strain relaxed buffer Grant 9,799,513 - Basker , et al. October 24, 2 | 2017-10-24 |
High acceptor level doping in silicon germanium Grant 9,799,736 - Ebrish , et al. October 24, 2 | 2017-10-24 |
Silicon Germanium Fins On Insulator Formed By Lateral Recrystallization App 20170301697 - Reznicek; Alexander ;   et al. | 2017-10-19 |
Bottom spacer formation for vertical transistor Grant 9,773,901 - Gluschenkov , et al. September 26, 2 | 2017-09-26 |
Vertical transistor bottom spacer formation Grant 9,748,359 - Gluschenkov , et al. August 29, 2 | 2017-08-29 |
Self aligned top extension formation for vertical transistors Grant 9,748,382 - Gluschenkov , et al. August 29, 2 | 2017-08-29 |
Integrated Circuit Having Improved Electromigration Performance And Method Of Forming Same App 20170236780 - Nag; Joyeeta ;   et al. | 2017-08-17 |
Low Resistance Source Drain Contact Formation App 20170213889 - Gluschenkov; Oleg ;   et al. | 2017-07-27 |
Low Resistance Source Drain Contact Formation with Trench Metastable Alloys and Laser Annealing App 20170213739 - Gluschenkov; Oleg ;   et al. | 2017-07-27 |
Semiconductor wafer probing system including pressure sensing and control unit Grant 9,702,930 - Edwards , et al. July 11, 2 | 2017-07-11 |
Localized Elastic Strain Relaxed Buffer App 20170170014 - Basker; Veeraraghavan S. ;   et al. | 2017-06-15 |
Voidless Contact Metal Structures App 20170170064 - Basker; Veeraraghavan S. ;   et al. | 2017-06-15 |
Voidless Contact Metal Structures App 20170170119 - Basker; Veeraraghavan S. ;   et al. | 2017-06-15 |
Integrated circuit having improved electromigration performance and method of forming same Grant 9,679,810 - Nag , et al. June 13, 2 | 2017-06-13 |
Fin Field Effect Transistor Structure And Method To Form Defect Free Merged Source And Drain Epitaxy For Low External Resistance App 20170162671 - Basker; Veeraraghavan S. ;   et al. | 2017-06-08 |
Transistor And Method Of Forming Same App 20170162694 - Basker; Veeraraghavan S. ;   et al. | 2017-06-08 |
Gate Stack Formed With Interrupted Deposition Processes And Laser Annealing App 20170140940 - ANDO; Takashi ;   et al. | 2017-05-18 |
Gate Stack Formed With Interrupted Deposition Processes And Laser Annealing App 20170133477 - ANDO; Takashi ;   et al. | 2017-05-11 |
Laser anneal of buried metallic interconnects including through silicon vias Grant 9,620,396 - Gluschenkov , et al. April 11, 2 | 2017-04-11 |
Fin field effect transistor structure and method to form defect free merged source and drain epitaxy for low external resistance Grant 9,620,416 - Basker , et al. April 11, 2 | 2017-04-11 |
Gate stack formed with interrupted deposition processes and laser annealing Grant 9,613,870 - Ando , et al. April 4, 2 | 2017-04-04 |
Gate stack formed with interrupted deposition processes and laser annealing Grant 9,613,866 - Ando , et al. April 4, 2 | 2017-04-04 |
Localized elastic strain relaxed buffer Grant 9,570,298 - Basker , et al. February 14, 2 | 2017-02-14 |
Gate Stack Formed With Interrupted Deposition Processes And Laser Annealing App 20170005006 - ANDO; Takashi ;   et al. | 2017-01-05 |
Gate Stack Formed With Interrupted Deposition Processes And Laser Annealing App 20170005003 - ANDO; Takashi ;   et al. | 2017-01-05 |
Multiple Nanosecond Laser Pulse Anneal Processes And Resultant Semiconductor Structure App 20160379830 - DASGUPTA; Aritra ;   et al. | 2016-12-29 |
LOW PARASITIC CAPACITANCE AND RESISTANCE finFET DEVICE App 20160372596 - Gluschenkov; Oleg ;   et al. | 2016-12-22 |
