Patent | Date |
---|
Method For Producing Three-dimensional Structure, Method For Producing Vertical Transistor, Vertical Transistor Wafer, And Vertical Transistor Substrate App 20220093396 - KAMIJO; Kazutaka ;   et al. | 2022-03-24 |
Method For Measuring Extremely Low Oxygen Concentration In Silicon Wafer App 20220018761 - SAITO; Hiroyuki | 2022-01-20 |
Method For Heat-treating Silicon Wafer App 20210348302 - USHIODA; Aya ;   et al. | 2021-11-11 |
Thermal processing method for silicon wafer Grant 11,162,191 - Maeda , et al. November 2, 2 | 2021-11-02 |
Evaluation method of silicon wafer Grant 11,060,983 - Sudo , et al. July 13, 2 | 2021-07-13 |
Evaluation Method Of Metal Contamination App 20210082774 - ARAKI; Nobue ;   et al. | 2021-03-18 |
Evaluation Method Of Silicon Wafer App 20210055232 - SUDO; Haruo ;   et al. | 2021-02-25 |
Method of manufacturing epitaxial silicon wafers Grant 10,916,421 - Yamamoto , et al. February 9, 2 | 2021-02-09 |
Protective-film forming method for semiconductor substrate Grant 10,840,089 - Sakai , et al. November 17, 2 | 2020-11-17 |
Method For Producing Three-dimensional Structure, Method For Producing Vertical Transistor, Vertical Transistor Wafer, And Verti App 20200211840 - KAMIJO; Kazutaka ;   et al. | 2020-07-02 |
Protective-film Forming Method For Semiconductor Substrate App 20200203159 - SAKAI; Shin ;   et al. | 2020-06-25 |
Thermal Processing Method For Silicon Wafer App 20200181802 - MAEDA; Susumu ;   et al. | 2020-06-11 |
Silicon wafer Grant 10,648,101 - Maeda , et al. | 2020-05-12 |
Method Of Manufacturing Epitaxial Silicon Wafers App 20190393032 - YAMAMOTO; Jun ;   et al. | 2019-12-26 |
Calibration curve determination method, carbon concentration measurement method, and silicon wafer-manufacturing method Grant 10,330,599 - Nakagawa , et al. | 2019-06-25 |
Silicon Wafer App 20190119828 - MAEDA; Susumu ;   et al. | 2019-04-25 |
Silicon wafer and method for manufacturing the same Grant 10,141,180 - Araki , et al. Nov | 2018-11-27 |
Calibration Curve Determination Method, Carbon Concentration Measurement Method, And Silicon Wafer-manufacturing Method App 20180231468 - NAKAGAWA; Satoko ;   et al. | 2018-08-16 |
Calibration curve formation method, impurity concentration measurement method, and semiconductor wafer manufacturing method Grant 9,541,452 - Nakagawa , et al. January 10, 2 | 2017-01-10 |
Method For Manufacturing A Silicon Wafer App 20160293446 - SUDO; Haruo ;   et al. | 2016-10-06 |
Calibration Curve Formation Method, Impurity Concentration Measurement Method, And Semiconductor Wafer Manufacturing Method App 20150338276 - NAKAGAWA; Satoko ;   et al. | 2015-11-26 |
Silicon Wafer And Method For Manufacturing The Same App 20150044422 - ARAKI; Koji ;   et al. | 2015-02-12 |
Single crystal pulling-up apparatus of pulling-up silicon single crystal and single crystal pulling-up method of pulling-up silicon single crystal Grant 8,936,679 - Banba , et al. January 20, 2 | 2015-01-20 |
Silicon Single Crystal And Method For Manufacture Thereof App 20150017086 - NAGAI; Yuta ;   et al. | 2015-01-15 |
Silicon wafer Grant 8,642,449 - Watanabe , et al. February 4, 2 | 2014-02-04 |
Silicon Wafer App 20130251950 - Kaneda; Yuri | 2013-09-26 |
Method For Manufacturing Silicon Wafer App 20130175726 - MINAMI; Toshiro ;   et al. | 2013-07-11 |