| Patent | Date |
|---|
Substrate Handling Device For A Wafer
App 20220262668 - GLEISSNER; Andreas ; et al. | 2022-08-18 |
Method And Device For Plating A Recess In A Substrate
App 20220020591 - Markut; Franz ; et al. | 2022-01-20 |
Method and apparatus for processing wafer-shaped articles
Grant 11,195,730 - Obweger , et al. December 7, 2 | 2021-12-07 |
Method and device for plating a recess in a substrate
Grant 11,164,748 - Markut , et al. November 2, 2 | 2021-11-02 |
Substrate locking system, device and procedure for chemical and/or electrolytic surface treatment
Grant 11,136,687 - Gleissner , et al. October 5, 2 | 2021-10-05 |
Distribution system for chemical and/or electrolytic surface treatment
Grant 11,105,014 - Gleissner , et al. August 31, 2 | 2021-08-31 |
Substrate Locking System, Device And Procedure For Chemical And/or Electrolytic Surface Treatment
App 20210017662 - Gleissner; Andreas ; et al. | 2021-01-21 |
Method And Apparatus For Processing Wafer-shaped Articles
App 20200090956 - Obweger; Rainer ; et al. | 2020-03-19 |
Method and apparatus for processing wafer-shaped articles
Grant 10,490,426 - Obweger , et al. Nov | 2019-11-26 |
Method And Device For Plating A Recess In A Substrate
App 20190228975 - Markut; Franz ; et al. | 2019-07-25 |
Apparatus for treating surfaces of wafer-shaped articles
Grant 10,269,615 - Tschinderle , et al. | 2019-04-23 |
Substrate Locking System, Device And Procedure For Chemical And/or Electrolytic Surface Treatment
App 20190032234 - Gleissner; Andreas ; et al. | 2019-01-31 |
Distribution System For Chemical And/or Electrolytic Surface Treatment
App 20190032240 - GLEISSNER; ANDREAS ; et al. | 2019-01-31 |
Spin chuck with rotating gas showerhead
Grant 10,167,552 - Gleissner , et al. J | 2019-01-01 |
Apparatus for treating surfaces of wafer-shaped articles
Grant 10,056,287 - Tschinderle , et al. August 21, 2 | 2018-08-21 |
Spin chuck with in situ cleaning capability
Grant 9,968,970 - Gleissner , et al. May 15, 2 | 2018-05-15 |
Apparatus for treating surfaces of wafer-shaped articles
Grant 9,911,630 - Gleissner , et al. March 6, 2 | 2018-03-06 |
Apparatus for treating surfaces of wafer-shaped articles
Grant 9,887,120 - Gleissner , et al. February 6, 2 | 2018-02-06 |
Method and apparatus for processing wafer-shaped articles
Grant 9,887,122 - Si , et al. February 6, 2 | 2018-02-06 |
Method And Apparatus For Processing Wafer-shaped Articles
App 20170323823 - SI; Hongbo ; et al. | 2017-11-09 |
Spin Chuck With Gas Leakage Prevention
App 20170162426 - GLEISSNER; Andreas ; et al. | 2017-06-08 |
Spin Chuck With Heated Nozzle Assembly
App 20170162405 - GLEISSNER; Andreas | 2017-06-08 |
Spin Chuck With In Situ Cleaning Capability
App 20170162427 - GLEISSNER; Andreas ; et al. | 2017-06-08 |
Apparatus for treating surfaces of wafer-shaped articles
Grant 9,657,397 - Gleissner May 23, 2 | 2017-05-23 |
Apparatus For Treating Surfaces Of Wafer-shaped Articles
App 20170125266 - GLEISSNER; Andreas ; et al. | 2017-05-04 |
Apparatus For Treating Surfaces Of Wafer-shaped Articles
App 20170125281 - GLEISSNER; Andreas ; et al. | 2017-05-04 |
Device for treating surfaces of wafer-shaped articles and gripping pin for use in the device
Grant 9,633,890 - Tschinderle , et al. April 25, 2 | 2017-04-25 |
Apparatus for treating surfaces of wafer-shaped articles
Grant 9,597,701 - Obweger , et al. March 21, 2 | 2017-03-21 |
Apparatus for treating surfaces of wafer-shaped articles
Grant 9,548,223 - Frank , et al. January 17, 2 | 2017-01-17 |
Device for holding wafer shaped articles
Grant 9,418,883 - Gleissner , et al. August 16, 2 | 2016-08-16 |
Spin Chuck With Rotating Gas Showerhead
App 20160230278 - GLEISSNER; Andreas ; et al. | 2016-08-11 |
Method And Apparatus For Processing Wafer-shaped Articles
App 20160064242 - OBWEGER; Rainer ; et al. | 2016-03-03 |
Apparatus For Treating Surfaces Of Wafer-shaped Articles
App 20160027680 - TSCHINDERLE; Ulrich ; et al. | 2016-01-28 |
Apparatus For Treating Surfaces Of Wafer-shaped Articles
App 20150187624 - GLEISSNER; Andreas | 2015-07-02 |
Apparatus For Treating Surfaces Of Wafer-shaped Articles
App 20150187629 - OBWEGER; Rainer ; et al. | 2015-07-02 |
Device and method for treating wafer-shaped articles
Grant 8,974,632 - Tschinderle , et al. March 10, 2 | 2015-03-10 |
Device For Holding Wafer Shaped Articles
App 20150008632 - GLEISSNER; Andreas ; et al. | 2015-01-08 |
Apparatus For Treating Surfaces Of Wafer-shaped Articles
App 20140283994 - GLEISSNER; Andreas | 2014-09-25 |
Method And Apparatus For Processing Wafer-shaped Articles
App 20130319472 - FRANK; Dieter ; et al. | 2013-12-05 |
Apparatus And Method For Transporting Wafer-shaped Articles
App 20130309048 - GLEISSNER; Andreas | 2013-11-21 |
Closed chamber with fluid separation feature
Grant 8,485,204 - Obweger , et al. July 16, 2 | 2013-07-16 |
Apparatus For Treating Surfaces Of Wafer-shaped Articles
App 20130160260 - Frank; Dieter ; et al. | 2013-06-27 |
Device For Treating Surfaces Of Wafer-shaped Articles And Gripping Pin For Use In The Device
App 20130154203 - TSCHINDERLE; Ulrich ; et al. | 2013-06-20 |
Device And Method For Treating Wafer-shaped Articles
App 20130134128 - TSCHINDERLE; Ulrich ; et al. | 2013-05-30 |
Method And Apparatus For Processing Wafer-shaped Articles
App 20130101372 - TSCHINDERLE; Ulrich ; et al. | 2013-04-25 |
Apparatus For Treating Surfaces Of Wafer-shaped Articles
App 20130062839 - TSCHINDERLE; Ulrich ; et al. | 2013-03-14 |
Closed Chamber With Fluid Separation Feature
App 20110290283 - OBWEGER; Rainer ; et al. | 2011-12-01 |
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