Configurable interposer Grant 9,524,930 - Gluschenkov , et al. December 20, 2 | 2016-12-20 |
Silicon Germanium Heterojunction Bipolar Transistor Structure And Method App 20160351682 - Gluschenkov; Oleg ;   et al. | 2016-12-01 |
Laser anneal of buried metallic interconnects including through silicon vias Grant 9,455,185 - Gluschenkov , et al. September 27, 2 | 2016-09-27 |
Dual pulse driven extreme ultraviolet (EUV) radiation source method Grant 9,451,684 - Corliss , et al. September 20, 2 | 2016-09-20 |
Silicon germanium heterojunction bipolar transistor structure and method Grant 9,450,069 - Gluschenkov , et al. September 20, 2 | 2016-09-20 |
Voidless contact metal structures Grant 9,449,921 - Basker , et al. September 20, 2 | 2016-09-20 |
Asymmetric field effect transistor cap layer Grant 9,431,534 - Breil , et al. August 30, 2 | 2016-08-30 |
Constrained nanosecond laser anneal of metal interconnect structures Grant 9,412,658 - Gluschenkov , et al. August 9, 2 | 2016-08-09 |
Pressure Sensing And Control For Semiconductor Wafer Probing App 20160216321 - Edwards; Robert D. ;   et al. | 2016-07-28 |
Dual Pulse Driven Extreme Ultraviolet (euv) Radiation Source App 20160205757 - Corliss; Daniel A. ;   et al. | 2016-07-14 |
Tall relaxed high percentage silicon germanium fins on insulator Grant 9,378,952 - Basker , et al. June 28, 2 | 2016-06-28 |
Alignment data based process control system Grant 9,360,858 - Ausschnitt , et al. June 7, 2 | 2016-06-07 |
Asymmetric Field Effect Transistor Cap Layer App 20160155845 - Breil; Nicolas L. ;   et al. | 2016-06-02 |
Pressure sensing and control for semiconductor wafer probing Grant 9,354,252 - Edwards , et al. May 31, 2 | 2016-05-31 |
Wafer thinning endpoint detection for TSV technology Grant 9,349,661 - Ding , et al. May 24, 2 | 2016-05-24 |
Optimization of a laser anneal beam path for maximizing chip yield Grant 9,335,759 - Breil , et al. May 10, 2 | 2016-05-10 |
Dual pulse driven extreme ultraviolet (EUV) radiation source utilizing a droplet comprising a metal core with dual concentric shells of buffer gas Grant 9,301,381 - Corliss , et al. March 29, 2 | 2016-03-29 |
Constrained Nanosecond Laser Anneal Of Metal Interconnect Structures App 20160086849 - Gluschenkov; Oleg ;   et al. | 2016-03-24 |
Dual Pulse Driven Extreme Ultraviolet (euv) Radiation Source Utilizing A Droplet Comprising A Metal Core With Dual Concentric Shells Of Buffer Gas App 20160081174 - Corliss; Daniel A. ;   et al. | 2016-03-17 |
Gas Cluster Reactor For Anisotropic Film Growth App 20160071723 - Gluschenkov; Oleg ;   et al. | 2016-03-10 |
Gas cluster reactor for anisotropic film growth Grant 9,275,866 - Gluschenkov , et al. March 1, 2 | 2016-03-01 |
Gas Cluster Reactor For Anisotropic Film Growth App 20150376791 - Gluschenkov; Oleg ;   et al. | 2015-12-31 |
Gas Cluster Reactor For Anisotropic Film Growth App 20150332927 - Gluschenkov; Oleg ;   et al. | 2015-11-19 |
Dual Silicide Integration With Laser Annealing App 20150332936 - Breil; Nicolas L. ;   et al. | 2015-11-19 |
Yield enhancement for stacked chips through rotationally-connecting-interposer Grant 9,151,781 - Gluschenkov , et al. October 6, 2 | 2015-10-06 |
Optimization Of A Laser Anneal Beam Path For Maximizing Chip Yield App 20150227137 - BREIL; NICOLAS L. ;   et al. | 2015-08-13 |
Dual silicide integration with laser annealing Grant 9,093,424 - Breil , et al. July 28, 2 | 2015-07-28 |
Wafer Thinning Endpoint Detection For Tsv Technology App 20150206809 - Ding; Hanyi ;   et al. | 2015-07-23 |
