Patent | Date |
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MEMS device mechanism enhancement for robust operation through severe shock and acceleration Grant 9,476,712 - Hanson , et al. October 25, 2 | 2016-10-25 |
Mems Device Mechanism Enhancement For Robust Operation Through Severe Shock And Acceleration App 20150033849 - Hanson; Timothy J. ;   et al. | 2015-02-05 |
Package Interface Plate For Package Isolation Structures App 20140065770 - Glenn; Max C. | 2014-03-06 |
Package interface plate for package isolation structures Grant 8,614,491 - Glenn December 24, 2 | 2013-12-24 |
Package Interface Plate For Package Isolation Structures App 20100252899 - Glenn; Max C. | 2010-10-07 |
Mems Sensor Package App 20100139373 - Braman; Todd L. ;   et al. | 2010-06-10 |
Frequency Shifting Of Rotational Harmonics In Mems Devices App 20080271532 - Platt; William P. ;   et al. | 2008-11-06 |
Chip Packaging Systems and Methods App 20080063505 - DCamp; Jon B. ;   et al. | 2008-03-13 |
Chip packaging systems and methods Grant 7,314,777 - DCamp , et al. January 1, 2 | 2008-01-01 |
Methods and apparatus for particle reduction in MEMS devices Grant 7,297,573 - DCamp , et al. November 20, 2 | 2007-11-20 |
Frequency Shifting Of Rotational Harmonics In Mems Devices App 20070163346 - Platt; William P. ;   et al. | 2007-07-19 |
Mems Sensor Package App 20070056370 - Braman; Todd L. ;   et al. | 2007-03-15 |
Getter deposition for vacuum packaging App 20060214247 - DCamp; Jon B. ;   et al. | 2006-09-28 |
Methods and apparatus for attaching getters to MEMS device housings Grant 7,074,636 - Curtis , et al. July 11, 2 | 2006-07-11 |
Chip packaging systems and methods App 20060105499 - DCamp; Jon B. ;   et al. | 2006-05-18 |
Methods and apparatus for attaching a die to a substrate Grant 7,037,805 - DCamp , et al. May 2, 2 | 2006-05-02 |
Methods and apparatus for particle reduction in MEMS devices App 20060076633 - DCamp; Jon B. ;   et al. | 2006-04-13 |
Methods and apparatus for particle reduction in MEMS devices Grant 6,987,304 - DCamp , et al. January 17, 2 | 2006-01-17 |
Methods and systems for simultaneously fabricating multi-frequency MEMS devices Grant 6,978,673 - Johnson , et al. December 27, 2 | 2005-12-27 |
Methods for reducing the curvature in boron-doped silicon micromachined structures Grant 6,969,425 - Cabuz , et al. November 29, 2 | 2005-11-29 |
Getter deposition for vacuum packaging App 20050253283 - DCamp, Jon B. ;   et al. | 2005-11-17 |
Methods and apparatus for attaching getters to MEMS device housings App 20050208739 - Curtis, Harlan L. ;   et al. | 2005-09-22 |
Methods for reducing the curvature in boron-doped silicon micromachined structures Grant 6,946,200 - Cabuz , et al. September 20, 2 | 2005-09-20 |
Methods and apparatus for attaching MEMS devices to housing Grant 6,927,098 - DCamp , et al. August 9, 2 | 2005-08-09 |
Methods and apparatus for attaching getters to MEMS device housings Grant 6,914,323 - Curtis , et al. July 5, 2 | 2005-07-05 |
Methods and systems for decelerating proof mass movements within MEMS structures Grant 6,865,944 - Glenn , et al. March 15, 2 | 2005-03-15 |
Methods and apparatus for attaching a die to a substrate App 20040232455 - DCamp, Jon B. ;   et al. | 2004-11-25 |
Methods and apparatus for attaching MEMS devices to housing App 20040223373 - DCamp, Jon B. ;   et al. | 2004-11-11 |
Methods and apparatus for particle reduction in MEMS devices App 20040222468 - DCamp, Jon B. ;   et al. | 2004-11-11 |
Methods and apparatus for attaching getters to MEMS device housings App 20040183177 - Curtis, Harlan L. ;   et al. | 2004-09-23 |
High-G acceleration protection by caging Grant 6,782,748 - Weber , et al. August 31, 2 | 2004-08-31 |
Methods and systems for simultaneously fabricating multi-frequency MEMS devices App 20040154400 - Johnson, Burgess R. ;   et al. | 2004-08-12 |
Methods And Systems For Decelerating Proof Mass Movements Within Mems Structures App 20040112133 - Glenn, Max C. ;   et al. | 2004-06-17 |
High-G acceleration protection by caging App 20040089069 - Weber, Mark W. ;   et al. | 2004-05-13 |
Methods for reducing the curvature in boron-doped silicon micromachined structures App 20030138588 - Cabuz, Cleopatra ;   et al. | 2003-07-24 |
Methods for reducing the curvature in boron-doped silicon micromachined structures App 20030129845 - Cabuz, Cleopatra ;   et al. | 2003-07-10 |
Methods and apparatus for sensing differential and gauge static pressure in a fluid flow line Grant 6,041,659 - Wilda , et al. March 28, 2 | 2000-03-28 |
Piezoresistive silicon pressure sensor manufacture implementing long diaphragms with large aspect ratios Grant 5,714,690 - Burns , et al. February 3, 1 | 1998-02-03 |
Piezoresistive silicon pressure sensor implementing long diaphragms with large aspect ratios Grant 5,485,753 - Burns , et al. January 23, 1 | 1996-01-23 |
Force sensor with attached mass Grant 4,891,985 - Glenn January 9, 1 | 1990-01-09 |
Multiple level miniature electromechanical accelerometer switch Grant 4,855,544 - Glenn August 8, 1 | 1989-08-08 |
Flip-chip pressure transducer Grant 4,763,098 - Glenn , et al. * August 9, 1 | 1988-08-09 |
Pressure transducer Grant 4,665,754 - Glenn , et al. May 19, 1 | 1987-05-19 |