Patent | Date |
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Apparatus and method for in-situ endpoint detection for semiconductor processing operations Grant 8,795,029 - Birang , et al. August 5, 2 | 2014-08-05 |
Transparent Window In A Polishing Pad App 20140038501 - Birang; Manoocher ;   et al. | 2014-02-06 |
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations Grant 8,506,356 - Birang , et al. August 13, 2 | 2013-08-13 |
Apparatus And Method For In-situ Endpoint Detection For Semiconductor Processing Operations App 20130130413 - Birang; Manoocher ;   et al. | 2013-05-23 |
Apparatus And Method For In-situ Endpoint Detection For Chemical Mechanical Polishing Operations App 20100297917 - Birang; Manoocher ;   et al. | 2010-11-25 |
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations Grant 7,775,852 - Birang , et al. August 17, 2 | 2010-08-17 |
Substrate polishing metrology using interference signals App 20080227367 - Birang; Manoocher ;   et al. | 2008-09-18 |
Polishing assembly with a window Grant 7,255,629 - Birang , et al. August 14, 2 | 2007-08-14 |
Polishing Assembly With A Window App 20070021037 - Birang; Manoocher ;   et al. | 2007-01-25 |
Apparatus and Method for In-Situ Endpoint Detection for Chemical Mechanical Polishing Operations App 20070015441 - Birang; Manoocher ;   et al. | 2007-01-18 |
Polishing pad with window and method of fabricating a window in a polishing pad Grant 7,118,450 - Birang , et al. October 10, 2 | 2006-10-10 |
Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus Grant 7,011,565 - Birang , et al. March 14, 2 | 2006-03-14 |
Method of fabricating a window in a polishing pad App 20060014476 - Birang; Manoocher ;   et al. | 2006-01-19 |
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations App 20050170751 - Birang, Manoocher ;   et al. | 2005-08-04 |
Method of forming a transparent window in a polishing pad Grant 6,910,944 - Birang , et al. June 28, 2 | 2005-06-28 |
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations Grant 6,876,454 - Birang , et al. April 5, 2 | 2005-04-05 |
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations Grant 6,875,078 - Birang , et al. April 5, 2 | 2005-04-05 |
Polishing pad for in-situ endpoint detection Grant 6,860,791 - Birang , et al. March 1, 2 | 2005-03-01 |
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations Grant 6,719,818 - Birang , et al. April 13, 2 | 2004-04-13 |
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations App 20040014395 - Birang, Manoocher ;   et al. | 2004-01-22 |
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations Grant 6,676,717 - Birang , et al. January 13, 2 | 2004-01-13 |
Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus App 20030190867 - Birang, Manoocher ;   et al. | 2003-10-09 |
Method for in-situ endpoint detection for chemical mechanical polishing operations Grant 6,537,133 - Birang , et al. March 25, 2 | 2003-03-25 |
Forming a transparent window in a polishing pad for a chemical mehcanical polishing apparatus App 20010036805 - Birang, Manoocher M.B. ;   et al. | 2001-11-01 |
Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus Grant 6,045,439 - Birang , et al. April 4, 2 | 2000-04-04 |
Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus Grant 5,893,796 - Birang , et al. April 13, 1 | 1999-04-13 |