Dual Silicide Integration With Laser Annealing App 20150171178 - Breil; Nicolas L. ;   et al. | 2015-06-18 |
Structure and method for mobility enhanced MOSFETs with unalloyed silicide Grant 9,059,316 - Liu , et al. June 16, 2 | 2015-06-16 |
Pressure Sensing And Control For Semiconductor Wafer Probing App 20150145544 - Edwards; Robert D. ;   et al. | 2015-05-28 |
Silicon device on SI:C-OI and SGOI and method of manufacture Grant 9,040,373 - Chidambarrao , et al. May 26, 2 | 2015-05-26 |
Pressure sensing and control for semiconductor wafer probing Grant 8,963,567 - Edwards , et al. February 24, 2 | 2015-02-24 |
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Structure and method for mobility enhanced MOSFETS with unalloyed silicide Grant 8,642,434 - Liu , et al. February 4, 2 | 2014-02-04 |
Application of cluster beam implantation for fabricating threshold voltage adjusted FETs Grant 8,557,652 - Gluschenkov , et al. October 15, 2 | 2013-10-15 |
Silicon Germanium Heterojunction Bipolar Transistor Structure And Method App 20130210210 - Gluschenkov; Oleg ;   et al. | 2013-08-15 |
Method of forming a semiconductor device having a cut-way hole to expose a portion of a hardmask layer Grant 8,507,346 - Burkhardt , et al. August 13, 2 | 2013-08-13 |
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Alignment Data Based Process Control System App 20130041494 - Ausschnitt; Christopher P. ;   et al. | 2013-02-14 |
Application Of Cluster Beam Implantation For Fabricating Threshold Voltage Adjusted Fets App 20130005126 - Gluschenkov; Oleg ;   et al. | 2013-01-03 |
Application of cluster beam implantation for fabricating threshold voltage adjusted FETs Grant 8,288,222 - Gluschenkov , et al. October 16, 2 | 2012-10-16 |
Configurable Interposer App 20120241977 - Gluschenkov; Oleg ;   et al. | 2012-09-27 |
Configurable interposer Grant 8,237,278 - Gluschenkov , et al. August 7, 2 | 2012-08-07 |
Application Of Cluster Beam Implantation For Fabricating Threshold Voltage Adjusted Fets App 20120187502 - Gluschenkov; Oleg ;   et al. | 2012-07-26 |
Method for manufacturing double gate finFET with asymmetric halo Grant 8,227,316 - Zhu , et al. July 24, 2 | 2012-07-24 |
Structure and method for mobility enhanced MOSFETs with unalloyed silicide Grant 8,217,423 - Liu , et al. July 10, 2 | 2012-07-10 |
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Structure And Method For Mobility Enhanced Mosfets With Unalloyed Silicide App 20120149159 - Liu; Yaocheng ;   et al. | 2012-06-14 |
Wafer Fill Patterns And Uses App 20120126294 - Burkhardt; Martin ;   et al. | 2012-05-24 |
Structure Of High-k Metal Gate Semiconductor Transistor App 20120098067 - Yin; Haizhou ;   et al. | 2012-04-26 |
Yield enhancement for stacked chips through rotationally-connecting-interposer Grant 8,159,247 - Gluschenkov , et al. April 17, 2 | 2012-04-17 |
Inline low-damage automated failure analysis Grant 8,111,903 - Herschbein , et al. February 7, 2 | 2012-02-07 |
Method for optimizing the routing of wafers/lots based on yield Grant 8,095,230 - Ouyang , et al. January 10, 2 | 2012-01-10 |
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Anti-halo compensation Grant 7,952,149 - Dokumaci , et al. May 31, 2 | 2011-05-31 |
Configurable Interposer App 20110115082 - Gluschenkov; Oleg ;   et al. | 2011-05-19 |
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Hybrid SOI/bulk semiconductor transistors Grant 7,923,782 - Zhu , et al. April 12, 2 | 2011-04-12 |
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Structure for on-chip electromigration monitoring system Grant 7,840,916 - Hsu , et al. November 23, 2 | 2010-11-23 |
Method for reducing overlap capacitance in field effect transistors Grant 7,824,989 - Zhu , et al. November 2, 2 | 2010-11-02 |
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Method for forming a multi-gate device with high k dielectric for channel top surface Grant 7,785,943 - Doris , et al. August 31, 2 | 2010-08-31 |
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Hybrid SOI/bulk semiconductor transistors Grant 7,767,503 - Zhu , et al. August 3, 2 | 2010-08-03 |
Silicon germanium heterojunction bipolar transistor structure and method Grant 7,750,371 - Gluschenkov , et al. July 6, 2 | 2010-07-06 |
Structure and method to improve channel mobility by gate electrode stress modification Grant 7,750,410 - Belyansky , et al. July 6, 2 | 2010-07-06 |
Silicon Germanium Heterojunction Bipolar Transistor Structure And Method App 20100159664 - Gluschenkov; Oleg ;   et al. | 2010-06-24 |
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Method for fabricating a semiconductor structure Grant 7,732,288 - Zhu , et al. June 8, 2 | 2010-06-08 |
Structure and method for monitoring and characterizing pattern density dependence on thermal absorption in a semiconductor manufacturing process Grant 7,719,005 - Ahsan , et al. May 18, 2 | 2010-05-18 |
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Method for reducing overlap capacitance in field effect transistors Grant 7,709,333 - Zhu , et al. May 4, 2 | 2010-05-04 |
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Semiconductor device and method of manufacture Grant 7,615,435 - Gluschenkov , et al. November 10, 2 | 2009-11-10 |
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Highly manufacturable SRAM cells in substrates with hybrid crystal orientation Grant 7,605,447 - Doris , et al. October 20, 2 | 2009-10-20 |
Method of producing highly strained PECVD silicon nitride thin films at low temperature Grant 7,585,704 - Belyansky , et al. September 8, 2 | 2009-09-08 |
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Silicon Germanium Heterojunction Bipolar Transistor Structure And Method App 20090108300 - Gluschenkov; Oleg ;   et al. | 2009-04-30 |
Integrated circuit chip with FETs having mixed body thickness and method of manufacture thereof Grant 7,521,760 - Joshi , et al. April 21, 2 | 2009-04-21 |
Method of forming an ultra-thin [[HfSiO]] metal silicate film for high performance CMOS applications and semiconductor structure formed in said method Grant 7,504,700 - Zhu , et al. March 17, 2 | 2009-03-17 |
Stressed semiconductor device structures having granular semiconductor material Grant 7,488,658 - Doris , et al. February 10, 2 | 2009-02-10 |
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Hybrid SOI-bulk semiconductor transistors Grant 7,452,761 - Zhu , et al. November 18, 2 | 2008-11-18 |
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On-chip electromigration monitoring system Grant 7,394,273 - Hsu , et al. July 1, 2 | 2008-07-01 |
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Semiconductor device structure with active regions having different surface directions and methods Grant 7,354,806 - Doris , et al. April 8, 2 | 2008-04-08 |
Structure for reducing overlap capacitance in field effect transistors Grant 7,355,245 - Zhu , et al. April 8, 2 | 2008-04-08 |
Multi-gate Device With High K Dielectric For Channel Top Surface App 20080070366 - Doris; Bruce B. ;   et al. | 2008-03-20 |
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Field effect transistors with dielectric source drain halo regions and reduced miller capacitance Grant 7,342,266 - Belyansky , et al. March 11, 2 | 2008-03-11 |
Single Ic-chip Design On Wafer With An Embedded Sensor Utilizing Rf Capabilities To Enable Real-time Data Transmission App 20080050847 - Gluschenkov; Oleg ;   et al. | 2008-02-28 |
Integrated Circuit Chip With Fets Having Mixed Body Thicknesses And Method Of Manufacture Thereof App 20080026512 - JOSHI; RAJIV V. ;   et al. | 2008-01-31 |
Field Effect Transistors With Dielectric Source Drain Halo Regions And Reduced Miller Capacitance App 20080020522 - Belyansky; Michael P. ;   et al. | 2008-01-24 |
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Method For Reducing Overlap Capacitance In Field Effect Transistors App 20070254443 - Zhu; Huilong ;   et al. | 2007-11-01 |
Integrated circuit chip with FETs having mixed body thicknesses and method of manufacture thereof Grant 7,285,480 - Joshi , et al. October 23, 2 | 2007-10-23 |
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Multiple Low And High K Gate Oxides On Single Gate For Lower Miller Capacitance And Improved Drive Current App 20070063277 - Belyansky; Michael P. ;   et al. | 2007-03-22 |
High performance FET with laterally thin extension Grant 7,176,116 - Cabral, Jr. , et al. February 13, 2 | 2007-02-13 |
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Vertical MOSFET SRAM cell App 20070007601 - Hsu; Louis L. ;   et al. | 2007-01-11 |
Forming gate oxides having multiple thicknesses Grant 7,160,771 - Chou , et al. January 9, 2 | 2007-01-09 |
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Vertical MOSFET SRAM cell Grant 7,138,685 - Hsu , et al. November 21, 2 | 2006-11-21 |
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Stressed semiconductor device structures having granular semiconductor material Grant 7,122,849 - Doris , et al. October 17, 2 | 2006-10-17 |
Method Of Producing Highly Strained Pecvd Silicon Nitride Thin Films At Low Temperature App 20060223290 - Belyansky; Michael P. ;   et al. | 2006-10-05 |
Gate electrode forming methods using conductive hard mask Grant 7,084,024 - Gluschenkov , et al. August 1, 2 | 2006-08-01 |
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SELF-ALIGNED LOW-k GATE CAP App 20060099783 - Gluschenkov; Oleg ;   et al. | 2006-05-11 |
Method for manufacturing tungsten/polysilicon word line structure in vertical DRAM Grant 7,030,012 - Divakaruni , et al. April 18, 2 | 2006-04-18 |
Nanocircuit and self-correcting etching method for fabricating same Grant 7,026,247 - Dokumaci , et al. April 11, 2 | 2006-04-11 |
Temperature stable metal nitride gate electrode Grant 7,023,064 - Park , et al. April 4, 2 | 2006-04-04 |
Trench capacitor vertical structure Grant 7,023,041 - La Rosa , et al. April 4, 2 | 2006-04-04 |
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Temperature stable metal nitride gate electrode App 20060040439 - Park; Dae-Gyu ;   et al. | 2006-02-23 |
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Nitride and polysilicon interface with titanium layer App 20060001162 - Schutz; Ronald J. ;   et al. | 2006-01-05 |
Oxidation method for altering a film structure and CMOS transistor structure formed therewith Grant 6,982,196 - Belyansky , et al. January 3, 2 | 2006-01-03 |
Structure and method to improve channel mobility by gate electrode stress modification App 20050282325 - Belyansky, Michael P. ;   et al. | 2005-12-22 |
Temperature Stable Metal Nitride Gate Electrode App 20050280099 - Park, Dae-Gyu ;   et al. | 2005-12-22 |
Structure and method to improve channel mobility by gate electrode stress modification Grant 6,977,194 - Belyansky , et al. December 20, 2 | 2005-12-20 |
Logic circuits having linear and cellular gate transistors Grant 6,975,133 - Chan , et al. December 13, 2 | 2005-12-13 |
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Pitcher-shaped active area for field effect transistor and method of forming same Grant 6,960,514 - Beintner , et al. November 1, 2 | 2005-11-01 |
Method For Manufacturing Tungsten/polysilicon Word Line Structure In Vertical Dram And Device Manufactured Thereby App 20050202672 - Divakaruni, Ramachandra ;   et al. | 2005-09-15 |
Mobility Enhanced Cmos Devices App 20050194699 - Belyansky, Michael P. ;   et al. | 2005-09-08 |
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High performance FET with laterally thin extension Grant 6,933,577 - Cabral, Jr. , et al. August 23, 2 | 2005-08-23 |
Method for forming a uniform distribution of nitrogen in silicon oxynitride gate dielectric Grant 6,930,060 - Chou , et al. August 16, 2 | 2005-08-16 |
High performance FET with laterally thin extension App 20050148142 - Cabral, Cyril JR. ;   et al. | 2005-07-07 |
Gate structure with independently tailored vertical doping profile Grant 6,911,384 - Dokumaci , et al. June 28, 2 | 2005-06-28 |
Gate metal recess for oxidation protection and parasitic capacitance reduction Grant 6,908,806 - Yang , et al. June 21, 2 | 2005-06-21 |
Forming gate oxides having multiple thicknesses App 20050118764 - Chou, Anthony I-Chih ;   et al. | 2005-06-02 |
Stressed Semiconductor Device Structures Having Granular Semiconductor Material App 20050106799 - Doris, Bruce B. ;   et al. | 2005-05-19 |
Trench isolation employing a doped oxide trench fill Grant 6,890,833 - Belyansky , et al. May 10, 2 | 2005-05-10 |
Structure and method to improve channel mobility by gate electrode stress modification App 20050093059 - Belyansky, Michael P. ;   et al. | 2005-05-05 |
Oxidation Method For Altering A Film Structure And Cmos Transistor Structure Formed Therewith App 20050093081 - Belyansky, Michael P. ;   et al. | 2005-05-05 |
High Performance Fet With Laterally Thin Extension App 20050087824 - Cabral, Cyril JR. ;   et al. | 2005-04-28 |
Nanocircuit and self-correcting etching method for fabricating same App 20050087809 - Dokumaci, Omer H. ;   et al. | 2005-04-28 |
Low-GIDL MOSFET structure and method for fabrication Grant 6,878,582 - Dokumaci , et al. April 12, 2 | 2005-04-12 |
High performance logic and high density embedded dram with borderless contact and antispacer Grant 6,873,010 - Chidambarrao , et al. March 29, 2 | 2005-03-29 |
Low-GIDL MOSFET structure and method for fabrication Grant 6,841,826 - Dokumaci , et al. January 11, 2 | 2005-01-11 |
Method For Forming A Uniform Distribution Of Nitrogen In Silicon Oxynitride Gate Dielectric App 20040256664 - Chou, Anthony I. ;   et al. | 2004-12-23 |
Low-GIDL MOSFET structure and method for fabrication App 20040248356 - Dokumaci, Omer H. ;   et al. | 2004-12-09 |
Trench isolation employing a doped oxide trench fill App 20040192009 - Belyansky, Michael ;   et al. | 2004-09-30 |
Pitcher-shaped active area for field effect transistor and method of forming same App 20040173858 - Beintner, Jochen ;   et al. | 2004-09-09 |
Amorphous and polycrystalline silicon nanolaminate App 20040171177 - Dokumaci, Omer H. ;   et al. | 2004-09-02 |